Harned, Noreen
ASML (Netherlands)
2 papers on CoChat
Most cited papers
- Verified
Lithography gets extreme
Wagner, C., & Harned, N. (2010) · Nature Photonics
Advancements in Photolithography TechniquesAdvanced X-ray Imaging Techniques
Cited by 650
- Verified
First performance results of the ASML alpha demo tool
Meiling, H., Meijer, H., Banine, V., Moors, R., Groeneveld, R., Voorma, H.-J., Mickan, U., Wolschrijn, B., Mertens, B., van Baars, G., et al. (2006) · SPIE Proceedings
Advancements in Photolithography TechniquesAdvanced X-ray Imaging Techniques
Cited by 79
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