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Overcoming Si_3N_4 film stress limitations for high quality factor ring resonators
Open accessAbstract
Silicon nitride (Si₃N₄) ring resonators are critical for a variety of photonic devices. However the intrinsically high film stress of silicon nitride has limited both the optical confinement and quality factor (Q) of ring resonators. We show that stress in Si₃N₄ films can be overcome by introducing mechanical trenches for isolating photonic devices from propagating cracks. We demonstrate a Si₃N₄ ring resonator with an intrinsic quality factor of 7 million, corresponding to a propagation loss of 4.2 dB/m. This is the highest quality factor reported to date for high confinement Si₃N₄ ring resonators in the 1,550 nm wavelength range.
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Cited by
Review of Silicon Photonics Technology and Platform Development
Siew, S. Y., Li, B., Gao, F., Zheng, H. Y., Zhang, W., Guo, P., Xie, S. W., Song, A., Dong, B., Luo, L. W., et al. (2021) · Journal of Lightwave Technology · doi:10.1109/jlt.2021.3066203 · Cited by 988
Silicon nitride in silicon photonics
Blumenthal, D. J., Heideman, R., Geuzebroek, D., Leinse, A., & Roeloffzen, C. (2018) · Proceedings of the IEEE · doi:10.1109/jproc.2018.2861576 · Cited by 641
Atom–light interactions in photonic crystals
Goban, A., Hung, C.-L., Yu, S.-P., Hood, J. D., Muniz, J. A., Lee, J. H., Martin, M. J., McClung, A. C., Choi, K. S., Chang, D. E., et al. (2014) · Nature Communications · doi:10.1038/ncomms4808 · Cited by 462
On-chip dual-comb source for spectroscopy
Dutt, A., Joshi, C., Ji, X., Cardenas, J., Okawachi, Y., Luke, K., Gaeta, A. L., & Lipson, M. (2018) · Science Advances · doi:10.1126/sciadv.1701858 · Cited by 453
Self-citationDutt, A., Luke, K., Manipatruni, S., Gaeta, A. L., Nussenzveig, P., & Lipson, M. (2015) · Physical Review Applied · doi:10.1103/physrevapplied.3.044005 · Cited by 255
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Metadata
- Authors
- Luke, K., Dutt, A., Poitras, C. B., & Lipson, M.
- Venue
- Optics Express
- Publisher
- Optica Publishing Group
- Published
- 2013-09-20
- Volume
- 21
- Issue
- 19
- Pages
- 22829
- ISSN
- 1094-4087 (ISSN-L)
- OpenAlex
- W2762534778
- Cited by
- 234
- References
- 0
- FWCI
- 9.39
- Type
- journal article
- Language
- en
- Open access
- gold
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- Luke, K., Dutt, A., Poitras, C. B., & Lipson, M. (2013). Overcoming Si_3N_4 film stress limitations for high quality factor ring resonators. Optics Express. https://doi.org/10.1364/oe.21.022829
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