Ion desorption by electron bombardment; relation to total and partial pressure measurement
Abstract
When electrons strike certain adsorbed gases, positive ions, neutrals, and/or excited neutrals are released. This electron impact desorption (E.I.D.) effect can cause significant errors in total pressure measurement with hot-cathode gauges and can change the striking characteristics of magnetic, cold-cathode gauges. In certain mass spectrometers, “surface ion” peaks appear in the mass spectrum resulting from E.I.D. of gases sorbed at the ion source electrodes. The general characteristics of E.I.D. and the results of measurements of E.I.D. from metal surfaces are briefly reviewed. The effects of E.I.D. on the characteristics of hot- and cold-cathode gauges and mass spectrometers are considered in some detail. Methods of minimizing errors caused by E.I.D. are discussed.
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Mo, W and Pt-Ir show similar behaviour in terms of electron stimulated desorption, whilst Pt-clad Mo seems to have better properties and should be preferable as the grid material.
“Mo, W and Pt-Ir show similar behaviour in terms of ESD, whilst Pt-clad Mo seems to have better properties and should be preferable as the grid material.”
From A review on hot cathode ionisation gauges with focus on a suitable design for measurement accuracy and stability (2020) · cites this paper as [121]
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Jousten, K., Boineau, F., Bundaleski, N., Illgen, C., Setina, J., Teodoro, O. M. N. D., Vicar, M., & Wüest, M. (2020) · Vacuum · doi:10.1016/j.vacuum.2020.109545 · Cited by 34 · see citing works
- Authors
- Redhead, P. A.
- Venue
- Journal of Vacuum Science and Technology
- Publisher
- American Vacuum Society
- Published
- 1970-01
- Volume
- 7
- Issue
- 1
- Pages
- 182-187
- ISSN
- 0022-5355
- Cited by
- 35
- References
- 0
- Language
- en
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