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Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces
Abstract
In this article nanosphere lithography (NSL) is demonstrated to be a materials general fabrication process for the production of periodic particle array (PPA) surfaces having nanometer scale features. A variety of PPA surfaces have been prepared using identical single-layer (SL) and double-layer (DL) NSL masks made by self-assembly of polymer nanospheres with diameter, D=264 nm, and varying both the substrate material S and the particle material M. In the examples shown here, S was an insulator, semiconductor, or metal and M was a metal, inorganic ionic insulator, or an organic π-electron semiconductor. PPA structural characterization and determination of nanoparticle metrics was accomplished with atomic force microscopy. This is the first demonstration of nanometer scale PPA surfaces formed from molecular materials.
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Citations
Cited by
Ghosh, S. K., & Pal, T. (2007) · Chemical Reviews · doi:10.1021/cr0680282 · Cited by 2,782
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Shafer-Peltier, K. E., Haynes, C. L., Glucksberg, M. R., & Van Duyne, R. P. (2003) · Journal of the American Chemical Society · doi:10.1021/ja028255v · Cited by 653
Zhang, J., Li, Y., Zhang, X., & Yang, B. (2010) · Advanced Materials · doi:10.1002/adma.201000755 · Cited by 649
Fabrication of Silicon Nanowire Arrays with Controlled Diameter, Length, and Density
Huang, Z., Fang, H., & Zhu, J. (2007) · Advanced Materials · doi:10.1002/adma.200600892 · Cited by 586
Metadata
- Authors
- Hulteen, J. C., & Van Duyne, R. P.
- Venue
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- Publisher
- American Vacuum Society
- Published
- 1995-05-01
- Volume
- 13
- Issue
- 3
- Pages
- 1553-1558
- ISSN
- 0734-2101 (ISSN-L)
- 1520-8559
- OpenAlex
- W2061158555
- Cited by
- 1,465
- References
- 0
- FWCI
- 5.78
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces. https://app.cochat.ai/papers/10.1116/1.579726
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- Hulteen, J. C., & Van Duyne, R. P. (1995). Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. https://doi.org/10.1116/1.579726
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