Cited by 3Advancements in Photolithography TechniquesPhotopolymerization techniques and applicationsNanofabrication and Lithography Techniques

The DOI matches its Crossref record; 97 of the 97 references it cites were found in a registry or an index.

The chemistry and application of nonchemically amplified (non-CA) chain-scission resists

Whittaker, Andrew K.·2016·Frontiers of Nanoscience

Overview

Integrity signals

Registry

Crossref · 10.1016/b978-0-08-100354-1.00006-5

Cites

97 of 97 references verified0 citation errors · 0 not checkable

Statistics

Recomputing p-values needs the paper’s full text.

Verification

Claims the paper makes

We couldn’t retrieve this paper’s full text, so its claims and self-check weren’t run. The registry and citation checks still apply.

Citations

Cites

Flagged first, then by citations

Research works printed but not linked: 6

  1. Dole, 1972, vol. 1
  2. Dole, 1973, vol. 2
  3. Garrett, 1990, Radiation chemistry of polymers with simultaneous scission and depropagation, Polym Microelectron Proc Int Symp, 47
  4. Hill, 1993, Temperature effects on the radiation degradation of polyisobutene and poly(α-methylstyrene), vol. 527, 50
  5. Ito, 1984, Applications of photoinitiators to the design of resists for semiconductor manufacturing, in polymers in electronics, vol. 242, 11
  6. Willson, 1982, Chemical amplification in the design of polymers for resist applications, Int Union Pure Appl Chem, 28, 448

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Metadata

Authors
Whittaker, A. K.
Affiliations
The University of Queensland (AU)
Corresponding author
Whittaker, Andrew K.
Venue
Frontiers of Nanoscience
Publisher
Elsevier
Published
2016
Pages
193-210
ISSN
  • 1876-276X (ISSN-L)
  • 1876-2778
OpenAlex
W2560550992
Cited by
3
References
97
Citations by year
2025: 1 · 2024: 2
FWCI
0.00
Type
book chapter
Language
en
Open access
closed
Locations
Frontiers of nanoscience (publishedVersion)
Topics
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Advancements in Photolithography Techniques
  • Physical Sciences › Chemistry › Organic Chemistry › Photopolymerization techniques and applications
  • Physical Sciences › Materials Science › Surfaces, Coatings and Films › Nanofabrication and Lithography Techniques
Keywords
photoresist chemistry, line edge roughness, chemical amplification, acid diffusion, resist sensitivity, etch resistance, pattern fidelity, 193 nm lithography, EUV lithography, electron beam lithography, sub-10 nm patterning

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