Wu, Lianjia

Absorption coefficient of metal-containing photoresists in the extreme ultraviolet

Fallica, R., Haitjema, J., Wu, L., Castellanos Ortega, S., Brouwer, A. M., & Ekinci, Y. (2018) · Journal of Micro/Nanopatterning Materials and Metrology

Advancements in Photolithography TechniquesPhotopolymerization techniques and applications

Cited by 105

Mechanistic insights in Zr-and Hf-based molecular hybrid EUV photoresists

Wu, L., Baljozovic, M., Portale, G., Kazazis, D., Vockenhuber, M., Jung, T., Ekinci, Y., & Castellanos Ortega, S. (2019) · Journal of Micro/Nanopatterning Materials and Metrology

Advancements in Photolithography TechniquesPhotopolymerization techniques and applications

Cited by 49

UV and VUV-induced fragmentation of tin-oxo cage ions

Haitjema, J., Wu, L., Giuliani, A., Nahon, L., Castellanos, S., & Brouwer, A. M. (2021) · Physical Chemistry Chemical Physics

Mass Spectrometry Techniques and ApplicationsInorganic Chemistry and Materials

Cited by 36

Bottom-Up Nanofabrication with Extreme-Ultraviolet Light: Metal–Organic Frameworks on Patterned Monolayers

Lugier, O., Thakur, N., Wu, L., Vockenhuber, M., Ekinci, Y., & Castellanos, S. (2021) · ACS Applied Materials & Interfaces

Advancements in Photolithography TechniquesNanofabrication and Lithography Techniques

Cited by 13