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Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly
Abstract
Self-assembling materials spontaneously form structures at length scales of interest in nanotechnology. In the particular case of block copolymers, the thermodynamic driving forces for self-assembly are small, and low-energy defects can get easily trapped. We directed the assembly of defect-free arrays of isolated block copolymer domains at densities up to 1 terabit per square inch on chemically patterned surfaces. In comparing the assembled structures to the chemical pattern, the density is increased by a factor of four, the size is reduced by a factor of two, and the dimensional uniformity is vastly improved.
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Cited by
Multiblock Polymers: Panacea or Pandora’s Box?
Bates, F. S., Hillmyer, M. A., Lodge, T. P., Bates, C. M., Delaney, K. T., & Fredrickson, G. H. (2012) · Science · doi:10.1126/science.1215368 · Cited by 1,147
Block copolymer based nanostructures: Materials, processes, and applications to electronics
Kim, H.-C., Park, S.-M., & Hinsberg, W. D. (2010) · Chemical Reviews · doi:10.1021/cr900159v · Cited by 1,017
50th Anniversary Perspective: Block Polymers—Pure Potential
Bates, C. M., & Bates, F. S. (2017) · Macromolecules · doi:10.1021/acs.macromol.6b02355 · Cited by 788
Macroscopic 10-terabit–per–square-inch arrays from block copolymers with lateral order
Park, S., Lee, D. H., Xu, J., Kim, B., Hong, S. W., Jeong, U., Xu, T., & Russell, T. P. (2009) · Science · doi:10.1126/science.1168108 · Cited by 740
Directed self-assembly of block copolymers for use in bit patterned media fabrication
Griffiths, R. A., Williams, A., Oakland, C., Roberts, J., Vijayaraghavan, A., & Thomson, T. (2013) · Journal of Physics D: Applied Physics · doi:10.1088/0022-3727/46/50/503001 · Cited by 375
Metadata
- Authors
- Ruiz, R., Kang, H., Detcheverry, F. A., Dobisz, E., Kercher, D. S., Albrecht, T. R., de Pablo, J. J., & Nealey, P. F.
- Venue
- Science
- Published
- 2008-08-15
- Volume
- 321
- Issue
- 5891
- Pages
- 936-939
- ISSN
- 0036-8075 (ISSN-L)
- 1095-9203
- OpenAlex
- W4233417203
- Cited by
- 1,150
- References
- 0
- FWCI
- 41.09
- Type
- journal article
- Language
- en
- Open access
- closed
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- Ruiz, R., Kang, H., Detcheverry, F. A., Dobisz, E., Kercher, D. S., Albrecht, T. R., de Pablo, J. J., & Nealey, P. F. (2008). Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly. Science. https://doi.org/10.1126/science.1157626
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