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A 25 kW, 25 kHz Induction Heating Power Supply for MOVPE System Using L-LC Resonant Inverter

Borage, Mangesh, Tiwari, Sunil·2013·Advances in Power Electronics
DOI 10.1155/2013/584129
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Abstract

A topology named L-LC resonant inverter (RI) for induction heating (IH) applications takes most of the merits of the conventional series and parallel resonant schemes, while eliminating their limitations. In this paper, fundamental frequency AC analysis of L-LC RI is revisited, and a new operating point is suggested featuring enhanced current gain and near in-phase operation as compared to the conventional operating point. An approximate analysis of the circuit with square-wave voltage source is also described highlighting the effect of auxiliary inductor on the source current waveform. The analysis also leads to an optimum choice of the auxiliary inductance. The requirements of the metal organic vapour phase epitaxy (MOVPE) system in which a graphite susceptor is required to be heated to 1200°C demanding a 25 kW, 25 kHz IH power supply, the configuration of developed IH system, and experimental results are presented.

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Crossref · 10.1155/2013/584129

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Figures

Figure 1 Equivalent circuit representation of an IH coil.
Figure 1 Equivalent circuit representation of an IH coil.CC-BY · From the PDF
Figure 2 Circuit diagram of L-LC RI for IH application.
Figure 2 Circuit diagram of L-LC RI for IH application.CC-BY · From the PDF
Figure 3 Equivalent circuit diagram of L-LC RI for analysis.
Figure 3 Equivalent circuit diagram of L-LC RI for analysis.CC-BY · From the PDF
Figure 4 The plots of 𝐼 𝐿 eq 𝑁 (a) and 𝜙 (b) as a function of 𝛾 for different values of 𝑄 at two operating points.
Figure 4 The plots of 𝐼 𝐿 eq 𝑁 (a) and 𝜙 (b) as a function of 𝛾 for different values of 𝑄 at two operating points.CC-BY · From the PDF
Figure 5 The plots of 𝐻 as a function of 𝜔 𝑛 for 𝛾 = 5 .
Figure 5 The plots of 𝐻 as a function of 𝜔 𝑛 for 𝛾 = 5 .CC-BY · From the PDF
Figure 6 (a) Equivalent circuit for L-LC RI for analysis with V 𝑠 . (b) Equivalent circuit redrawn with V 𝑠 decomposed into V 𝑠1 and V ℎ . (c) Approximate equivalent circuit for fundamental frequency. (d) Approximate equivalent circuit for harmonics frequencies.
Figure 6 (a) Equivalent circuit for L-LC RI for analysis with V 𝑠 . (b) Equivalent circuit redrawn with V 𝑠 decomposed into V 𝑠1 and V ℎ . (c) Approximate equivalent circuit for fundamental frequency. (d) Approximate equivalent circuit for harmonics frequencies.CC-BY · From the PDF
Figure 7 Typical calculated waveforms of V 𝑠 (𝑡) , 𝑖 𝑠1 (𝑡) , 𝑖 ℎ (𝑡) , and 𝑖 𝑠 (𝑡) for low𝑄 (𝑄 = 1; 𝛾 = 1) (a) and high𝑄 (𝑄 = 50; 𝛾 = 1) (b) operation. The effect of 𝛾 on the waveform of 𝑖 𝑠 (𝑡) is illustrated by the calculated waveforms in (c) for 𝑄 = 50 .
Figure 7 Typical calculated waveforms of V 𝑠 (𝑡) , 𝑖 𝑠1 (𝑡) , 𝑖 ℎ (𝑡) , and 𝑖 𝑠 (𝑡) for low𝑄 (𝑄 = 1; 𝛾 = 1) (a) and high𝑄 (𝑄 = 50; 𝛾 = 1) (b) operation. The effect of 𝛾 on the waveform of 𝑖 𝑠 (𝑡) is illustrated by the calculated waveforms in (c) for 𝑄 = 50 .CC-BY · From the PDF
Figure 8 The plots of current gain as a function of 𝑄 for different values of 𝛾 at the at the proposed operating point 𝜔 𝑛 = 1 and conventional operating point 𝜔 𝑛 = 𝜔 𝑜 𝑐 .
Figure 8 The plots of current gain as a function of 𝑄 for different values of 𝛾 at the at the proposed operating point 𝜔 𝑛 = 1 and conventional operating point 𝜔 𝑛 = 𝜔 𝑜 𝑐 .CC-BY · From the PDF
Figure 9 The plots of (20) showing the variation of 𝐾 𝐿 𝑎 as a function of 𝛾 for different values of 𝑄 .
Figure 9 The plots of (20) showing the variation of 𝐾 𝐿 𝑎 as a function of 𝛾 for different values of 𝑄 .CC-BY · From the PDF
Figure 10 The power circuit and the control block diagram of a 25 kHz, 25 kW induction heating power supply using L-LC RI for MOVPE system. # The process controller, shown for the completeness, is not used in the laboratory testing of the system.
Figure 10 The power circuit and the control block diagram of a 25 kHz, 25 kW induction heating power supply using L-LC RI for MOVPE system. # The process controller, shown for the completeness, is not used in the laboratory testing of the system.CC-BY · From the PDF
Figure 11 The photograph of the developed induction heating power supply. The graphite susceptor heated to 1200 ∘ C is shown in the inset.
Figure 11 The photograph of the developed induction heating power supply. The graphite susceptor heated to 1200 ∘ C is shown in the inset.CC-BY · From the PDF
Figure 12 Experimental waveforms. (a) V 𝑠 (trace 1, 200 V/div) and 𝑖 𝑠 (trace 2, 25 A/div); 𝑥 -scale: 5 𝜇 s/div. (b) Waveforms at turn-on: IGBT collector-to-emitter voltage (trace 1, 200 V/div) and gate-to-emitter voltage (trace 2, 10 V/div) 𝑥 -scale: 500 ns/div. (c) Waveforms at turnoff: IGBT collector-to-emitter voltage (trace 1, 200 V/div) and gate-to-emitter voltage (trace 2, 10 V/div) 𝑥 -scale: 500 ns/div. (d) V 𝑠 (trace 1, 200 V/div) and the voltage across the work coil (trace 2, 200 V/div) 𝑥 -scale: 10 𝜇 s/div.
Figure 12 Experimental waveforms. (a) V 𝑠 (trace 1, 200 V/div) and 𝑖 𝑠 (trace 2, 25 A/div); 𝑥 -scale: 5 𝜇 s/div. (b) Waveforms at turn-on: IGBT collector-to-emitter voltage (trace 1, 200 V/div) and gate-to-emitter voltage (trace 2, 10 V/div) 𝑥 -scale: 500 ns/div. (c) Waveforms at turnoff: IGBT collector-to-emitter voltage (trace 1, 200 V/div) and gate-to-emitter voltage (trace 2, 10 V/div) 𝑥 -scale: 500 ns/div. (d) V 𝑠 (trace 1, 200 V/div) and the voltage across the work coil (trace 2, 200 V/div) 𝑥 -scale: 10 𝜇 s/div.CC-BY · From the PDF
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Research works printed but not linked: 17

