The DOI matches its Crossref record; 9 of the 9 references it cites were found in a registry or an index.
Fabrication of novel three-dimensional microstructures by the anisotropic etching of
Abstract
The anisotropic etching of single crystal silicon of
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Citations
Cites
A Water-Amine-Complexing Agent System for Etching Silicon
Finne, R. M., & Klein, D. L. (1967) · Journal of The Electrochemical Society · doi:10.1149/1.2426793 · Cited by 309
High Frequency Recording with Electrostatically Deflected Ink Jets
Sweet, R. G. (1965) · Review of Scientific Instruments · doi:10.1063/1.1719502 · Cited by 243
Ink jet printing nozzle arrays etched in silicon
BASSOUS, E., Taub, H. H., & Kuhn, L. (1977) · Applied Physics Letters · doi:10.1063/1.89587 · Cited by 153
Self-citationOn etching very narrow grooves in silicon
Kendall, D. L. (1975) · Applied Physics Letters · doi:10.1063/1.88113 · Cited by 131
Kamphoefner, F. J. (1972) · IEEE Transactions on Electron Devices · doi:10.1109/t-ed.1972.17458 · Cited by 72
Carnahan, R. D., & Hou, S. L. (1977) · IEEE Transactions on Industry Applications · doi:10.1109/tia.1977.4503368 · Cited by 39
Josephson tunneling through locally thinned silicon wafers
Huang, C.-L., & Duzer, T. V. (1974) · Applied Physics Letters · doi:10.1063/1.1655388 · Cited by 37
Optical Waveguides Fabricated by Preferential Etching
Tsang, W., Tseng, C.-C., & Wang, S. (1975) · Applied Optics · doi:10.1364/ao.14.001200 · Cited by 34
High-speed low-power x-ray lithography
Lenzo, P. V., & Spencer, E. G. (1974) · Applied Physics Letters · doi:10.1063/1.1655187 · Cited by 26
Cited by
Bulk micromachining of silicon
Kovacs, G. T. A., Maluf, N. I., & Petersen, K. E. (1998) · Proceedings of the IEEE · doi:10.1109/5.704259 · Cited by 733
Micromachined pressure sensors: review and recent developments
Eaton, W. P., & Smith, J. H. (1997) · Smart Materials and Structures · doi:10.1088/0964-1726/6/5/004 · Cited by 593
A Path Beyond Metal and Silicon:Polymer/Nanomaterial Composites for Stretchable Strain Sensors
Qiu, A., Li, P., Yang, Z., Yao, Y., Lee, I., & Ma, J. (2019) · Advanced Functional Materials · doi:10.1002/adfm.201806306 · Cited by 237
Metadata
- Authors
- Bassous, E.
- Venue
- IEEE Transactions on Electron Devices
- Published
- 1978-10
- Volume
- 25
- Issue
- 10
- Pages
- 1178-1185
- ISSN
- 0018-9383 (ISSN-L)
- 1557-9646
- OpenAlex
- W2094368312
- Cited by
- 309
- References
- 9
- FWCI
- 7.80
- Type
- journal article
- Language
- en
- Open access
- closed
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- Bassous, E. (1978). Fabrication of novel three-dimensional microstructures by the anisotropic etching of. IEEE Transactions on Electron Devices. https://doi.org/10.1109/t-ed.1978.19249
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
