The DOI matches its Crossref record; 17 of the 17 references it cites were found in a registry or an index.
Surface science aspects of etching reactions
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Citations
Cites
Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
Sigmund, P. (1969) · Physical Review · doi:10.1103/physrev.184.383 · Cited by 3,589
Theory of the oxidation of metals
Cabrera, N., & Mott, N. F. (1949) · Reports on Progress in Physics · doi:10.1088/0034-4885/12/1/308 · Cited by 2,986
Sigmund, P. (1969) · Cited by 1,964
Computer simulation of atomic-displacement cascades in solids in the binary-collision approximation
Robinson, M. T., & Torrens, I. M. (1974) · Physical review. B, Solid state · doi:10.1103/physrevb.9.5008 · Cited by 1,651
Theory of auger ejection of electrons from metals by ions
Hagstrum, H. D. (1954) · Physical Review · doi:10.1103/physrev.96.336 · Cited by 1,356
II. The energy spectrum of ejected atoms during the high energy sputtering of gold
Thompson, M. W. (1968) · Philosophical Magazine · doi:10.1080/14786436808227358 · Cited by 1,198
Ion- and electron-assisted gas-surface chemistry—An important effect in plasma etching
Coburn, J. W., & Winters, H. F. (1979) · Journal of Applied Physics · doi:10.1063/1.326355 · Cited by 761
Self-citationPlasma etching—A discussion of mechanisms
Coburn, J. W., & Winters, H. F. (1979) · Journal of Vacuum Science and Technology · doi:10.1116/1.569958 · Cited by 613
Self-citationPlasma etching of Si and SiO2—The effect of oxygen additions to CF4 plasmas
Mogab, C. J., Adams, A. C., & Flamm, D. L. (1978) · Journal of Applied Physics · doi:10.1063/1.325382 · Cited by 572
Laser-induced gas-surface interactions
Chuang, T. J. (1983) · Surface Science Reports · doi:10.1016/0167-5729(83)90005-5 · Cited by 416
Cited by
A survey on the reactive ion etching of silicon in microtechnology
Jansen, H., Gardeniers, H., Boer, M. D., Elwenspoek, M., & Fluitman, J. (1996) · Journal of Micromechanics and Microengineering · doi:10.1088/0960-1317/6/1/002 · Cited by 481
Holste, K., Dietz, P., Scharmann, S., Keil, K., Henning, T., Zschätzsch, D., Reitemeyer, M., Nauschütt, B., Kiefer, F., Kunze, F., et al. (2020) · Review of Scientific Instruments · doi:10.1063/5.0010134 · Cited by 207
Metadata
- Authors
- Winters, H. F., & Coburn, J. W.
- Venue
- Surface Science Reports
- Publisher
- Elsevier BV
- Published
- 1992-01
- Volume
- 14
- Issue
- 4-6
- Pages
- 162-269
- ISSN
- 0167-5729 (ISSN-L)
- OpenAlex
- W2950740811
- Cited by
- 502
- References
- 17
- FWCI
- 34.98
- Type
- journal article
- Language
- en
- Open access
- closed
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
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How to cite
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- CoChat. (2026). Citation check: Surface science aspects of etching reactions. https://app.cochat.ai/papers/10.1016/0167-5729(92)90009-z
- The paper
- Winters, H. F., & Coburn, J. W. (1992). Surface science aspects of etching reactions. Surface Science Reports. https://doi.org/10.1016/0167-5729(92)90009-z
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
