The DOI matches its Crossref record.
Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators
Open accessAbstract
This paper reports theoretical analysis and experimental results on a new class of rectangular plate and ring-shaped contour-mode piezoelectric aluminum nitride radio-frequency microelectromechanical systems resonators that span a frequency range from 19 to 656 MHz showing high-quality factors in air (Qmax=4300 at 229.9 MHz), low motional resistance (ranging from 50 to 700 Omega), and center frequencies that are lithographically defined. These resonators achieve the lowest value of motional resistance ever reported for contour-mode resonators and combine it with high Q factors, therefore enabling the fabrication of arrays of high-performance microresonators with different frequencies on a single chip. Uncompensated temperature coefficients of frequency of approximately -25 ppm/degC were also recorded for these resonators. Initial discussions on mass loading mechanisms induced by metal electrodes and energy loss phenomenon are provided
Overview
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Integrity signals
Registry
Cites
Statistics
Verification
Claims the paper makes
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Self-check
Percentages, sums and reported differences re-computed from the paper’s own numbers.
The self-check needs the paper’s full text.
Citations
Cited by
Xiong, C., Pernice, W. H. P., & Tang, H. X. (2012) · Nano Letters · doi:10.1021/nl3011885 · Cited by 277
Time-reversal symmetry breaking with acoustic pumping of nanophotonic circuits
Sohn, D. B., Kim, S., & Bahl, G. (2018) · Nature Photonics · doi:10.1038/s41566-017-0075-2 · Cited by 262
Aluminum nitride integrated photonics platform for the ultraviolet to visible spectrum
Lu, T.-J., Fanto, M., Choi, H., Thomas, P., Steidle, J., Mouradian, S., Kong, W., Zhu, D., Moon, H., Berggren, K., et al. (2018) · Optics Express · doi:10.1364/oe.26.011147 · Cited by 172
Metadata
- Authors
- Piazza, G., Stephanou, P. J., & Pisano, A. P.
- Venue
- Journal of Microelectromechanical Systems
- Published
- 2006-12
- Volume
- 15
- Issue
- 6
- Pages
- 1406-1418
- ISSN
- 1057-7157 (ISSN-L)
- OpenAlex
- W2100506356
- Cited by
- 639
- References
- 0
- FWCI
- 12.19
- Type
- journal article
- Language
- en
- Open access
- green
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
How to cite
Cite CoChat for the checks on this page, and the paper for its own findings.
- This page
- CoChat. (2026). Citation check: Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators. https://app.cochat.ai/papers/10.1109/jmems.2006.886012
- The paper
- Piazza, G., Stephanou, P. J., & Pisano, A. P. (2006). Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators. Journal of Microelectromechanical Systems. https://doi.org/10.1109/jmems.2006.886012
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
