Secondary electrons in ion gauges
Abstract
The secondary electron emission induced by the electron impact on grid materials of ionization gauges has been studied. It makes up for about 10% of the sensitivity of the gauge. Changes in the chemical composition of the grid result in changes of the secondary electron yield and thus in changes of the gauge sensitivity amounting up to several percent. Gold and carbon constitute especially stable surfaces.
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Secondary electrons typically contribute to 10% of the total sensitivity of a hot cathode ionisation gauge.
“The authors estimate that the secondary electrons typically contribute to the 10% of the total sensitivity of an HCIG.”
From A review on hot cathode ionisation gauges with focus on a suitable design for measurement accuracy and stability (2020) · cites this paper as [133]
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Jousten, K., Boineau, F., Bundaleski, N., Illgen, C., Setina, J., Teodoro, O. M. N. D., Vicar, M., & Wüest, M. (2020) · Vacuum · doi:10.1016/j.vacuum.2020.109545 · Cited by 34 · see citing works
- Authors
- Grosse, G., Harten, U., Jitschin, W., & Gentsch, H.
- Affiliations
- Physikalisch–Technische Bundesanstalt, Institut Berlin, D-1000 Berlin 10, Germany
- Institut für Physikalische Chemie, Universität Essen, D-4300 Essen, Germany
- Venue
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- Publisher
- American Vacuum Society
- Published
- 1987-09-01
- Volume
- 5
- Issue
- 5
- Pages
- 3242-3243
- ISSN
- 0734-2101
- 1520-8559
- Cited by
- 17
- References
- 0
- Language
- en
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