Recent advances in MEMS sensor technology-mechanical applications
Abstract
This is the second of a three-part series on micro-electromechanical systems (MEMS) sensor technology. In the first part, a general introduction to MEMS sensing was given, including its underlying principles [1]. Biomedical MEMS sensors were also described by reviewing the principles of bio-sensing and describing a typical set of biologically inspired sensors. In this part, mechanical sensors for displacement, acceleration, impact, vibration, force and torque, and stress and strain are discussed. Various applications of these sensors include high-g measurement, study of golf swing dynamics, vibration control of space inflatable structures, force and torque measurement in micro-robots, bone stress monitoring, metrology, and characterization of nano-scale structures. Some related technologies of MEMS sensors are discussed including compensation for environmental effects, the Casimir effect, and harvesting of energy for self-powered sensors. Also, the subject of sensor selection is addressed. Part 3 of the series will present MEMS sensing in the thermo-fluid and electromagnetic domains.
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A high sampling dataset includes more dynamic motions, which allows for a more effective filter design.
“The high sampling dataset includes more dynamic motions, which allows for a more effective filter design [116].”
From Review of Wearable Devices and Data Collection Considerations for Connected Health (2021) · cites this paper as [116]
Cites
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In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor
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Recent advances in MEMS sensor technology – biomedical applications
Khoshnoud, F., & de Silva, C. W. (2012) · IEEE Instrumentation & Measurement Magazine · doi:10.1109/mim.2012.6145254 · Cited by 130 · see citing works
Self-citationDevelopment of a bioinspired MEMS based capacitive tactile sensor for a robotic finger
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Wireless MEMS inertial sensor system for golf swing dynamics
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A Compact Angular Rate Sensor System Using a Fully Decoupled Silicon-on-Glass MEMS Gyroscope
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A MEMS-based flexible sensor and actuator system for space inflatable structures
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Texture classification using a polymer-based MEMS tactile sensor
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Nanoprecision MEMS Capacitive Sensor for Linear and Rotational Positioning
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Integration of displacement sensor into bulk PZT thick film actuator for MEMS deformable mirror
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Design and development of a MEMS capacitive bending strain sensor
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MEMS cantilever sensor for non-destructive metrology within high-aspect-ratio micro holes
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Micro-displacement sensor with multimode fused coupler and concave mirror
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Self-citationDesign and Test of a MEMS-Based High G Smart Sensor
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A novel MEMS inertial sensor with enhanced sensing capacitors
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Analysis and Design of a Nano-Electromechanical Vibration Sensor
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Review of Wearable Devices and Data Collection Considerations for Connected Health
Vijayan, V., Connolly, J. P., Condell, J., McKelvey, N., & Gardiner, P. (2021) · Sensors · doi:10.3390/s21165589 · Cited by 435 · see citing works
- Authors
- Khoshnoud, F., & de Silva, C. W.
- Affiliations
- University of Hertfordshire (GB)
- ORCID
- Khoshnoud, F.
- Venue
- IEEE Instrumentation & Measurement Magazine
- Published
- 2012-04
- Volume
- 15
- Issue
- 2
- Pages
- 14-24
- ISSN
- 1094-6969 (ISSN-L)
- OpenAlex
- W4235128024
- Cited by
- 116
- References
- 25
- Citations by year
- 2026: 6 · 2025: 16 · 2024: 9 · 2023: 14 · 2022: 9 · 2021: 10 · 2020: 8 · 2019: 6 · 2018: 4 · 2017: 6 · 2016: 5 · 2015: 6 · 2014: 7 · 2013: 7 · 2012: 3
- FWCI
- 4.70
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- IEEE Instrumentation & Measurement Magazine (publishedVersion)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Mechanical and Optical Resonators
- Physical Sciences › Computer Science › Computer Networks and Communications › Sensor Technology and Measurement Systems
- Keywords
- MEMS sensors, mechanical sensors, displacement sensing, acceleration sensing, impact sensing, vibration sensing, force and torque measurement, inflatable space structures, microrobots, metrology, nanostructure characterization, ecological compensation, Casimir effect, energy harvesting, self-powered sensors, sensor selection
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