Physical Vapor Deposition Technology for Coated Cutting Tools: A Review

Magnetron sputtering: a review of recent developments and applications

Kelly, P. J., & Arnell, R. D. (2000) · Vacuum · doi:10.1016/s0042-207x(99)00189-x · Cited by 2,144 · see citing works

A novel pulsed magnetron sputter technique utilizing very high target power densities

Kouznetsov, V., Macák, K., Schneider, J. M., et al. (1999) · Surface and Coatings Technology · doi:10.1016/s0257-8972(99)00292-3 · Cited by 1,085 · see citing works

High power pulsed magnetron sputtering: A review on scientific and engineering state of the art

Sarakinos, K., Alami, J., & Konstantinidis, S. (2009) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2009.11.013 · Cited by 1,080 · see citing works

High-performance coatings for cutting tools

Bobzin, K. (2016) · CIRP journal of manufacturing science and technology · doi:10.1016/j.cirpj.2016.11.004 · Cited by 461 · see citing works

Magnetron sputtering – Milestones of 30 years

Bräuer, G., Szyszka, B., Vergöhl, M., et al. (2010) · Vacuum · doi:10.1016/j.vacuum.2009.12.014 · Cited by 433 · see citing works

Charged particle fluxes from planar magnetron sputtering sources

Window, B., & Savvides, N. (1986) · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · doi:10.1116/1.573470 · Cited by 424 · see citing works

Cutting with coated tools: Coating technologies, characterization methods and performance optimization

Bouzakis, K. ‐., Michailidis, N., Skordaris, G., et al. (2012) · CIRP Annals · doi:10.1016/j.cirp.2012.05.006 · Cited by 416 · see citing works

High-temperature bulk metallic glasses developed by combinatorial methods

Li, M., Zhao, S.-F., Lu, Z., Hirata, A., Wen, P., Bai, H. Y., Chen, M. W., Schroers, J., Liu, Y., & Wang, W. (2019) · Nature · doi:10.1038/s41586-019-1145-z · Cited by 327 · see citing works

Interface microstructure engineering by high power impulse magnetron sputtering for the enhancement of adhesion

Ehiasarian, A. P., Wen, J., & Petrov, I. (2007) · Journal of Applied Physics · doi:10.1063/1.2697052 · Cited by 302 · see citing works

Discharge physics of high power impulse magnetron sputtering

Anders, A. (2011) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2011.03.081 · Cited by 299 · see citing works

Architecture of PVD coatings for metalcutting applications: A review

Inspektor, A., & Salvador, A. (2014) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2014.08.068 · Cited by 271 · see citing works

Ionization of sputtered metals in high power pulsed magnetron sputtering

Böhlmark, J., Alami, J., Christou, C., et al. (2004) · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · doi:10.1116/1.1818135 · Cited by 264 · see citing works

Approaches to rid cathodic arc plasmas of macro- and nanoparticles: a review

Anders, A. (1999) · Surface and Coatings Technology · doi:10.1016/s0257-8972(99)00460-0 · Cited by 242 · see citing works

A brief review of high-entropy films

Yan, X. H., Li, J., Zhang, W. R., et al. (2017) · Materials Chemistry and Physics · doi:10.1016/j.matchemphys.2017.07.078 · Cited by 237 · see citing works

Unbalanced dc magnetrons as sources of high ion fluxes

Window, B., & Savvides, N. (1986) · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · doi:10.1116/1.573904 · Cited by 212 · see citing works

CATHODIC ARC DEPOSITION OF FILMS

Brown, I. G. (1998) · Annual Review of Materials Science · doi:10.1146/annurev.matsci.28.1.243 · Cited by 210 · see citing works

Unbalanced magnetron ion-assisted deposition and property modification of thin films

Savvides, N., & Window, B. (1986) · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · doi:10.1116/1.573869 · Cited by 182 · see citing works

Recent advances in magnetron sputtering

Arnell, R. D., & Kelly, P. J. (1999) · Surface and Coatings Technology · doi:10.1016/s0257-8972(98)00749-x · Cited by 170 · see citing works

