Silicon Photonics: silicon nitride versus silicon-on-insulator
Abstract
Silicon photonics typically builds on a silicon-on-insulator based high-index-contrast waveguide system. Silicon nitride provides an alternative moderate-index-contrast system that is manufacturable in the same CMOS environment. This paper discusses the relative benefits of both platforms.
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SiN waveguides are less sensitive to width variations than Si waveguides because of their lower refractive index contrast.
“Due to their lower refractive index contrast, SiN waveguides are less sensitive to width variations in comparison to Si waveguides [26].”
From Integrated 1 × 3 MEMS silicon nitride photonics switch (2022) · cites this paper as [26]
Cites
Ultra-low-loss high-aspect-ratio Si_3N_4 waveguides
Bauters, J. F., Heck, M. J. R., John, D., Dai, D., Tien, M.-C., Barton, J. S., Leinse, A., Heideman, R. G., Blumenthal, D. J., & Bowers, J. E. (2011) · Optics Express · doi:10.1364/oe.19.003163 · Cited by 492 · see citing works
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Integrated 1 × 3 MEMS silicon nitride photonics switch
Sharma, S., Kohli, N., Brière, J., Nabki, F., & Ménard, M. (2022) · Optics Express · doi:10.1364/oe.460533 · Cited by 25 · see citing works
III-N/Si₃N₄ Integrated Photonics Platform for Blue Wavelengths
Arefin, R., Ramachandra, S. H., Jung, H., You, W., Hasan, S. M. N., Turski, H., Dwivedi, S., & Arafin, S. (2020) · IEEE Journal of Quantum Electronics · doi:10.1109/jqe.2020.2993634 · Cited by 19 · see citing works
Integrated PbS Colloidal Quantum Dot Photodiodes on Silicon Nitride Waveguides
Pang, C., Deng, Y.-H., Kheradmand, E., Poonkottil, N., Petit, R., Elsinger, L., Detavernier, C., Geiregat, P., Hens, Z., & Van Thourhout, D. (2023) · ACS Photonics · doi:10.1021/acsphotonics.3c00945 · Cited by 16 · see citing works
Self-citation
- Authors
- Baets, R., Subramanian, A. Z., Clemmen, S., Kuyken, B., Bienstman, P., Le Thomas, N., Roelkens, G., Van Thourhout, D., Helin, P., & Severi, S.
- Affiliations
- Ghent University (BE)
- IMEC (BE)
- Venue
- Optical Fiber Communication Conference
- Publisher
- OSA
- Published
- 2016
- Pages
- Th3J.1
- OpenAlex
- W2320925332
- Cited by
- 163
- References
- 1
- Citations by year
- 2026: 10 · 2025: 16 · 2024: 14 · 2023: 17 · 2022: 15 · 2021: 18 · 2020: 24 · 2019: 20 · 2018: 13 · 2017: 15 · 2016: 1
- FWCI
- 22.98
- Type
- conference paper
- Language
- en
- Open access
- closed
- Locations
- Optical Fiber Communication Conference (publishedVersion)
- Ghent University Academic Bibliography (Ghent University) (publishedVersion)
- Dépôt institutionnel de l'Université libre de Bruxelles (Université Libre de Bruxelles) (submittedVersion)
- Ghent University Academic Bibliography (Ghent University) (submittedVersion)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photorefractive and Nonlinear Optics
- Physical Sciences › Engineering › Biomedical Engineering › Plasmonic and Surface Plasmon Research
- Keywords
- silicon photonics, silicon nitride, silicon-on-insulator, CMOS-compatible photonics
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