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Low loss etchless silicon photonic waveguides
Open accessAbstract
We demonstrate low loss silicon waveguides fabricated without any silicon etching. We define the waveguides by selective oxidation which produces ultra-smooth sidewalls with width variations of 0.3 nm. The waveguides have a propagation loss of 0.3 dB/cm at 1.55 microm. The waveguide geometry enables low bending loss of approximately 0.007 dB/bend for a 90 degrees bend with a 50 microm bending radius.
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Cited by
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Review of Silicon Photonics Technology and Platform Development
Siew, S. Y., Li, B., Gao, F., Zheng, H. Y., Zhang, W., Guo, P., Xie, S. W., Song, A., Dong, B., Luo, L. W., et al. (2021) · Journal of Lightwave Technology · doi:10.1109/jlt.2021.3066203 · Cited by 988
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Harris, N. C., Steinbrecher, G. R., Prabhu, M., Lahini, Y., Mower, J., Bunandar, D., Chen, C., Wong, F. N. C., Baehr-Jones, T., Hochberg, M., et al. (2017) · Nature Photonics · doi:10.1038/nphoton.2017.95 · Cited by 519
Metadata
- Authors
- Cardenas, J., Poitras, C. B., Robinson, J. T., Preston, K., Chen, L., & Lipson, M.
- Venue
- Optics Express
- Publisher
- Optica Publishing Group
- Published
- 2009-03-10
- Volume
- 17
- Issue
- 6
- Pages
- 4752
- ISSN
- 1094-4087 (ISSN-L)
- OpenAlex
- W2125964296
- Cited by
- 301
- References
- 0
- FWCI
- 24.55
- Type
- journal article
- Language
- en
- Open access
- gold
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- Cardenas, J., Poitras, C. B., Robinson, J. T., Preston, K., Chen, L., & Lipson, M. (2009). Low loss etchless silicon photonic waveguides. Optics Express. https://doi.org/10.1364/oe.17.004752
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