Polymer Micromachined Flexible Tactile Sensor for Three-Axial Loads Detection
Open accessAbstract
A flexible three-axial tactile sensor was fabricated on Kapton polyimide film using polymer micromachining technology. Nichrome (Ni:Cr = 8:2) strain gauges were positioned on an etched membrane to detect normal and shear loads. The optimal positions of strain gauges were determined through strain distribution from finite element analysis. The sensor was evaluated by applying normal and shear loads from 0 N to 0.8 N using an evaluation system. Sensitivity of the tactile sensor to normal and shear loads was about 206.6 mV/N and 70.1 mV/N, respectively. The sensor showed good linearity, and its determination coefficient ( $R^2$ ) was about 0.982. The developed sensor can be applied in a curved or compliant surface that requires slip detection and flexibility, such as a robotic fingertip.
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The silver electrode layer is designed to perform triple functions: an etch stop for protecting the piezoelectric membrane during polyimide window etching, an electrode layer for piezoelectric poling, and an electrode layer for sensing pulsewave signals.
“The silver electrode layer is specially designed to perform triple functions: 1) an etch stop for protecting the piezoelectric membrane during the polyimide window etching process using KOH, Ethanol, and DI water (1:8:2) mixture52, 2) an electrode layer for piezoelectric poling process; 3) an electrode layer for sensing the pulsewave signals generated by piezoelectric material.”
From A Flexible and Wearable Human Stress Monitoring Patch (2016) · cites this paper as [52]
Conventional polyimide patterning processes use reactive ion etching or chemical etching with the polyimide etchant of KOH-ethanol-DI water mixture.
“The conventional polyimide patterning processes use reactive ion etching (RIE)66 or chemical etching process5152 with the polyimide etchant of KOH-ethanol-DI water mixture.”
From A Flexible and Wearable Human Stress Monitoring Patch (2016) · cites this paper as [52]
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References 9 · Cited by 44
Research works printed but not linked: 2
- V. Duchaine, N. Lauzier, M. Baril, M.-A. Lacasse, and C. Gos- selin, IEEE International Conference on Robotics and Automa- tion (ICRA '09) (Kobe, Japan 2009 May 12-17) p. 3676. [DOI: 10.1109/ROBOT.2009.5152595]. · DOI
- J. H. Kim, W. C. Choi, H. J. Kwon, and D. I. Kang, 5th IEEE Con- ference on Sensors (Daegu, Korea 2006 Oct. 22-25) p. 1468. [DOI: 10.1109/ICSENS.2007.355911]. · DOI
- Authors
- Choi, W.-C.
- Corresponding author
- Choi, Woo-Chang
- ORCID
- Choi, Woo-Chang
- Venue
- Transactions on Electrical and Electronic Materials
- Published
- 2010-06-25
- Volume
- 11
- Issue
- 3
- Pages
- 130-133
- ISSN
- 1229-7607 (ISSN-L)
- OpenAlex
- W1992363613
- Cited by
- 44
- References
- 9
- Citations by year
- 2025: 1 · 2024: 1 · 2023: 4 · 2022: 1 · 2020: 3 · 2019: 3 · 2018: 3 · 2017: 2 · 2016: 7 · 2015: 4 · 2014: 6 · 2013: 5 · 2012: 3
- FWCI
- 1.70
- Type
- journal article
- Language
- en
- Open access
- bronze
- doi.org
- Locations
- Transactions on Electrical and Electronic Materials (publishedVersion)
- Topics
- Physical Sciences › Engineering › Biomedical Engineering › Advanced Sensor and Energy Harvesting Materials
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
- Physical Sciences › Computer Science › Computer Networks and Communications › Sensor Technology and Measurement Systems
- Keywords
- flexible tactile sensors, polymer micromachining, strain distribution, sensor sensitivity, robotic fingertip, slip detection
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