On the deposition rate in a high power pulsed magnetron sputtering discharge

Alami, J., Sarakinos, K., Mark, G., et al. (2006) · Applied Physics Letters · doi:10.1063/1.2362575 · Cited by 167 · see citing works

A review of metal-ion-flux-controlled growth of metastable TiAlN by HIPIMS/DCMS co-sputtering

Greczyński, G., Lu, J., Jensen, J., et al. (2014) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2014.01.055 · Cited by 164 · see citing works

Plasma and ion sources in large area coating: A review

Anders, A. (2005) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2005.08.018 · Cited by 161 · see citing works

Investigation of high power impulse magnetron sputtering pretreated interfaces for adhesion enhancement of hard coatings on steel

Lattemann, M., Ehiasarian, A. P., Böhlmark, J., et al. (2005) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2005.11.082 · Cited by 158 · see citing works

High rate deposition of thick CrN and Cr2N coatings using modulated pulse power (MPP) magnetron sputtering

Lin, J., Sproul, W. D., Moore, J. J., et al. (2010) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2010.11.039 · Cited by 152 · see citing works

Properties of (Ti,Cr,Al)N coatings with high Al content deposited by new plasma enhanced arc-cathode

Yamamoto, K. (2003) · Surface and Coatings Technology · doi:10.1016/s0257-8972(03)00580-2 · Cited by 152 · see citing works

On the relationship between the peak target current and the morphology of chromium nitride thin films deposited by reactive high power pulsed magnetron sputtering

Alami, J., Sarakinos, K., Uslu, F., et al. (2008) · Journal of Physics D Applied Physics · doi:10.1088/0022-3727/42/1/015304 · Cited by 148 · see citing works

Role of Tin+ and Aln+ ion irradiation (n=1, 2) during Ti1-xAlxN alloy film growth in a hybrid HIPIMS/magnetron mode

Greczyński, G., Lü, J., Johansson, M., et al. (2012) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2012.04.024 · Cited by 144 · see citing works

Twenty-five years of progress in vacuum arc research and utilization

Boxman, R. L., Goldsmith, S., & Greenwood, A. N. (1997) · IEEE Transactions on Plasma Science · doi:10.1109/27.650894 · Cited by 128 · see citing works

Microstructure, mechanical and tribological behaviors of MoS2-Ti composite coatings deposited by a hybrid HIPIMS method

Qin, X., Ke, P., Wang, A., et al. (2013) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2013.04.040 · Cited by 126 · see citing works

A Critical Review on Physical Vapor Deposition Coatings Applied on Different Engine Components

Mehran, Q. M., Fazal, M. A., Bushroa, A. R., et al. (2017) · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · doi:10.1080/10408436.2017.1320648 · Cited by 118 · see citing works

A unified treatment of self-sputtering, process gas recycling, and runaway for high power impulse sputtering magnetrons

Brenning, N., Guðmundsson, J. T., Raadu, M. A., et al. (2017) · Plasma Sources Science and Technology · doi:10.1088/1361-6595/aa959b · Cited by 116 · see citing works

Recent developments in plasma assisted physical vapour deposition

Schneider, J. M., Rohde, S. L., Sproul, W. D., et al. (2000) · Journal of Physics D Applied Physics · doi:10.1088/0022-3727/33/18/201 · Cited by 111 · see citing works

The ‘recycling trap’: a generalized explanation of discharge runaway in high-power impulse magnetron sputtering

Anders, A., Čapek, J., Hála, M., et al. (2011) · Journal of Physics D Applied Physics · doi:10.1088/0022-3727/45/1/012003 · Cited by 108 · see citing works

Synthesis and mechanical properties of Cr–Si–N coatings deposited by a hybrid system of arc ion plating and sputtering techniques

Park, J. H., Chung, W. S., Cho, Y., et al. (2004) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2004.08.045 · Cited by 107 · see citing works

Deposition of superhard amorphous carbon films by pulsed vacuum arc deposition

Schultrich, B., Scheibe, H. ‐., Drescher, D., et al. (1998) · Surface and Coatings Technology · doi:10.1016/s0257-8972(97)00386-1 · Cited by 106 · see citing works

Hybrid HIPIMS and DC magnetron sputtering deposition of TiN coatings: Deposition rate, structure and tribological properties

