Design And Assembly Of A High Resolution Schwarzschild Microscope For Soft X Rays:
Abstract
Recently developed multilayer coatings permit use of normal incidence optics for soft x-rays promising a resolution that should be substantially better than that obtained with grazing incidence optics. We describe the design and assembly of a Schwarzschild objective for a scanning x-ray microscope. The Schwarzschild objective, consisting of two nearly concentric spherical mirrors promises diffraction-limited resolution for soft x-rays.
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Margaritondo, G., & Cerrina, F. (1990) · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · doi:10.1016/0168-9002(90)90028-5 · Cited by 76 · see citing works
Bajt, S., Edwards, N. V., & Madey, T. E. (2007) · Surface Science Reports · doi:10.1016/j.surfrep.2007.09.001 · Cited by 71 · see citing works
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UNDERWOOD, J. H., & Attwood, D. T. (1984) · Physics Today · doi:10.1063/1.2916193 · Cited by 48 · see citing works
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Spiller, E. A. (1984) · Springer series in optical sciences/SPringer series in optical sciences · doi:10.1007/978-3-540-38833-3_24 · Cited by 34 · see citing works
Self-citationSavage, D. E., Phang, Y. H., Rownd, J. J., et al. (1993) · Journal of Applied Physics · doi:10.1063/1.355182 · Cited by 34 · see citing works
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Ng, W. K., Ray-Chaudhuri, A. K., Cole, R. K., III, et al. (1990) · Physica Scripta · doi:10.1088/0031-8949/41/6/006 · Cited by 29 · see citing works
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Spiller, E. A., Wilczynski, J., Stearns, D. G., et al. (1992) · Applied Physics Letters · doi:10.1063/1.107522 · Cited by 26 · see citing works
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Kinoshita, H. (2005) · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena · doi:10.1116/1.2127950 · Cited by 25 · see citing works
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Barysheva, M. M., Пестов, А. Е., Салащенко, Н. Н., et al. (2012) · Uspekhi Fizicheskih Nauk · doi:10.3367/ufnr.0182.201207c.0727 · Cited by 20 · see citing works
Tungsten–beryllium multilayer mirrors for soft x rays
Utsumi, Y., Kyuragi, H., Urisu, T., et al. (1988) · Applied Optics · doi:10.1364/ao.27.003933 · Cited by 18 · see citing works
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Bajt, S., Chapman, H. N., Spiller, E. A., et al. (2007) · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · doi:10.1117/12.724786 · Cited by 12 · see citing works
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Horikawa, Y. (1994) · Journal of the Optical Society of America A · doi:10.1364/josaa.11.001985 · Cited by 8 · see citing works
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Stasió, G. D., Capasso, C., Ng, W. K., et al. (1991) · Europhysics Letters (EPL) · doi:10.1209/0295-5075/16/4/016 · Cited by 7 · see citing works
Singh‐Gasson, S. (1999) · Wiley Encyclopedia of Electrical and Electronics Engineering · doi:10.1002/047134608x.w3901
- Authors
- Lovas, I., Santy, W., Spiller, E., Tibbetts, R., & Wilczynski, J.
- Affiliations
- IBM (United States) (US)
- Venue
- SPIE Proceedings
- Publisher
- SPIE
- Published
- 1982-03-24
- Volume
- 0316
- Pages
- 90-99
- ISSN
- 0277-786X (ISSN-L)
- OpenAlex
- W2022499046
- Cited by
- 17
- References
- 0
- Citations by year
- 2024: 1 · 2018: 1 · 2012: 2
- FWCI
- 2.34
- Type
- conference paper
- Language
- en
- Open access
- closed
- Locations
- Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (publishedVersion)
- Topics
- Physical Sciences › Physics and Astronomy › Radiation › Advanced X-ray Imaging Techniques
- Physical Sciences › Engineering › Biomedical Engineering › Advanced optical system design
- Physical Sciences › Physics and Astronomy › Instrumentation › Astronomy and Astrophysical Research
- Keywords
- Schwarzschild objective, soft X-ray microscopy, multilayer coatings, normal incidence optics, diffraction-limited resolution, X-ray optics design
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