Spiller, Eberhard A.

Advances in multilayer reflective coatings for extreme ultraviolet lithography

Folta, J. A., Bajt, S., Barbee, Jr., Grabner, R. F., Mirkarimi, P. B., Nguyen, T. D., Schmidt, M. A., Spiller, E. A., Walton, C. C., Wedowski, M., et al. (1999) · SPIE Proceedings

Advancements in Photolithography TechniquesOptical Coatings and Gratings

Cited by 48

Design And Assembly Of A High Resolution Schwarzschild Microscope For Soft X Rays:

Lovas, I., Santy, W., Spiller, E., Tibbetts, R., & Wilczynski, J. (1982) · SPIE Proceedings

Advanced X-ray Imaging TechniquesAdvanced optical system design

Cited by 17

Imaging Performance Of A Normal Incidence X-Ray Telescope Measured At 0.18 keV:

Henry, J. P., Spiller, E., & Weisskopf, M. (1982) · SPIE Proceedings

Advanced X-ray Imaging TechniquesAstronomy and Astrophysical Research

Cited by 8