Luo, Q., Yang, S., & Cooke, K. (2013) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2013.07.003 · Cited by 105 · see citing works

Pulse enhanced electron emission (P3e™) arc evaporation and the synthesis of wear resistant Al–Cr–O coatings in corundum structure

Ramm, J., Ante, M., Bachmann, T., et al. (2007) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2007.05.044 · Cited by 105 · see citing works

Droplet formation on steel substrates during cathodic steered arc metal ion etching

Münz, W. ‐., Smith, I. J., Lewis, D. B., et al. (1997) · Vacuum · doi:10.1016/s0042-207x(96)00307-7 · Cited by 104 · see citing works

Corrosion-wear behaviour of PVD Cr/CrN multilayer coatings for gear applications

Bayon, R., Igartua, A., Fernández, X., et al. (2008) · Tribology International · doi:10.1016/j.triboint.2008.06.015 · Cited by 103 · see citing works

Improvement of PVD coated inserts cutting performance, through appropriate mechanical treatments of substrate and coating surface

Bouzakis, K. ‐., Michailidis, N., Hadjiyiannis, S., et al. (2001) · Surface and Coatings Technology · doi:10.1016/s0257-8972(01)01485-2 · Cited by 100 · see citing works

Recent advances in modulated pulsed power magnetron sputtering for surface engineering

Lin, J., Sproul, W. D., Moore, J. J., et al. (2011) · JOM · doi:10.1007/s11837-011-0092-4 · Cited by 99 · see citing works

Superhard Ti–Si–N coatings by a hybrid system of arc ion plating and sputtering techniques

Kim, K. H., Choi, S.-R., & Yoon, S.-Y. (2002) · Surface and Coatings Technology · doi:10.1016/s0257-8972(02)00499-1 · Cited by 99 · see citing works

Effect of asynchronous pulsing parameters on the structure and properties of CrAlN films deposited by pulsed closed field unbalanced magnetron sputtering (P-CFUBMS)

Lin, J., Moore, J. J., Mishra, B., et al. (2007) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2007.06.068 · Cited by 97 · see citing works

Vacuum arc coatings for tools: potential and application

Vetter, J. (1995) · Surface and Coatings Technology · doi:10.1016/0257-8972(95)02499-9 · Cited by 86 · see citing works

Microstructural control of Cr–Si–N films by a hybrid arc ion plating and magnetron sputtering process

Wang, Q. M., & Kim, K. H. (2009) · Acta Materialia · doi:10.1016/j.actamat.2009.07.001 · Cited by 84 · see citing works

Improved control of TiN coating properties using cathodic arc evaporation with a pulsed bias

Olbrich, W., Fessmann, J., Kampschulte, G., et al. (1991) · Surface and Coatings Technology · doi:10.1016/0257-8972(91)90065-5 · Cited by 83 · see citing works

Strain-free, single-phase metastable Ti0.38Al0.62N alloys with high hardness: metal-ion energy vs. momentum effects during film growth by hybrid high-power pulsed/dc magnetron cosputtering

Greczyński, G., Lu, J., Jensen, J., et al. (2014) · Thin Solid Films · doi:10.1016/j.tsf.2014.01.017 · Cited by 83 · see citing works

Influence of Substrate Negative Bias on Structure and Properties of TiN Coatings Prepared by Hybrid HIPIMS Method

Wang, Z., Zhang, D., Ke, P., et al. (2014) · Journal of Material Science and Technology · doi:10.1016/j.jmst.2014.06.002 · Cited by 83 · see citing works

Physics and phenomena in pulsed magnetrons: an overview

Bradley, J. W., & Welzel, T. (2009) · Journal of Physics D Applied Physics · doi:10.1088/0022-3727/42/9/093001 · Cited by 82 · see citing works

Structure and properties of CrSiN nanocomposite coatings deposited by hybrid modulated pulsed power and pulsed dc magnetron sputtering

Lin, J., Wang, B., Ou, Y., et al. (2012) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2012.11.053 · Cited by 82 · see citing works

Effect of peak target power on the properties of Cr thin films sputtered by HiPIMS in deep oscillation magnetron sputtering (DOMS) mode

