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Cited by 1,501

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Humidity Sensors: A Review of Materials and Mechanisms

Chen, Zhi, Lu, Chi·2005·Sensor Letters

Abstract

We have reviewed humidity sensors based on various materials for both relative and absolute humidity, including ceramic, semiconducting, and polymer materials. In the majority of publications, there are few papers dealing with absolute humidity sensors, which have extensive applications in industry. We reviewed extensively absolute humidity sensors in this article, which is unique comparing with other reviews of humidity sensors. The electrical properties of humidity sensors such as sensitivity, response time, and stability have been described in details for various materials and a considerable part of the review is focused on the sensing mechanisms. In addition, preparation and characterization of sensing materials are also described. For absolute humidity sensors, mirrorbased dew-point sensors and solid-state Al2O3 moisture sensors have been described. As the major problem in Al2O3 moisture sensors, long-term instability, has been solved, � -Al2O3 moisture sensors may have promising future in industry.

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Metadata

Authors
Chen, Z., & Lu, C.
Venue
Sensor Letters
Published
2005-12-01
Volume
3
Issue
4
Pages
274-295
ISSN
  • 1546-1971 (ISSN-L)
  • 1546-198X
OpenAlex
W2027788633
Cited by
1,501
References
0
FWCI
12.71
Type
journal article
Language
en
Open access
closed

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CoChat. (2026). Citation check: Humidity Sensors: A Review of Materials and Mechanisms. https://app.cochat.ai/papers/10.1166/sl.2005.045
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Chen, Z., & Lu, C. (2005). Humidity Sensors: A Review of Materials and Mechanisms. Sensor Letters. https://doi.org/10.1166/sl.2005.045

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