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Mesoporous Silicates Prepared Using Preorganized Templates in Supercritical Fluids
Abstract
Well-ordered mesoporous silicate films were prepared by infusion and selective condensation of silicon alkoxides within microphase-separated block copolymer templates dilated with supercritical carbon dioxide. Confinement of metal oxide deposition to specific subdomains of the preorganized template yields high-fidelity, three-dimensional replication of the copolymer morphology, enabling the preparation of structures with multiscale order in a process that closely resembles biomineralization. Ordered mesoporous silicate films were synthesized with dielectric constants as low as 1.8 and excellent mechanical properties. The films survive the chemical-mechanical polishing step required for device manufacturing.
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Citations
Cited by
Block copolymer based nanostructures: Materials, processes, and applications to electronics
Kim, H.-C., Park, S.-M., & Hinsberg, W. D. (2010) · Chemical Reviews · doi:10.1021/cr900159v · Cited by 1,017
Synthesis of a large-scale highly ordered porous carbon film by self-assembly of block copolymers
Liang, C., Hong, K., Guiochon, G. A., Mays, J. W., & Dai, S. (2004) · Angewandte Chemie International Edition · doi:10.1002/anie.200461051 · Cited by 834
Synthesis of Metal Oxide Nanostructures by Direct Sol–Gel Chemistry in Supercritical Fluids
Sui, R., & Charpentier, P. (2012) · Chemical Reviews · doi:10.1021/cr2000465 · Cited by 313
Peng, Q., Tseng, Y., Darling, S. B., & Elam, J. W. (2010) · Advanced Materials · doi:10.1002/adma.201002465 · Cited by 294
Metadata
- Authors
- Pai, R. A., Humayun, R., Schulberg, M. T., Sengupta, A., Sun, J.-N., & Watkins, J. J.
- Venue
- Science
- Published
- 2004-01-23
- Volume
- 303
- Issue
- 5657
- Pages
- 507-510
- ISSN
- 0036-8075 (ISSN-L)
- 1095-9203
- OpenAlex
- W2066092648
- Cited by
- 273
- References
- 0
- FWCI
- 13.33
- Type
- journal article
- Language
- en
- Open access
- closed
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- Pai, R. A., Humayun, R., Schulberg, M. T., Sengupta, A., Sun, J.-N., & Watkins, J. J. (2004). Mesoporous Silicates Prepared Using Preorganized Templates in Supercritical Fluids. Science. https://doi.org/10.1126/science.1092627
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