Ferreira, F., Serra, R., de Oliveira, J. C., et al. (2014) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2014.09.020 · Cited by 81 · see citing works

Nanostructured hard coatings deposited by cathodic arc deposition: From concepts to applications

Sanchette, F., Ducros, C., Schmitt, T., et al. (2011) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2011.06.015 · Cited by 80 · see citing works

Selection of metal ion irradiation for controlling Ti1−xAlxN alloy growth via hybrid HIPIMS/magnetron co-sputtering

Greczyński, G., Lu, J., Johansson, M., et al. (2011) · Vacuum · doi:10.1016/j.vacuum.2011.10.027 · Cited by 78 · see citing works

SEM image analysis of droplet formation during metal ion etching by a steered arc discharge

Creasey, S., Lewis, D. B., Smith, I. J., et al. (1997) · Surface and Coatings Technology · doi:10.1016/s0257-8972(97)00137-0 · Cited by 78 · see citing works

Properties of Ti1Si N films deposited by concurrent cathodic arc evaporation and magnetron sputtering

Martin, P., & Bendavid, A. (2002) · Surface and Coatings Technology · doi:10.1016/s0257-8972(02)00491-7 · Cited by 75 · see citing works

Ar + H2 plasma etching for improved adhesion of PVD coatings on steel substrates

Barshilia, H. C., Ananth, A., Khan, J., et al. (2011) · Vacuum · doi:10.1016/j.vacuum.2011.10.028 · Cited by 75 · see citing works

CrN/NbN superlattice structured coatings with enhanced corrosion resistance achieved by high power impulse magnetron sputtering interface pre-treatment

Reinhard, C., Ehiasarian, A. P., & Hovsepian, P. E. (2006) · Thin Solid Films · doi:10.1016/j.tsf.2006.11.014 · Cited by 68 · see citing works

Control of Ti1−xSixN nanostructure via tunable metal-ion momentum transfer during HIPIMS/DCMS co-deposition

Greczyński, G., Patscheider, J., Lu, J., et al. (2015) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2015.09.001 · Cited by 64 · see citing works

Macroparticles in films deposited by steered cathodic arc

Swift, P. D. (1996) · Journal of Physics D Applied Physics · doi:10.1088/0022-3727/29/7/041 · Cited by 64 · see citing works

Effect of cathodic arc PVD parameters on roughness of TiN coating on steel substrate

Ali, M. S., HAMZAH, E. B., Qazi, I. A., et al. (2009) · Current Applied Physics · doi:10.1016/j.cap.2009.07.007 · Cited by 64 · see citing works

Adhesion enhancement of DLC hard coatings by HiPIMS metal ion etching pretreatment

Santiago, J. A., Fernández-Martínez, I., Wennberg, A., et al. (2018) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2018.04.090 · Cited by 64 · see citing works

Structure, adhesion and corrosion behavior of CrN/TiN superlattice coatings deposited by the combined deep oscillation magnetron sputtering and pulsed dc magnetron sputtering

Ou, Y., Lin, J., Tong, S. Y., et al. (2015) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2015.10.009 · Cited by 63 · see citing works

Effect of Ar:N2 ratio on structure and properties of Ni–TiN nanocomposite thin films processed by reactive RF/DC magnetron sputtering

Kumar, M., Mishra, S. K., & Mitra, R. (2013) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2013.04.014 · Cited by 62 · see citing works

Microstructure and tribological behavior of TiAlSiN coatings deposited by deep oscillation magnetron sputtering

Ou, Y., Chen, H.-Y., Li, Z. Y., et al. (2018) · Journal of the American Ceramic Society · doi:10.1111/jace.15769 · Cited by 61 · see citing works

High power impulse magnetron sputtering and related discharges: Scalable plasma sources for plasma-based ion implantation and deposition

Anders, A. (2010) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2010.01.047 · Cited by 57 · see citing works

Self-sustained self-sputtering: a possible mechanism for the superdense glow phase of a pseudospark

Anders, A., Anders, S., Gundersen, M. A., et al. (1995) · IEEE Transactions on Plasma Science · doi:10.1109/27.402313 · Cited by 57 · see citing works

