The DOI matches its Crossref record; 5 of the 5 references it cites were found in a registry or an index.
Microrobots and micromechanical systems
Overview
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Registry
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Citations
Cites
Silicon as a mechanical material
Petersen, K. E. (1982) · Proceedings of the IEEE · doi:10.1109/proc.1982.12331 · Cited by 2,902
Anisotropic etching of silicon
Bean, K. E. (1978) · IEEE Transactions on Electron Devices · doi:10.1109/t-ed.1978.19250 · Cited by 803
Fabrication of novel three-dimensional microstructures by the anisotropic etching of
Bassous, E. (1978) · IEEE Transactions on Electron Devices · doi:10.1109/t-ed.1978.19249 · Cited by 309
Fine-grained polysilicon films with built-in tensile strain
Guckel, H., Burns, D. W., Visser, C. C. G., Tilmans, H. A. C., & Deroo, D. (1988) · IEEE Transactions on Electron Devices · doi:10.1109/16.2534 · Cited by 158
Ink jet printing nozzle arrays etched in silicon
BASSOUS, E., Taub, H. H., & Kuhn, L. (1977) · Applied Physics Letters · doi:10.1063/1.89587 · Cited by 153
Cited by
Science, technology and the future of small autonomous drones
Floreano, D., & Wood, R. J. (2015) · Nature · doi:10.1038/nature14542 · Cited by 1,476
Review of Microscale Magnetic Power Generation
Arnold, D. P. (2007) · IEEE Transactions on Magnetics · doi:10.1109/tmag.2007.906150 · Cited by 549
Micro-stereolithography of polymeric and ceramic microstructures
Zhang, X., Jiang, X. N., & Sun, C. (1999) · Sensors and Actuators A: Physical · doi:10.1016/s0924-4247(99)00189-2 · Cited by 450
Surface tension-powered self-assembly of microstructures - The state-of-the-art
Syms, R. R. A., Yeatman, E. M., Bright, V. M., & Whitesides, G. M. (2003) · Journal of Microelectromechanical Systems · doi:10.1109/jmems.2003.811724 · Cited by 339
Micromachining for optical and optoelectronic systems
Wu, M. C. (1997) · Proceedings of the IEEE · doi:10.1109/5.649660 · Cited by 264
Metadata
- Authors
- Trimmer, W. S. N.
- Venue
- Sensors and Actuators
- Publisher
- Elsevier BV
- Published
- 1989-09
- Volume
- 19
- Issue
- 3
- Pages
- 267-287
- ISSN
- 0250-6874 (ISSN-L)
- OpenAlex
- W2052319034
- Cited by
- 414
- References
- 5
- FWCI
- 7.06
- Type
- journal article
- Language
- en
- Open access
- closed
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
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How to cite
Cite CoChat for the checks on this page, and the paper for its own findings.
- This page
- CoChat. (2026). Citation check: Microrobots and micromechanical systems. https://app.cochat.ai/papers/10.1016/0250-6874(89)87079-9
- The paper
- Trimmer, W. S. N. (1989). Microrobots and micromechanical systems. Sensors and Actuators. https://doi.org/10.1016/0250-6874(89)87079-9
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
