Low-Loss Silicon Nitride AWG Demultiplexer Heterogeneously Integrated With Hybrid III–V/Silicon Photodetectors
Abstract
A unique and novel platform that combines III-V and silicon photonic components with ultra-low loss silicon nitride waveguides for monolithic integration of novel photonic circuits is presented. Successful (proof-of-principle) integration of eight hybrid III-V/silicon photodetectors and an arrayed waveguide grating is shown. The InGaAs photodiodes in this platform had average fiber-coupled responsivity of 0.36 A/W at 1550 nm, 30 GHz electrical bandwidth, and operated up to 50 Gb/s. The AWG had an insertion loss of 0.85 dB and adjacent-channel cross-talk less than -38 dB.
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III-V semiconductors require epitaxy or bonding of III-V materials to a silicon nitride waveguide wafer.
“Extensive work has been undertaken to combine active materials with Si 3 N4 waveguide wafers by adding additional materials such as III-V semiconductors [18], which require epitaxy or bonding of III-V materials to a silicon nitride waveguide wafer.”
From Integrated perovskite lasers on a silicon nitride waveguide platform by cost-effective high throughput fabrication (2017) · cites this paper as [18]
Cites
Ultra-low-loss high-aspect-ratio Si_3N_4 waveguides
Bauters, J. F., Heck, M. J. R., John, D., Dai, D., Tien, M.-C., Barton, J. S., Leinse, A., Heideman, R. G., Blumenthal, D. J., & Bowers, J. E. (2011) · Optics Express · doi:10.1364/oe.19.003163 · Cited by 492 · see citing works
Self-citationSilicon on ultra-low-loss waveguide photonic integration platform
Bauters, J. F., Davenport, M. L., Heck, M. J. R., Doylend, J. K., Chen, A., Fang, A. W., & Bowers, J. E. (2013) · Optics Express · doi:10.1364/oe.21.000544 · Cited by 144 · see citing works
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Tutorial on narrow linewidth tunable semiconductor lasers using Si/III-V heterogeneous integration
Tran, M. A., Huang, D., & Bowers, J. E. (2019) · APL Photonics · doi:10.1063/1.5124254 · Cited by 303 · see citing works
Self-citationCegielski, P. J., Neutzner, S., Porschatis, C., Lerch, H., Bolten, J., Suckow, S., Kandada, A. R. S., Chmielak, B., Petrozza, A., Wahlbrink, T., et al. (2017) · Optics Express · doi:10.1364/oe.25.013199 · Cited by 67 · see citing works
“Extensive work has been undertaken to combine active materials with Si3N4 waveguide wafers by adding additional materials such as III-V semiconductors [18], which require epitaxy or bonding of III-V materials to a silicon nitride waveguide wafer.”
BackgroundIntegrated PbS Colloidal Quantum Dot Photodiodes on Silicon Nitride Waveguides
Pang, C., Deng, Y.-H., Kheradmand, E., Poonkottil, N., Petit, R., Elsinger, L., Detavernier, C., Geiregat, P., Hens, Z., & Van Thourhout, D. (2023) · ACS Photonics · doi:10.1021/acsphotonics.3c00945 · Cited by 16 · see citing works
“47,48 Moreover, the AWG design can be adapted to meet the requirements of given applications.”
- Authors
- Piels, M., Bauters, J. F., Davenport, M. L., Heck, M. J. R., & Bowers, J. E.
- Affiliations
- University of California, Santa Barbara (US)
- Venue
- Journal of Lightwave Technology
- Published
- 2014-02
- Volume
- 32
- Issue
- 4
- Pages
- 817-823
- ISSN
- 0733-8724 (ISSN-L)
- 1558-2213
- OpenAlex
- W2091249825
- Cited by
- 135
- References
- 2
- Citations by year
- 2026: 4 · 2025: 6 · 2024: 6 · 2023: 9 · 2022: 7 · 2021: 9 · 2020: 12 · 2019: 13 · 2018: 13 · 2017: 15 · 2016: 15 · 2015: 15 · 2014: 11
- FWCI
- 8.20
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Journal of Lightwave Technology (publishedVersion)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced Photonic Communication Systems
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Semiconductor Lasers and Optical Devices
- Keywords
- arrayed waveguide grating, silicon nitride waveguides, hybrid photonic integration, InGaAs photodiodes, photodetectors, optical demultiplexer, low insertion loss, high-speed optical receivers, monolithic photonic integration
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