Deposition rate enhancement in HiPIMS through the control of magnetic field and pulse configuration

Tiron, V., Velicu, I., Mihăilă, I., et al. (2018) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2018.01.065 · Cited by 57 · see citing works

High-throughput screening for biomedical applications in a Ti-Zr-Nb alloy system through masking co-sputtering

Yan, X., Ma, J., & Zhang, Y. (2019) · Science China Physics Mechanics and Astronomy · doi:10.1007/s11433-019-9387-7 · Cited by 57 · see citing works

Cr1−xAlxN coatings deposited by lateral rotating cathode arc for high speed machining applications

Ding, X.-Z., Zeng, X., Liu, Y. C., et al. (2007) · Thin Solid Films · doi:10.1016/j.tsf.2007.05.019 · Cited by 56 · see citing works

Influence of ion-to-neutral flux ratio on the mechanical and tribological properties of TiN coatings deposited by HiPIMS

Tiron, V., Velicu, I., Cristea, D., et al. (2017) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2017.11.048 · Cited by 56 · see citing works

Applications of HIPIMS metal oxides

Sittinger, V., Lenck, O., Vergöhl, M., et al. (2013) · Thin Solid Films · doi:10.1016/j.tsf.2013.08.087 · Cited by 52 · see citing works

Thirty years of rotatable magnetrons

Gryse, R. D., Haemers, J., Leroy, W., et al. (2012) · Thin Solid Films · doi:10.1016/j.tsf.2012.04.065 · Cited by 52 · see citing works

Optimized scratch adhesion for TiSiN coatings deposited by a combination of DC and RF sputtering

Bushroa, A. R., Masjuki, H. H., Muhamad, M. R., et al. (2011) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2011.07.048 · Cited by 52 · see citing works

Improved adhesion of carbon nitride coatings on steel substrates using metal HiPIMS pretreatments

Bakoglidis, K. D., Schmidt, S., Greczyński, G., et al. (2016) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2016.06.048 · Cited by 52 · see citing works

Effects of tailored nitriding layers on comprehensive properties of duplex plasma-treated AlTiN coatings

Deng, Y., Tan, C., Wang, Y., et al. (2017) · Ceramics International · doi:10.1016/j.ceramint.2017.03.209 · Cited by 51 · see citing works

External magnetic field increases both plasma generation and deposition rate in HiPIMS

Ganesan, R., Akhavan, B., Dong, X., et al. (2018) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2018.02.076 · Cited by 50 · see citing works

Effect of the degree of high power impulse magnetron sputtering utilisation on the structure and properties of TiN films

Hovsepian, P. E., Sugumaran, A. A., Purandare, Y., et al. (2014) · Thin Solid Films · doi:10.1016/j.tsf.2014.04.002 · Cited by 48 · see citing works

Industrial-scale deposition of highly adherent CNx films on steel substrates

Broitman, E., Czigány, Z., Greczyński, G., et al. (2010) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2010.03.038 · Cited by 47 · see citing works

Effect of Si addition on the microstructure, mechanical properties and tribological properties of Zr–Si–N nanocomposite coatings deposited by a hybrid coating system

Choi, H., Jang, J., Zhang, T., et al. (2014) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2014.10.008 · Cited by 47 · see citing works

Evolution of the plasma composition of a high power impulse magnetron sputtering system studied with a time-of-flight spectrometer

Окс, Е. М., & Anders, A. (2009) · Journal of Applied Physics · doi:10.1063/1.3125443 · Cited by 47 · see citing works

Fabrication and characterization of in-situ duplex plasma-treated nanocrystalline Ti/AlTiN coatings

Tan, C., Kuang, T., Zhou, K., et al. (2016) · Ceramics International · doi:10.1016/j.ceramint.2016.03.207 · Cited by 47 · see citing works

The influence of target erosion on the mass spectra of clusters formed in the planar DC magnetron sputtering source

Ganeva, M., Pipa, A. V., & Hippler, R. (2012) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2012.10.012 · Cited by 46 · see citing works

Plastic deformation behavior of nanostructured CrN/AlN multilayer coatings deposited by hybrid dcMS/HPPMS

