Lieberman, Michael A.

Principles of Plasma Discharges and Materials Processing

Lieberman, M. A., & Lichtenberg, A. J. (2005) · Wiley eBooks

Low-Pressure Plasma Processing and DiagnosticsVacuum and Plasma Arcs

Cited by 4,748

A benchmark study of a capacitively coupled oxygen discharge of the oopd1 particle-in-cell Monte Carlo code

Gudmundsson, J. T., Kawamura, E., & Lieberman, M. A. (2013) · Plasma Sources Science and Technology

Low-Pressure Plasma Processing and DiagnosticsVacuum and Plasma Arcs

Cited by 107

Benchmarked and upgraded particle-in-cell simulations of a capacitive argon discharge at intermediate pressure: The role of metastable atoms

Wen, D.-Q., Krek, J., Gudmundsson, J. T., Kawamura, E., Lieberman, M. A., & Verboncoeur, J. P. (2021) · Plasma Sources Science and Technology

Low-Pressure Plasma Processing and DiagnosticsAtmospheric-Pressure Plasma Applications

Cited by 48

Particle-in-cell simulations with fluid metastable atoms in capacitive argon discharges: Electron elastic scattering and plasma density profile transition

Wen, D.-Q., Krek, J., Gudmundsson, J. T., Kawamura, E., Lieberman, M. A., & Verboncoeur, J. P. (2022) · IEEE Transactions on Plasma Science

Low-Pressure Plasma Processing and DiagnosticsVacuum and Plasma Arcs

Cited by 27