The DOI matches its Crossref record; 2 of the 2 references it cites were found in a registry or an index.
Block Copolymer Lithography: Periodic Arrays of ~10 11 Holes in 1 Square Centimeter
Abstract
Dense periodic arrays of holes and dots have been fabricated in a silicon nitride–coated silicon wafer. The holes are 20 nanometers across, 40 nanometers apart, and hexagonally ordered with a polygrain structure that has an average grain size of 10 by 10. Spin-coated diblock copolymer thin films with well-ordered spherical or cylindrical microdomains were used as the templates. The microdomain patterns were transferred directly to the underlying silicon nitride layer by two complementary techniques that resulted in opposite tones of the patterns. This process opens a route for nanometer-scale surface patterning by means of spontaneous self-assembly in synthetic materials on length scales that are difficult to obtain by standard semiconductor lithography techniques.
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Citations
Cites
Quantized Hall Conductance in a Two-Dimensional Periodic Potential
Thouless, D. J., Kohmoto, M., Nightingale, M. P., & den Nijs, M. (1982) · Physical Review Letters · doi:10.1103/physrevlett.49.405 · Cited by 6,973
Energy levels and wave functions of Bloch electrons in rational and irrational magnetic fields
Hofstadter, D. R. (1976) · Physical Review B · doi:10.1103/physrevb.14.2239 · Cited by 3,495
Cited by
Ultrahigh-Density Nanowire Arrays Grown in Self-Assembled Diblock Copolymer Templates
Thurn-Albrecht, T., Schotter, J., Kästle, G. A., Emley, N., Shibauchi, T., Krusin-Elbaum, L., Guarini, K., Black, C. T., Tuominen, M. T., & Russell, T. P. (2000) · Science · doi:10.1126/science.290.5499.2126 · Cited by 2,104
Unconventional Methods for Fabricating and Patterning Nanostructures
Xia, Y., Rogers, J. A., Paul, K. E., & Whitesides, G. M. (1999) · Chemical Reviews · doi:10.1021/cr980002q · Cited by 1,538
Directing the self-assembly of block copolymers
Darling, S. B. (2007) · Progress in Polymer Science · doi:10.1016/j.progpolymsci.2007.05.004 · Cited by 1,019
Block copolymer based nanostructures: Materials, processes, and applications to electronics
Kim, H.-C., Park, S.-M., & Hinsberg, W. D. (2010) · Chemical Reviews · doi:10.1021/cr900159v · Cited by 1,017
Synthesis of a large-scale highly ordered porous carbon film by self-assembly of block copolymers
Liang, C., Hong, K., Guiochon, G. A., Mays, J. W., & Dai, S. (2004) · Angewandte Chemie International Edition · doi:10.1002/anie.200461051 · Cited by 834
Metadata
- Authors
- Park, M., Harrison, C., Chaikin, P. M., Register, R. A., & Adamson, D. H.
- Venue
- Science
- Published
- 1997-05-30
- Volume
- 276
- Issue
- 5317
- Pages
- 1401-1404
- ISSN
- 0036-8075 (ISSN-L)
- 1095-9203
- OpenAlex
- W2003398981
- Cited by
- 1,866
- References
- 2
- FWCI
- 22.88
- Type
- journal article
- Language
- en
- Open access
- closed
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- Park, M., Harrison, C., Chaikin, P. M., Register, R. A., & Adamson, D. H. (1997). Block Copolymer Lithography: Periodic Arrays of ~10 11 Holes in 1 Square Centimeter. Science. https://doi.org/10.1126/science.276.5317.1401
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
