Compact Integrated Silicon Photonic MEMS Power Coupler For Programmable Photonics
Open accessAbstract
Programmable photonics promise a plethora of optical functions while at the same time reducing the time and costs of photonic integrated circuit (PIC) development. One primary bottleneck for development of these systems is the difficulty in increasing component density because of excessive power consumption. We here present a MEMS-based Silicon Photonic power coupler that offers high optical performance (> 18 dB extinction ratio (ER),80 nm of optical bandwidth) within a compact footprint (25 µm × 150 µm) to provide a power-efficient active function: fast, continuous power tuning.
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From an initial 150 nm lateral gap, an in-plane displacement of a mere 50 nm is sufficient to achieve full power coupling.
“from an initial 150 nm lateral gap, an in-plane displacement of a mere 50 nm is sufficient to achieve full power coupling57.”
From Integrated silicon photonic MEMS (2023) · cites this paper as [57]
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Integrated silicon photonic MEMS
Quack, N., Takabayashi, A. Y., Sattari, H., Edinger, P., Jo, G., Bleiker, S. J., Errando-Herranz, C., Gylfason, K. B., Niklaus, F., Khan, U., et al. (2023) · Microsystems & Nanoengineering · doi:10.1038/s41378-023-00498-z · Cited by 155 · see citing works
“For example, the directional coupler described above can be attached to an in-plane electrostatic comb-drive actuator, and from an initial 150 nm lateral gap, an in-plane displacement of a mere 50 nm is suf fi cient to achieve full power coupling 57 .”
BackgroundSelf-citation
- Authors
- Takabayashi, A. Y., Silva, D., Sattari, H., Edinger, P., Verheyen, P., Gylfason, K. B., Bogaerts, W., & Quack, N.
- Affiliations
- École Polytechnique Fédérale de Lausanne (CH)
- KTH Royal Institute of Technology (SE)
- IMEC (BE)
- Ghent University (BE)
- The University of Sydney (AU)
- ORCID
- Venue
- 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
- Publisher
- IEEE
- Published
- 2022-01-09
- Pages
- 216-219
- ISSN
- 1084-6999 (ISSN-L)
- OpenAlex
- W4211012328
- Cited by
- 4
- References
- 0
- Citations by year
- 2025: 2 · 2024: 1 · 2023: 1
- FWCI
- 1.62
- Type
- conference paper
- Language
- en
- Open access
- green
- biblio.ugent.be
- Locations
- IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (publishedVersion)
- Ghent University Academic Bibliography (Ghent University) (submittedVersion, other-oa)
- Infoscience (Ecole Polytechnique Fédérale de Lausanne) (submittedVersion)
- Funders
- Hasler Foundation (17008)
- Swiss National Science Foundation (183717)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photonic Crystals and Applications
- Keywords
- silicon photonics, programmable photonics, photonic integrated circuits, extinction ratio, optical bandwidth, compact optical components, energy consumption reduction
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