The DOI matches its Crossref record; 28 of the 28 references it cites were found in a registry or an index.
Visible Wavelength Color Filters Using Dielectric Subwavelength Gratings for Backside-Illuminated CMOS Image Sensor Technologies
Abstract
We report transmissive color filters based on subwavelength dielectric gratings that can replace conventional dye-based color filters used in backside-illuminated CMOS image sensor (BSI CIS) technologies. The filters are patterned in an 80 nm-thick poly silicon film on a 115 nm-thick SiO 2 spacer layer. They are optimized for operating at the primary RGB colors, exhibit peak transmittance of 60-80%, and have an almost insensitive response over a ± 20° angular range. This technology enables shrinking of the pixel sizes down to near a micrometer.
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In the citing paper
“A good agreement was achieved between the optical responses given by both tools when compared with published results of Horie et. al [18].”
From Robust inverse design of all-dielectric metasurface transmission-mode color filters (2020) · cites this paper as [18]
In the citing paper
“Although the void metasurfaces reported in [18] tend to have an improved color gamut as compared to [19], the purity of blue color is extremely poor because of reduced transmission efficiency.”
From Robust inverse design of all-dielectric metasurface transmission-mode color filters (2020) · cites this paper as [18]
In the citing paper
“To the best of our knowledge, the reports by Horie and coworkers [18] and by Berzins and coworkers [19] are the only ones that focus on transmission-mode dielectric metasurfaces for primary color image sensor CFAs.”
From Robust inverse design of all-dielectric metasurface transmission-mode color filters (2020) · cites this paper as [18]
In the citing paper
“It can be observed that the structures obtained in this work provide a good transmission efficiency along with an enhanced color gamut with respect to other dielectric color filters reported in [18,19].”
From Robust inverse design of all-dielectric metasurface transmission-mode color filters (2020) · cites this paper as [18]
Citations
Cites
Arbabi, A., Horie, Y., Bagheri, M., & Faraon, A. (2015) · Nature Nanotechnology · doi:10.1038/nnano.2015.186 · Cited by 2,838
Self-citationJahani, S., & Jacob, Z. (2016) · Nature Nanotechnology · doi:10.1038/nnano.2015.304 · Cited by 1,969
Recent advances in planar optics: from plasmonic to dielectric metasurfaces
Genevet, P., Capasso, F., Aieta, F., Khorasaninejad, M., & Devlin, R. C. (2017) · Optica · doi:10.1364/optica.4.000139 · Cited by 1,268
Arbabi, A., Horie, Y., Ball, A. J., Bagheri, M., & Faraon, A. (2015) · Nature Communications · doi:10.1038/ncomms8069 · Cited by 1,154
Self-citationLight management for photovoltaics using high-index nanostructures
Brongersma, M. L., Cui, Y., & Fan, S. (2014) · Nature Materials · doi:10.1038/nmat3921 · Cited by 958
Plasmonic Color Filters for CMOS Image Sensor Applications
Yokogawa, S., Burgos, S. P., & Atwater, H. A. (2012) · Nano Letters · doi:10.1021/nl302110z · Cited by 614
Flat dielectric grating reflectors with focusing abilities
Fattal, D. A., Li, J., Peng, Z., Marco Fiorentino, B., & Beausoleil, R. G. (2010) · Nature Photonics · doi:10.1038/nphoton.2010.116 · Cited by 490
Broadband antireflection gratings fabricated upon silicon substrates
Kanamori, Y., Sasaki, M., & Hane, K. (1999) · Optics Letters · doi:10.1364/ol.24.001422 · Cited by 440
Tuning the Color of Silicon Nanostructures
Cao, L., Fan, P., Barnard, E. S., Brown, A. M., & Brongersma, M. L. (2010) · Nano Letters · doi:10.1021/nl1013794 · Cited by 340
All-Dielectric Colored Metasurfaces with Silicon Mie Resonators
Proust, J., Bedu, F., Gallas, B., Ozerov, I., & Bonod, N. (2016) · ACS Nano · doi:10.1021/acsnano.6b03207 · Cited by 337
Research works printed but not linked: 3
- Vashistha V., 2016, arXiv.org, e-Print Arch., Phys., arXiv:1612.0349
- Regan E. C., 2016, arXiv.org, e-Print Arch., Phys., arXiv:1611.0068
- Alakarhu, J.Image sensors and image quality in mobile phones.Proceedings of International Image Sensor Workshop, 2007.
Cited by
Sorted by citations
Submicrometer Nanostructure-Based RGB Filters for CMOS Image Sensors
Berzinš, J., Fasold, S., Pertsch, T., Bäumer, S. M. B., & Setzpfandt, F. (2019) · ACS Photonics · doi:10.1021/acsphotonics.9b00021 · Cited by 73
Robust inverse design of all-dielectric metasurface transmission-mode color filters
Panda, S. S., Vyas, H. S., & Hegde, R. S. (2020) · Optical Materials Express · doi:10.1364/ome.409186 · Cited by 35
Metadata
- Authors
- Horie, Y., Han, S., Lee, J.-Y., Kim, J., Kim, Y., Arbabi, A., Shin, C., Shi, L., Arbabi, E., Kamali, S. M., Lee, H.-S., Hwang, S., & Faraon, A.
- Affiliations
- California Institute of Technology (US)
- Samsung Advanced Institute of Technology, Samsung Electronics, Yeongtong-gu, Suwon-si, Gyeonggi-do 443-803, South Korea
- Corresponding author
- Faraon, Andrei
- ORCID
- Venue
- Nano Letters
- Publisher
- American Chemical Society (ACS)
- Published
- 2017-04-13
- Volume
- 17
- Issue
- 5
- Pages
- 3159-3164
- ISSN
- 1530-6984 (ISSN-L)
- 1530-6992
- OpenAlex
- W2604390736
- Cited by
- 135
- References
- 28
- Citations by year
- 2026: 2 · 2025: 18 · 2024: 11 · 2023: 14 · 2022: 18 · 2021: 13 · 2020: 18 · 2019: 18 · 2018: 19 · 2017: 4
- FWCI
- 6.41
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Nano Letters (publishedVersion)
- PubMed (publishedVersion)
- CaltechAUTHORS (California Institute of Technology) (submittedVersion)
- Funders
- Samsung
- Basic Energy Sciences (DE-SC0001293)
- Topics
- Physical Sciences › Materials Science › Surfaces, Coatings and Films › Optical Coatings and Gratings
- Physical Sciences › Engineering › Electrical and Electronic Engineering › CCD and CMOS Imaging Sensors
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photonic Crystals and Applications
- Keywords
- color filters, SiO2 spacer layer, angular insensitivity, pixel size reduction
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- CoChat. (2026). Citation check: Visible Wavelength Color Filters Using Dielectric Subwavelength Gratings for Backside-Illuminated CMOS Image Sensor Technologies. https://app.cochat.ai/papers/10.1021/acs.nanolett.7b00636
- The paper
- Horie, Y., Han, S., Lee, J.-Y., Kim, J., Kim, Y., Arbabi, A., Shin, C., Shi, L., Arbabi, E., Kamali, S. M., Lee, H.-S., Hwang, S., & Faraon, A. (2017). Visible Wavelength Color Filters Using Dielectric Subwavelength Gratings for Backside-Illuminated CMOS Image Sensor Technologies. Nano Letters. https://doi.org/10.1021/acs.nanolett.7b00636
