Cited by 48Plasma Diagnostics and ApplicationsPlasma Applications and DiagnosticsVacuum and Plasma Arcs

Benchmarked and upgraded particle-in-cell simulations of a capacitive argon discharge at intermediate pressure: The role of metastable atoms

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Wen, De-Qi, Krek, Janez, Gudmundsson, Jon Tomas, Kawamura, Emi, Lieberman, Michael A, Verboncoeur, John P·2021·Plasma Sources Science and Technology

Abstract

Abstract The capacitive argon discharge operated in the intermediate pressure regime is studied by performing one-dimensional particle-in-cell Monte Carlo collision simulations. First, the basic object-oriented plasma device code ( oopd1-v1 ) is strictly benchmarked against the well-established xpdp1 code over a wide range of pressure (0.05–15 Torr) and varying blocking capacitor of the external circuit (5–10 5 nF), and excellent agreement is obtained. The oopd1-v1 is upgraded to oopd1-v2 and oopd1-v3 , by adding excited atoms modeled as time- and space-evolving fluid species. The metastable Ar m , the radiative Ar r , and the Ar(4p) manifold, and their roles in discharge equilibrium are explored. It is found that the presence of the metastable Ar m enhances the plasma density by a factor of 3 at 1.6 Torr and even higher at pressures up to 5 Torr. At low pressure (0.05 Torr), electron impact ionization from the ground state atom dominates the ionization over the whole discharge region, while metastable pooling and step-wise ionization has small contribution. The proportion of metastable pooling ionization and step-wise ionization increases with increasing pressure and becomes the dominant ionization source at 5–15 Torr.

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  • Key ingredients for the energy conservation were the electric field update with the Ampère law even in the case of electrostatic simulations and employing the same shape function for the electric field and current density calculations.

    “Key ingredients for the energy conservation were the electric field update with the Ampère law even in the case of electrostatic simulations 321,322 and employing the same shape function for the electric field and current density calculations.”

    From Plasma propulsion modeling with particle-based algorithms (2023) · cites this paper as [321]

    Section 2.1 (page unavailable) says the simulations obtain the electric field by solving a discrete Poisson equation, rather than updating it with Ampère’s law as the cited clause claims. The passage describes linear weighting of particle charge but does not identify an energy-conserving shape-function condition. (LLM, conf=0.85)

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  • If the implicit moment method equations are implemented in their original form exactly (without linearization), and if the functions used for current density assignment and electric field interpolation are the same, then for θ = 0.5, they conserve energy exactly, i.e., to a desired accuracy in a controllable way.

    “Recently, it was realized that if the IMM equations are implemented in their original form exactly (without the linearization), and if the functions used for the current density assignment and the electric field interpolation are the same, then for θ = 0 . 5, they conserve energy exactly, i.e., to a desired accuracy in a controllable way 320,321”

    From Plasma propulsion modeling with particle-based algorithms (2023) · cites this paper as [321]

    Section 2.1 describes a Poisson-equation field solver and charge weighting, while Section 2.2 describes an explicit fluid solver. Neither the supplied passages nor searches for the implicit moment method, matching assignment and interpolation functions, and θ = 0.5 address the claimed exact energy conservation. (LLM, conf=0.76)

    Experimental — accuracy not yet measured

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Cited by

Sorted by citations

Authors
Wen, D.-Q., Krek, J., Gudmundsson, J. T., Kawamura, E., Lieberman, M. A., & Verboncoeur, J. P.
Affiliations
  • Michigan State University (US)
  • University of California, Berkeley (US)
Corresponding author
Wen, De-Qi
Venue
Plasma Sources Science and Technology
Published
2021-10-01
Volume
30
Issue
10
Pages
105009
ISSN
  • 0963-0252 (ISSN-L)
  • 1361-6595
OpenAlex
W3187757891
Cited by
48
References
2
Citations by year
2026: 6 · 2025: 8 · 2024: 10 · 2023: 10 · 2022: 10 · 2021: 4
FWCI
2.50
Type
journal article
Language
en
Open access
Locations
Plasma Sources Science and Technology (publishedVersion)
Funders
  • MURI (FA9550-18-1-0062)
  • Applied Materials Corporation, AKT Display Division
  • Icelandic Research Fund Grant (163086)
Topics
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Plasma Diagnostics and Applications
  • Health Sciences › Medicine › Radiology, Nuclear Medicine and Imaging › Plasma Applications and Diagnostics
  • Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Vacuum and Plasma Arcs
Keywords
metastable argon atoms, electron impact ionization, plasma density enhancement, Monte Carlo collision simulation

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