Bobzin, K., Brögelmann, T., Kruppe, N. C., Arghavani, M., Mayer, J., & Weirich, T. E. (2017) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2017.06.092 · Cited by 46 · see citing works

Arc-enhanced glow discharge in vacuum arc machines

Vetter, J., Burgmer, W., & Perry, A. J. (1993) · Surface and Coatings Technology · doi:10.1016/0257-8972(93)90074-x · Cited by 44 · see citing works

Effect of mid-frequency discharge assistance on dual-high power impulse magnetron sputtering

Straňák, V., Drache, S., Bogdanowicz, R., et al. (2011) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2011.11.043 · Cited by 43 · see citing works

(Cr,Al)N/(Cr,Al)ON Oxy-nitride Coatings deposited by Hybrid dcMS/HPPMS for Plastics Processing Applications

Bobzin, K., Brögelmann, T., Grundmeier, G., et al. (2016) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2016.07.093 · Cited by 43 · see citing works

Pre-, intermediate, and post-treatment of hard coatings to improve their performance for forming and cutting tools

Abusuilik, S. B. (2015) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2015.07.003 · Cited by 42 · see citing works

Aspects of plasma-enhanced magnetron-sputtered deposition of hard coatings on cutting tools

Wei, R., Vajo, J. J., Matossian, J. N., et al. (2002) · Surface and Coatings Technology · doi:10.1016/s0257-8972(02)00289-x · Cited by 42 · see citing works

Comparison of the steered arc and random arc techniques

Ertürk, E., Heuvel, H.-J., & Dederichs, H.-G. (1989) · Surface and Coatings Technology · doi:10.1016/s0257-8972(89)80007-6 · Cited by 42 · see citing works

Balanced magnetic field in magnetron sputtering systems

Golosov, D. A. (2017) · Vacuum · doi:10.1016/j.vacuum.2017.02.018 · Cited by 41 · see citing works

Influence of dcMS and HPPMS in a dcMS/HPPMS hybrid process on plasma and coating properties

Bobzin, K., Brögelmann, T., Kruppe, N. C., et al. (2016) · Thin Solid Films · doi:10.1016/j.tsf.2016.07.079 · Cited by 40 · see citing works

AlTiCrN coatings deposited by hybrid HIPIMS/DC magnetron co-sputtering

Zhou, H. D., Zheng, J., Gui, B., et al. (2016) · Vacuum · doi:10.1016/j.vacuum.2016.11.021 · Cited by 40 · see citing works

Influence of substrate material and its plasma pretreatment on adhesion and properties of WC/a-C:H nanocomposite coatings deposited at low temperature

Drábik, M., Truchlý, M., Ballo, V., et al. (2017) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2017.10.081 · Cited by 39 · see citing works

Improved adhesion and cutting performance of AlTiSiN coatings by tuning substrate bias voltage combined with Ar ion cleaning pre-treatment

Cai, F., Gao, Y., Fang, W. P., et al. (2018) · Ceramics International · doi:10.1016/j.ceramint.2018.07.125 · Cited by 39 · see citing works

High power pulsed magnetron sputtering: A method to increase deposition rate

Raman, P., Shchelkanov, I. A., McLain, J. T., et al. (2015) · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · doi:10.1116/1.4916108 · Cited by 37 · see citing works

Study on cathode spot motion and macroparticles reduction in axisymmetric magnetic field-enhanced vacuum arc deposition

Lang, W., Xiao, J., Gong, J., et al. (2010) · Vacuum · doi:10.1016/j.vacuum.2010.01.037 · Cited by 37 · see citing works

Additional control of bombardment by deep oscillation magnetron sputtering: Effect on the microstructure and topography of Cr thin films

Ferreira, F., Serra, R., Cavaleiro, A., et al. (2016) · Thin Solid Films · doi:10.1016/j.tsf.2016.10.054 · Cited by 37 · see citing works

Superimposed high power impulse and middle frequency magnetron sputtering: Role of pulse duration and average power of middle frequency

Diyatmika, W., Liang, F.-K., Lou, B., et al. (2017) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2017.11.057 · Cited by 37 · see citing works

