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Cited by 23Advanced MEMS and NEMS TechnologiesPhotonic and Optical DevicesElectrowetting and Microfluidic Technologies

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Translational MEMS Platform for Planar Optical Switching Fabrics

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Sharma, Suraj, Kohli, Niharika, Brière, Jonathan, Ménard, Michaël, Nabki, Frederic·2019·Micromachines
DOI 10.3390/mi10070435PMC PMC6680699
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Abstract

While 3-D microelectromechanical systems (MEMS) allow switching between a large number of ports in optical telecommunication networks, the development of such systems often suffers from design, fabrication and packaging constraints due to the complex structures, the wafer bonding processes involved, and the tight alignment tolerances between different components. In this work, we present a 2-D translational MEMS platform capable of highly efficient planar optical switching through integration with silicon nitride (SiN) based optical waveguides. The discrete lateral displacement provided by simple parallel plate actuators on opposite sides of the central platform enables switching between different input and output waveguides. The proposed structure can displace the central platform by 3.37 µm in two directions at an actuation voltage of 65 V. Additionally, the parallel plate actuator designed for closing completely the 4.26 µm air gap between the fixed and moving waveguides operates at just 50 V. Eigenmode expansion analysis shows over 99% butt-coupling efficiency the between the SiN waveguides when the gap is closed. Also, 2.5 finite-difference time-domain analysis demonstrates zero cross talk between two parallel SiN waveguides across the length of the platform for a 3.5 µm separation between adjacent waveguides enabling multiple waveguide configuration onto the platform. Different MEMS designs were simulated using static structural analysis in ANSYS. These designs were fabricated with a custom process by AEPONYX Inc. (Montreal, QC, Canada) and through the PiezoMUMPs process of MEMSCAP (Durham, NC, USA).

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Figure 1 Illustrations of the proposed translational actuator: (a) 1 × 3 switch configuration with integrated optical filters; (b) 2 × 2 crossbar switch configuration; (c) cross sectional view of the optical MEMS stack proposed. The color scheme to represent the different materials is consistent throughout the figure.
Figure 1 Illustrations of the proposed translational actuator: (a) 1 × 3 switch configuration with integrated optical filters; (b) 2 × 2 crossbar switch configuration; (c) cross sectional view of the optical MEMS stack proposed. The color scheme to represent the different materials is consistent throughout the figure.CC BY · PubMed Central
Figure 2 Optical simulation results for: (a) EME analysis showing transmission efficiency for TE and TM modes between two butt-coupled SiN waveguides as a function of air gap with and without inverted tapers. The inset shows the top-view of the magnitude of the electric field of TE mode for butt-coupling with inverted tapers at a gap of 500 nm; (b) 2.5D FDTD analysis showing cross-talk for TE and TM modes as a function of the gap between two SiN waveguides with 90° bends and 75 µm bending radius. Inset shows top-view of the magnitude of electric field of TE mode for the complete optical path with two parallel SiN waveguides at a gap of 3.1 µm. Image shows that the field remains completely confined in the input waveguide.
Figure 2 Optical simulation results for: (a) EME analysis showing transmission efficiency for TE and TM modes between two butt-coupled SiN waveguides as a function of air gap with and without inverted tapers. The inset shows the top-view of the magnitude of the electric field of TE mode for butt-coupling with inverted tapers at a gap of 500 nm; (b) 2.5D FDTD analysis showing cross-talk for TE and TM modes as a function of the gap between two SiN waveguides with 90° bends and 75 µm bending radius. Inset shows top-view of the magnitude of electric field of TE mode for the complete optical path with two parallel SiN waveguides at a gap of 3.1 µm. Image shows that the field remains completely confined in the input waveguide.CC BY · PubMed Central
Figure 3 Optical simulation results for EME simulations showing the transmission efficiency of TE and TM modes between two butt-coupled SiN waveguides with and without inverted tapers as a function of: (a) horizontal and (b) vertical alignment tolerance.
Figure 3 Optical simulation results for EME simulations showing the transmission efficiency of TE and TM modes between two butt-coupled SiN waveguides with and without inverted tapers as a function of: (a) horizontal and (b) vertical alignment tolerance.CC BY · PubMed Central
Figure 4 Microscopic micrographs of the translational MEMS platform with comb drive during actuation: (a) at 10 V; (b) maximum displacement at 100 V; (c) rotation at 110 V; (d) experimental and simulation based lateral switching displacement v/s actuation voltage curves for the translational MEMS design with comb drive.
Figure 4 Microscopic micrographs of the translational MEMS platform with comb drive during actuation: (a) at 10 V; (b) maximum displacement at 100 V; (c) rotation at 110 V; (d) experimental and simulation based lateral switching displacement v/s actuation voltage curves for the translational MEMS design with comb drive.CC BY · PubMed Central
Figure 5 Fabricated v/s design dimensions through SEM micrograph analysis of the drive fingers for comb drive-based translational MEMS platform in various parts of the actuator: (a) top; (b) center; (c) bottom.
Figure 5 Fabricated v/s design dimensions through SEM micrograph analysis of the drive fingers for comb drive-based translational MEMS platform in various parts of the actuator: (a) top; (b) center; (c) bottom.CC BY · PubMed Central
Figure 6 Total deformation heatmap when 10 µN of force is applied on the top left corner of the structure (force location shown in image insets): (a) comb drive and serpentine spring design; (b) parallel plate and single beam spring design.
Figure 6 Total deformation heatmap when 10 µN of force is applied on the top left corner of the structure (force location shown in image insets): (a) comb drive and serpentine spring design; (b) parallel plate and single beam spring design.CC BY · PubMed Central
Figure 7 Micrographs of the final translational MEMS platform with critical design dimensions for: (a) platform, springs and actuators; (b) lateral switching actuator and stopper; (c) longitudinal gap closing actuator and stopper.
Figure 7 Micrographs of the final translational MEMS platform with critical design dimensions for: (a) platform, springs and actuators; (b) lateral switching actuator and stopper; (c) longitudinal gap closing actuator and stopper.CC BY · PubMed Central
Figure 8 Detailed SEM micrographs with measurements of the fabricated translational MEMS platform: (a) final translational MEMS platform; (b) serpentine spring; (c) lateral actuator and spring’s fabricated dimensions; (d) lateral actuation during high power imaging; (e) gap closing actuator’s fabricated dimensions; (f) gap closing during high power imaging.
Figure 8 Detailed SEM micrographs with measurements of the fabricated translational MEMS platform: (a) final translational MEMS platform; (b) serpentine spring; (c) lateral actuator and spring’s fabricated dimensions; (d) lateral actuation during high power imaging; (e) gap closing actuator’s fabricated dimensions; (f) gap closing during high power imaging.CC BY · PubMed Central
Figure 9 (a) Experimental actuation setup used; (b) zoomed in image of the probes on the MEMS device during tests; (c) schematic of the test circuit used for lateral actuation experiments.
Figure 9 (a) Experimental actuation setup used; (b) zoomed in image of the probes on the MEMS device during tests; (c) schematic of the test circuit used for lateral actuation experiments.CC BY · PubMed Central
Figure 10 Experimental and simulation based displacement v/s actuation voltage results along with relevant pull-in voltages and maximum displacement obtained for (a) the lateral switching actuator; (b) the gap closing actuator.
Figure 10 Experimental and simulation based displacement v/s actuation voltage results along with relevant pull-in voltages and maximum displacement obtained for (a) the lateral switching actuator; (b) the gap closing actuator.CC BY · PubMed Central
Figure 11 (a) Microscopic micrographs of the device at 0 V during actuation tests with probes on MEMS; (b) zoomed in image of the left switching actuator at 65 V and gap closing actuator at 50 V; (c) zoomed in image of the right switching actuator at 65 V and gap closing actuator at 50 V.
Figure 11 (a) Microscopic micrographs of the device at 0 V during actuation tests with probes on MEMS; (b) zoomed in image of the left switching actuator at 65 V and gap closing actuator at 50 V; (c) zoomed in image of the right switching actuator at 65 V and gap closing actuator at 50 V.CC BY · PubMed Central

