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Thin-Film Transistor Fabricated in Single-Crystalline Transparent Oxide Semiconductor
Abstract
We report the fabrication of transparent field-effect transistors using a single-crystalline thin-film transparent oxide semiconductor, InGaO 3 (ZnO) 5 , as an electron channel and amorphous hafnium oxide as a gate insulator. The device exhibits an on-to-off current ratio of ∼10 6 and a field-effect mobility of ∼80 square centimeters per volt per second at room temperature, with operation insensitive to visible light irradiation. The result provides a step toward the realization of transparent electronics for next-generation optoelectronics.
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Cited by
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Inorganic Semiconductors for Flexible Electronics
Sun, Y., & Rogers, J. A. (2007) · Advanced Materials · doi:10.1002/adma.200602223 · Cited by 874
Flexible electronics based on inorganic nanowires
Liu, Z., Xu, J., Chen, D., & Shen, G. (2015) · Chemical Society Reviews · doi:10.1039/c4cs00116h · Cited by 512
Qiu, Y., Yan, K., Deng, H., & Yang, S. (2012) · Nano Letters · doi:10.1021/nl2037326 · Cited by 406
Kim, H. J., Kim, U., Kim, T. H., Kim, J., Kim, H. M., Jeon, B.-G., Lee, W.-J., Mun, H. S., Hong, K. T., Yu, J., et al. (2012) · Physical Review B · doi:10.1103/physrevb.86.165205 · Cited by 320
Metadata
- Authors
- Nomura, K., Ohta, H., Ueda, K., Kamiya, T., Hirano, M., & Hosono, H.
- Venue
- Science
- Published
- 2003-05-23
- Volume
- 300
- Issue
- 5623
- Pages
- 1269-1272
- ISSN
- 0036-8075 (ISSN-L)
- 1095-9203
- OpenAlex
- W2092426063
- Cited by
- 1,884
- References
- 0
- FWCI
- 42.57
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Thin-Film Transistor Fabricated in Single-Crystalline Transparent Oxide Semiconductor. https://app.cochat.ai/papers/10.1126/science.1083212
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- Nomura, K., Ohta, H., Ueda, K., Kamiya, T., Hirano, M., & Hosono, H. (2003). Thin-Film Transistor Fabricated in Single-Crystalline Transparent Oxide Semiconductor. Science. https://doi.org/10.1126/science.1083212
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Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
