Tagawa, Seiichi
The Institute of Scientific and Industrial Research, The University of Osaka
2 papers on CoChatORCID 0000-0001-7080-0554
Most cited papers
- Verified
Radiation Chemistry in Chemically Amplified Resists
Kozawa, T., & Tagawa, S. (2010) · Japanese Journal of Applied Physics
Advancements in Photolithography TechniquesPhotopolymerization techniques and applications
Cited by 360
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Organic solvent-free water-developable sugar resist material derived from biomass in green lithography
Takei, S., Oshima, A., Ichikawa, T., Sekiguchi, A., Kashiwakura, M., Kozawa, T., Tagawa, S., Oyama, T. G., Ito, S., & Miyasaka, H. (2014) · Microelectronic Engineering
Advancements in Photolithography TechniquesNanofabrication and Lithography Techniques
Cited by 28
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