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Metadata

Authors
Sharma, S., Kohli, N., Brière, J., Ménard, M., & Nabki, F.
Affiliations
  • École de Technologie Supérieure (CA)
  • Active Ethernet Passive Optical Networks Over λ MultipleXing (Canada) (CA)
  • Université du Québec à Montréal (CA)
  • Department of Electrical Engineering, Ecole de Technologie Supérieure, Montréal, QC H3C 1K3, Canada
Corresponding author
Sharma, Suraj
ORCID
Venue
Micromachines
Publisher
MDPI AG
Published
2019-06-30
Volume
10
Issue
7
Pages
435
ISSN
2072-666X (ISSN-L)
DOI
10.3390/mi10070435
PMC
PMC6680699
OpenAlex
W2956148226
Cited by
23
References
0
Citations by year
2026: 1 · 2025: 4 · 2024: 3 · 2023: 6 · 2022: 5 · 2021: 1 · 2020: 2 · 2019: 1
FWCI
0.81
Type
journal article
Language
en
Open access
Licence
Locations
  • Micromachines (publishedVersion, cc-by)
  • Europe PMC (PubMed Central) (publishedVersion, cc-by)
  • PubMed Central (publishedVersion, cc-by)
  • PubMed (publishedVersion)
  • Espace ÉTS (ETS) (submittedVersion)
  • DOAJ (DOAJ: Directory of Open Access Journals) (submittedVersion)
Funders
Natural Sciences and Engineering Research Council of Canada (CRDPJ 470175-14)
Topics
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Electrowetting and Microfluidic Technologies
Keywords
MEMS optical switch, silicon nitride waveguides, parallel-plate actuator, lateral displacement, crosstalk, MEMS packaging, optical networks

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CoChat. (2026). Citation check: Translational MEMS Platform for Planar Optical Switching Fabrics. https://app.cochat.ai/papers/10.3390/mi10070435
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Sharma, S., Kohli, N., Brière, J., Ménard, M., & Nabki, F. (2019). Translational MEMS Platform for Planar Optical Switching Fabrics. Micromachines. https://doi.org/10.3390/mi10070435