Use of High Repetition Rate and High Power Lasers in Microfabrication: How to Keep the Efficiency High?
Open accessAbstract
Effects related to the use of high power and repetition rate lasers in ablation of metals and silicon were investigated.Numeric simulation and experiments were performed to find out conditions of the efficient use of laser energy.Accumulation of defects lowers the ablation threshold when a high pulse-repetition rate is applied.An optimum beam waist exists for certain pulse energy to maximize the ablation but the waist does not allow achieving a high processing accuracy.Energy efficiency of the laser processing falls down when pulse energy exceeds the material dependant limit.Plasma shielding was assumed to be the main limiting factor in processing efficiency of metals with the high power picosecond lasers.Intelligent control of process parameters is required to keep optimal conditions for the material removal by laser ablation.
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The material removal rate can be maximized by changing the focusing conditions and varying the size of the beam waist.
“Later results confirmed that the material removal rate can be maximized by changing the focusing conditions and varying the size of the beam waist.104”
From Green nanoparticle synthesis at scale: a perspective on overcoming the limits of pulsed laser ablation in liquids for high-throughput production (2023) · cites this paper as [104]
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- Authors
- Raciukaitis, G.
- Venue
- Journal of Laser Micro/Nanoengineering
- Publisher
- Japan Laser Processing Society
- Published
- 2009-12
- Volume
- 4
- Issue
- 3
- Pages
- 186-191
- ISSN
- 1880-0688 (ISSN-L)
- OpenAlex
- W2045629605
- Cited by
- 183
- References
- 0
- Citations by year
- 2026: 11 · 2025: 5 · 2024: 12 · 2023: 10 · 2022: 16 · 2021: 30 · 2020: 19 · 2019: 17 · 2018: 15 · 2017: 5 · 2016: 8 · 2015: 8 · 2014: 11 · 2013: 4 · 2012: 5
- FWCI
- 4.04
- Type
- journal article
- Language
- en
- Open access
- diamond
- doi.org
- Locations
- Journal of Laser Micro/Nanoengineering (publishedVersion)
- Topics
- Physical Sciences › Engineering › Computational Mechanics › Laser Material Processing Techniques
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced Machining and Optimization Techniques
- Physical Sciences › Engineering › Biomedical Engineering › Laser-Ablation Synthesis of Nanoparticles
- Keywords
- laser ablation, high repetition rate lasers, high-power lasers, microfabrication, metal ablation, defect accumulation, ablation threshold, plasma shielding, picosecond laser, laser efficiency, process parameter control
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