The DOI matches its Crossref record; 1 of the 1 references it cites were found in a registry or an index.
Fabrication of Photonic Wire and Crystal Circuits in Silicon-on-Insulator Using 193-nm Optical Lithography
Abstract
High-index contrast silicon-on-insulator technology enables wavelength-scale compact photonic circuits. We report fabrication of photonic circuits in silicon-on-insulator using complementary metal-oxide-semiconductor processing technology. By switching from advanced optical lithography at 248 to 193 nm, combined with improved dry etching, a substantial improvement in process window, linearity, and proximity effect is achieved. With the developed fabrication process, propagation and bending loss of photonic wires were characterized. Measurements indicate a propagation loss of 2.7 dB/cm for 500-nm photonic wire and an excess bending loss of 0.013 dB/90deg bend of 5-mum radius. Through this paper, we demonstrate the suitability of high resolution optical lithography and dry etch processes for mass production of photonic integrated circuits.
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Projection Printing Characterization:
Bossung, J. W. (1977) · SPIE Proceedings · doi:10.1117/12.955357 · Cited by 57 · cited 1×
“picts the measured line width as a function of focus and exposure dose (so-called Bossung curve) [17].”
Background
Cited by
Bogaerts, W., De Heyn, P., Van Vaerenbergh, T., De Vos, K., Kumar Selvaraja, S., Claes, T., Dumon, P., Bienstman, P., Van Thourhout, D., & Baets, R. (2012) · Laser & Photonics Reviews · doi:10.1002/lpor.201100017 · Cited by 2,643
Self-citationNew CMOS-compatible platforms based on silicon nitride and Hydex for nonlinear optics
Moss, D. J., Morandotti, R., Gaeta, A. L., & Lipson, M. (2013) · Nature Photonics · doi:10.1038/nphoton.2013.183 · Cited by 1,792
Experimental demonstration of reservoir computing on a silicon photonics chip
Vandoorne, K., Mechet, P., Van Vaerenbergh, T., Fiers, M., Morthier, G., Verstraeten, D., Schrauwen, B., Dambre, J., & Bienstman, P. (2014) · Nature Communications · doi:10.1038/ncomms4541 · Cited by 892
Glucose sensing by waveguide-based absorption spectroscopy on a silicon chip
Ryckeboer, E., Bockstaele, R., Vanslembrouck, M., & Baets, R. (2014) · Biomedical Optics Express · doi:10.1364/boe.5.001636 · Cited by 105
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Metadata
- Authors
- Selvaraja, S. K., Jaenen, P., Bogaerts, W., Van Thourhout, D., Dumon, P., & Baets, R.
- Venue
- Journal of Lightwave Technology
- Published
- 2009-09
- Volume
- 27
- Issue
- 18
- Pages
- 4076-4083
- ISSN
- 0733-8724 (ISSN-L)
- 1558-2213
- OpenAlex
- W2112816903
- Cited by
- 223
- References
- 1
- FWCI
- 23.23
- Type
- journal article
- Language
- en
- Open access
- closed
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- The paper
- Selvaraja, S. K., Jaenen, P., Bogaerts, W., Van Thourhout, D., Dumon, P., & Baets, R. (2009). Fabrication of Photonic Wire and Crystal Circuits in Silicon-on-Insulator Using 193-nm Optical Lithography. Journal of Lightwave Technology. https://doi.org/10.1109/jlt.2009.2022282
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