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Thermal-Wave Imaging

Rosencwaig, Allan·1982·Science
DOI 10.1126/science.218.4569.223
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Abstract

Thermal features on and beneath the surface of a sample can be detected and imaged with a thermal-wave microscope. Various methodologies for the excitation and detection of thermal waves are discussed, and several applications, primarily in microelectronics, are presented.

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Crossref · 10.1126/science.218.4569.223

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Citations

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Research works printed but not linked: 30

  1. AAMODT, L, EFFECT OF 3-D HEAT-FLOW NEAR EDGES IN PHOTOTHERMAL MEASUREMENTS, APPLIED OPTICS 21: 111 (1982). · DOI
  2. BELL A.G. PHILOSOPHICAL MAGAZINE 5 11 : 510 (1881). · DOI
  3. BRANDIS, E, THERMAL-WAVE MICROSCOPY WITH ELECTRON-BEAMS, APPLIED PHYSICS LETTERS 37: 98 (1980). · DOI
  4. BUSSE, G, OPTOACOUSTIC PHASE-ANGLE MEASUREMENT FOR PROBING A METAL, APPLIED PHYSICS LETTERS 35: 759 (1979). · DOI
  5. BUSSE, G, SUBSURFACE IMAGING WITH PHOTOACOUSTICS, APPLIED PHYSICS LETTERS 36: 815 (1980). · DOI
  6. Busse, G., Scanned Image Microscopy: 341 (1980).
  7. CARGILL, G.S., ULTRASONIC-IMAGING IN SCANNING ELECTRON-MICROSCOPY, NATURE 286: 691 (1980). · DOI
  8. CARGILL, G. S., PHYSICS TODAY 34: 27 (1981).
  9. Cargill, G. S., Scanned Image Microscopy: 319 (1980).
  10. Fournier, D., Scanned Image Microscopy: 347 (1980).
  11. JACKSON, W.B., PHOTOTHERMAL DEFLECTION SPECTROSCOPY AND DETECTION, APPLIED OPTICS 20: 1333 (1981). · DOI
  12. LUUKKALA, M, PHOTOACOUSTIC MICROSCOPE, ELECTRONICS LETTERS 15: 325 (1979). · DOI
  13. Luukkala, M., Scanned Image Microscopy: 273 (1980).
  14. MURPHY, J.C., OPTICALLY DETECTED PHOTOTHERMAL IMAGING, APPLIED PHYSICS LETTERS 38: 196 (1981). · DOI
  15. Nordal, P. E., Scanned Image Microscopy: 331 (1980).
  16. OPSAL, J, THERMAL-WAVE DEPTH PROFILING - THEORY, JOURNAL OF APPLIED PHYSICS 53: 4240 (1982). · DOI
  17. ROSENCWAIG, A, PHOTOACOUSTIC MICROSCOPY, AMERICAN LABORATORY 11: 39 (1979).
  18. ROSENCWAIG, A, HIGH-RESOLUTION PHOTOACOUSTIC THERMAL-WAVE MICROSCOPY, APPLIED PHYSICS LETTERS 36: 725 (1980). · DOI
  19. ROSENCWAIG, A, IMAGING OF DOPANT REGIONS IN SILICON WITH THERMAL-WAVE ELECTRON-MICROSCOPY, APPLIED PHYSICS LETTERS 38: 165 (1981). · DOI
  20. ROSENCWAIG, A, DEPTH PROFILING OF INTEGRATED-CIRCUITS WITH THERMAL WAVE ELECTRON-MICROSCOPY, ELECTRONICS LETTERS 16: 928 (1980). · DOI
  21. ROSENCWAIG, A, THEORY OF PHOTOACOUSTIC EFFECT WITH SOLIDS, JOURNAL OF APPLIED PHYSICS 47: 64 (1976). · DOI · Paper page
  22. Rosencwaig A. Photoacoustics and Photoacoustic Spectroscopy (1980). · DOI
  23. Rosencwaig, A., Scanned Image Microscopy: 300 (1980).
  24. ROSENCWAIG, A, THERMAL-WAVE MICROSCOPY, SOLID STATE TECHNOLOGY 25: 91 (1982). · DOI
  25. THOMAS, R.L., SUBSURFACE FLAW DETECTION IN METALS BY PHOTOACOUSTIC MICROSCOPY, JOURNAL OF APPLIED PHYSICS 51: 1152 (1980). · DOI
  26. VONGUTFELD, R.J., APPL PHYS LETT 30: 257 (1977). · DOI
  27. Wetsel, G. C., Proceedings of the 1980 Ultrasonics Symposium: 645 (1980).
  28. WHITE, R.M., JOURNAL OF APPLIED PHYSICS 34: 3559 (1963). · DOI
  29. WONG, Y.H., SURFACE AND SUBSURFACE STRUCTURE OF SOLIDS BY LASER PHOTOACOUSTIC SPECTROSCOPY, APPLIED PHYSICS LETTERS 32: 538 (1978). · DOI
  30. Wong, Y. H., Scanned Image Microscopy: 247 (1980).

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Metadata

Authors
Rosencwaig, A.
Affiliations
President of Therma-Wave, Inc., Fremont, California 94539
Venue
Science
Publisher
American Association for the Advancement of Science (AAAS)
Published
1982-10-15
Volume
218
Issue
4569
Pages
223-228
ISSN
  • 0036-8075
  • 1095-9203
DOI
10.1126/science.218.4569.223
Cited by
175
References
0
Language
en

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