Effect of Substrate Temperature on Microstructure and Electrical Properties of LaNiO3 Films Grown on SiO2/Si Substrates by Pulsed Laser Deposition under a High Oxygen Pressure
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High quality epitaxial LNO films with resistivity as low as ~100 μOhm·cm can be prepared on single-crystal substrates with similar lattice parameters by MBE, PLD, or PVD.
“High quality epitaxial LNO films with resistivity as low as ~100 μOhm·cm can be prepared on single-crystal substrates with similar lattice parameters (LaAlO3, SrTiO3) by molecular beam epitaxy (MBE), pulsed laser deposition (PLD), or physical vapor deposition (PVD) [27,28,29,30].”
From Control of Columnar Grain Microstructure in CSD LaNiO3 Films (2023) · cites this paper as [27]
If silicon wafer is used as a substrate, the ρ value of LNO increases: minimum obtained ρ values increase by 3-4 times-ρ = 420 μOhm·cm for PLD, and ρ~700 μOhm·cm for the CSD method (this work).
“Unfortunately, if silicon wafer is used as a substrate, the ρ value of LNO increases: the minimum obtained ρ values increase by 3–4 times—ρ = 420 µOhm·cm—for PLD [27], and ρ~700 µOhm·cm for the CSD method [this work].”
From Control of Columnar Grain Microstructure in CSD LaNiO3 Films (2023) · cites this paper as [27]
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Duan, Z., Cui, Y., Yang, Z., Li, K., Wan, Y., Lu, Z., Xie, Y., & Zhang, J. (2018) · Ceramics International · doi:10.1016/j.ceramint.2017.09.230 · Cited by 32 · see citing works
Control of Columnar Grain Microstructure in CSD LaNiO3 Films
Atanova, A. V., Seregin, D. S., Zhigalina, O. M., Khmelenin, D. N., Orlov, G. A., Turkina, D. I., Sigov, A. S., & Vorotilov, K. A. (2023) · Molecules · doi:10.3390/molecules28041938 · Cited by 5 · see citing works
- Authors
- He, B., & Wang, Z.
- Affiliations
- Chinese Academy of Sciences (CN)
- ORCID
- He, Bin
- Venue
- Applied Physics A
- Published
- 2016-09-21
- Volume
- 122
- Issue
- 10
- ISSN
- 0947-8396 (ISSN-L)
- 1432-0630
- OpenAlex
- W2522253604
- Cited by
- 8
- References
- 0
- Citations by year
- 2026: 1 · 2023: 2 · 2021: 2 · 2020: 1 · 2019: 1 · 2017: 1
- FWCI
- 0.30
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Applied Physics A (publishedVersion)
- Funders
- National Natural Science Foundation of China
- Chinese Academy of Sciences
- Topics
- Physical Sciences › Materials Science › Materials Chemistry › Ferroelectric and Piezoelectric Materials
- Physical Sciences › Materials Science › Materials Chemistry › Electronic and Structural Properties of Oxides
- Physical Sciences › Materials Science › Electronic, Optical and Magnetic Materials › Multiferroics and related materials
- Keywords
- LaNiO3 thin films, substrate temperature, pulsed laser deposition, high oxygen pressure, SiO2/Si substrate, electrical resistivity, grain size, surface roughness, oxygen loss, ferroelectric thin films, barium titanate, lead zirconate titanate, electrode layers, seed layer, crystallographic texture, perovskite oxides
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