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Cited by 277

The DOI matches its Crossref record; 22 of the 22 references it cites were found in a registry or an index.

Low-Loss, Silicon Integrated, Aluminum Nitride Photonic Circuits and Their Use for Electro-Optic Signal Processing

Open access
Xiong, Chi, Pernice, Wolfram H. P., Tang, Hong X.·2012·Nano Letters

Abstract

Photonic miniaturization requires seamless integration of linear and nonlinear optical components to achieve passive and active functions simultaneously. Among the available material systems, silicon photonics holds immense promise for optical signal processing and on-chip optical networks. However, silicon is limited to wavelengths above 1.1 μm and does not provide the desired lowest order optical nonlinearity for active signal processing. Here we report the integration of aluminum nitride (AlN) films on silicon substrates to bring active functionalities to chip-scale photonics. Using CMOS-compatible sputtered thin films we fabricate AlN-on-insulator waveguides that exhibit low propagation loss (0.6 dB/cm). Exploiting AlN's inherent Pockels effect we demonstrate electro-optic modulation up to 4.5 Gb/s with very low energy consumption (down to 10 fJ/bit). The ultrawide transparency window of AlN devices also enables high speed modulation at visible wavelengths. Our low cost, wideband, carrier-free photonic circuits hold promise for ultralow power and high-speed signal processing at the microprocessor chip level.

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Metadata

Authors
Xiong, C., Pernice, W. H. P., & Tang, H. X.
Venue
Nano Letters
Published
2012-06-06
Volume
12
Issue
7
Pages
3562-3568
ISSN
  • 1530-6984 (ISSN-L)
  • 1530-6992
OpenAlex
W1979267848
Cited by
277
References
22
FWCI
7.12
Type
journal article
Language
en
Open access
green

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CoChat. (2026). Citation check: Low-Loss, Silicon Integrated, Aluminum Nitride Photonic Circuits and Their Use for Electro-Optic Signal Processing. https://app.cochat.ai/papers/10.1021/nl3011885
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Xiong, C., Pernice, W. H. P., & Tang, H. X. (2012). Low-Loss, Silicon Integrated, Aluminum Nitride Photonic Circuits and Their Use for Electro-Optic Signal Processing. Nano Letters. https://doi.org/10.1021/nl3011885

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