The DOI matches its Crossref record; 97 of the 97 references it cites were found in a registry or an index.
The chemistry and application of nonchemically amplified (non-CA) chain-scission resists
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Key Challenges and Opportunities for Advanced Extreme Ultraviolet Lithography Photoresist Materials
Li, M., & Aqad, E. (2025) · Advanced Functional Materials · doi:10.1002/adfm.202420962 · Cited by 33
Metadata
- Authors
- Whittaker, A. K.
- Affiliations
- The University of Queensland (AU)
- Corresponding author
- Whittaker, Andrew K.
- ORCID
- Whittaker, Andrew K.
- Venue
- Frontiers of Nanoscience
- Publisher
- Elsevier
- Published
- 2016
- Pages
- 193-210
- ISSN
- 1876-276X (ISSN-L)
- 1876-2778
- OpenAlex
- W2560550992
- Cited by
- 3
- References
- 97
- Citations by year
- 2025: 1 · 2024: 2
- FWCI
- 0.00
- Type
- book chapter
- Language
- en
- Open access
- closed
- Locations
- Frontiers of nanoscience (publishedVersion)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advancements in Photolithography Techniques
- Physical Sciences › Chemistry › Organic Chemistry › Photopolymerization techniques and applications
- Physical Sciences › Materials Science › Surfaces, Coatings and Films › Nanofabrication and Lithography Techniques
- Keywords
- photoresist chemistry, line edge roughness, chemical amplification, acid diffusion, resist sensitivity, etch resistance, pattern fidelity, 193 nm lithography, EUV lithography, electron beam lithography, sub-10 nm patterning
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