  1. 10.1049/iet-pel.2010.0107 · DOI
  2. 10.1109/TIE.2009.2022516 · DOI
  3. 10.1109/28.673722 · DOI
  4. 10.1109/TPEL.2011.2146278 · DOI
  5. 10.1109/63.838094 · DOI
  6. 10.1109/63.311261 · DOI
  7. 10.1109/63.558743 · DOI
  8. 1985, International Journal of Electronics, 59, 543, 10.1080/00207218508920729 · DOI
  9. 10.1109/63.85911 · DOI
  10. 1999, International Journal of Electronics, 86, 1205, 10.1080/002072199132752 · DOI
  11. 10.1109/TIE.2010.2070779 · DOI
  12. 10.1109/41.87588 · DOI
  13. 10.1109/TIE.2007.905928 · DOI
  14. 1997, Journal of Crystal Growth, 170, 312, 10.1016/S0022-0248(96)00598-2 · DOI
  15. 10.1109/TPEL.2003.823250 · DOI
  16. 10.1109/TIE.2010.2050752 · DOI
  17. 10.1109/TIE.2010.2049706 · DOI

Cited by

Metadata

Authors
Borage, M., & Tiwari, S.
Venue
Advances in Power Electronics
Publisher
Hindawi Limited
Published
2013-07-17
Volume
2013
Pages
1-10
ISSN
  • 2090-181X
  • 2090-1828
DOI
10.1155/2013/584129
Cited by
4
References
0
Language
en
Licence
creativecommons.org/licenses/by/3.0/ (unspecified)

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