Reduction imaging at 14 nm using multilayer-coated optics: Printing of features smaller than 0.1 μm

Bjorkholm, J. E., Bokor, J., Eichner, L., Freeman, R. R., Gregus, J., Jewell, T. E., Mansfield, W. M., Mac Dowell, A. A., Raab, E. L., Silfvast, W. T., Szeto, L. H., Tennant, D. M., Waskiewicz, W. K., White, D. L., Windt, D. L., Wood, O. R., Bruning, J. H.·1990·Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
DOI 10.1116/1.585106

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