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Cited by 413

The DOI matches its Crossref record; 2 of the 2 references it cites were found in a registry or an index.

Generation of Spatially Coherent Light at Extreme Ultraviolet Wavelengths

Open access
Bartels, Randy A., Paul, Ariel, Green, Hans, Kapteyn, Henry C., Murnane, Margaret M., Backus, Sterling, Christov, Ivan P., Liu, Yanwei, Attwood, David, Jacobsen, Chris·2002·Science

Abstract

We present spatial coherence measurements of extreme ultraviolet (EUV) light generated through the process of high-harmonic up-conversion of a femtosecond laser. With a phase-matched hollow-fiber geometry, the generated beam was found to exhibit essentially full spatial coherence. The coherence of this laser-like EUV source was shown by recording Gabor holograms of small objects. This work demonstrates the capability to perform EUV holography with a tabletop experimental setup. Such an EUV source, with low divergence and high spatial coherence, can be used for experiments involving high-precision metrology, inspection of optical components for EUV lithography, and microscopy and holography with nanometer resolution. Furthermore, the short time duration of the EUV radiation (a few femtoseconds) will enable EUV microscopy and holography to be performed with ultrahigh time resolution.

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Crossref · 10.1126/science.1071718

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Metadata

Authors
Bartels, R. A., Paul, A., Green, H., Kapteyn, H. C., Murnane, M. M., Backus, S., Christov, I. P., Liu, Y., Attwood, D., & Jacobsen, C.
Venue
Science
Published
2002-07-19
Volume
297
Issue
5580
Pages
376-378
ISSN
  • 0036-8075 (ISSN-L)
  • 1095-9203
OpenAlex
W1673772832
Cited by
413
References
2
FWCI
16.97
Type
journal article
Language
en
Open access
green

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CoChat. (2026). Citation check: Generation of Spatially Coherent Light at Extreme Ultraviolet Wavelengths. https://app.cochat.ai/papers/10.1126/science.1071718
The paper
Bartels, R. A., Paul, A., Green, H., Kapteyn, H. C., Murnane, M. M., Backus, S., Christov, I. P., Liu, Y., Attwood, D., & Jacobsen, C. (2002). Generation of Spatially Coherent Light at Extreme Ultraviolet Wavelengths. Science. https://doi.org/10.1126/science.1071718

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