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Broadband antireflection gratings fabricated upon silicon substrates
Abstract
We fabricated a two-dimensional subwavelength structured (SWS) surface upon a crystal silicon substrate. The SWS surface was patterned by electron beam lithography and etched by an SF(6) fast atom beam. The SWS grating had a conical profile, the period was 150 nm, and the groove was approximately 350 nm deep. The reflectivity was examined at 2002500-nm wavelengths. At 400 nm the reflectivity decreased to 0.5% from the 54.7% of the silicon substrate. We also used HeNe laser light to examine the reflectivity as a function of the incident angle.
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Cited by
Waveguide sub‐wavelength structures: a review of principles and applications
Halir, R., Bock, P. J., Cheben, P., Ortega‐Moñux, A., Alonso‐Ramos, C., Schmid, J. H., Lapointe, J., Xu, D., Wangüemert‐Pérez, J. G., Molina‐Fernández, Í., et al. (2015) · Laser & Photonics Reviews · doi:10.1002/lpor.201400083 · Cited by 658
Anti-reflecting and photonic nanostructures
Chattopadhyay, S., Huang, Y. F., Jen, Y. J., Ganguly, A., Chen, K. H., & Chen, L. C. (2010) · Materials Science and Engineering: R: Reports · doi:10.1016/j.mser.2010.04.001 · Cited by 632
Horie, Y., Han, S., Lee, J.-Y., Kim, J., Kim, Y., Arbabi, A., Shin, C., Shi, L., Arbabi, E., Kamali, S. M., et al. (2017) · Nano Letters · doi:10.1021/acs.nanolett.7b00636 · Cited by 135
Metadata
- Authors
- Kanamori, Y., Sasaki, M., & Hane, K.
- Venue
- Optics Letters
- Publisher
- Optica Publishing Group
- Published
- 1999-10-15
- Volume
- 24
- Issue
- 20
- Pages
- 1422
- ISSN
- 0146-9592 (ISSN-L)
- 1539-4794
- OpenAlex
- W2019290169
- Cited by
- 439
- References
- 0
- FWCI
- 4.18
- Type
- journal article
- Language
- en
- Open access
- closed
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- Kanamori, Y., Sasaki, M., & Hane, K. (1999). Broadband antireflection gratings fabricated upon silicon substrates. Optics Letters. https://doi.org/10.1364/ol.24.001422
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