Investigation of reactive HiPIMS+MF sputtering of TiO2 crystalline thin films

Olejnicek, J., Hubička, Z., Kment, Š., et al. (2013) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2013.05.038 · Cited by 36 · see citing works

Ti–Cu–N hard nanocomposite films prepared by pulse biased arc ion plating

Zhao, Y., Wang, X., Xiao, J., et al. (2011) · Applied Surface Science · doi:10.1016/j.apsusc.2011.09.038 · Cited by 36 · see citing works

Microstructure, mechanical properties and cutting performance of AlTiN coatings prepared via arc ion plating using the arc splitting technique

Xiao, B., Chen, Y., Dai, W., et al. (2016) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2016.12.074 · Cited by 36 · see citing works

High-rate deposition of thick (Cr,Al)ON coatings by high speed physical vapor deposition

Bobzin, K., Brögelmann, T., Kalscheuer, C., et al. (2017) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2017.05.034 · Cited by 36 · see citing works

Effect of substrate temperature on properties of diamond-like films deposited by combined DC impulse vacuum-arc method

Zavaleyev, V., Walkowicz, J., Greczyński, G., et al. (2013) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2013.10.023 · Cited by 35 · see citing works

Properties of nano-multilayered hard coatings deposited by a new hybrid coating process: Combined cathodic arc and unbalanced magnetron sputtering

Yamamoto, K., Kujime, S., & Takahara, K. (2005) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2005.02.175 · Cited by 33 · see citing works

The effect of substrate pretreatments and HPPMS-deposited adhesive interlayers’ materials on the cutting performance of coated cemented carbide inserts

Bouzakis, K. ‐., Skordaris, G., Gerardis, S., et al. (2010) · CIRP Annals · doi:10.1016/j.cirp.2010.03.065 · Cited by 33 · see citing works

Novel performances of in situ plasma nitriding-PVD duplex-treated nanocrystalline TiN coatings

Tan, C., Zhou, K., Kuang, T., et al. (2017) · Surface Engineering · doi:10.1080/02670844.2017.1370881 · Cited by 33 · see citing works

Study of macrodroplet and growth mechanisms with and without ion etchings on the properties of TiN coatings deposited on HSS using cathodic arc physical vapour deposition technique

Mubarak, A., HAMZAH, E. B., & Toff, M. R. M. (2007) · Materials Science and Engineering A · doi:10.1016/j.msea.2007.04.030 · Cited by 32 · see citing works

Influences of target poisoning on the mechanical properties of TiCrBN thin films grown by a superimposed high power impulse and medium-frequency magnetron sputtering

Lu, C., Diyatmika, W., Lou, B., et al. (2017) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2017.06.081 · Cited by 32 · see citing works

Synthesis and properties of crystalline TiO2 films deposited by a HIPIMS+ technique

Wang, Q., Kwon, S., Hui, K. N., et al. (2011) · Vacuum · doi:10.1016/j.vacuum.2011.11.020 · Cited by 31 · see citing works

Optimization of in situ substrate surface treatment in a cathodic arc plasma: A study by TEM and plasma diagnostics

Schönjahn, C., Ehiasarian, A. P., Lewis, D. B., et al. (2001) · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · doi:10.1116/1.1349726 · Cited by 31 · see citing works

The correlation between optical and mechanical properties of amorphous diamond-like carbon films prepared by pulsed filtered cathodic vacuum arc deposition

Konkhunthot, N., Tunmee, S., Zhou, X., et al. (2018) · Thin Solid Films · doi:10.1016/j.tsf.2018.03.053 · Cited by 31 · see citing works

High Deposition Rate Symmetric Magnet Pack for High Power Pulsed Magnetron Sputtering

Raman, P., Shchelkanov, I. A., McLain, J. T., et al. (2015) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2015.12.071 · Cited by 30 · see citing works

Design and performance of the microdroplet filtering system used in cathodic arc coating deposition

Miernik, K., Walkowicz, J., & Bujak, J. (2000) · Plasmas & Ions · doi:10.1016/s1288-3255(00)01021-2 · Cited by 29 · see citing works

Influence of the pulsing of the current of a vacuum arc on rate and droplets

Büschel, M., & Grimm, W. (2001) · Surface and Coatings Technology · doi:10.1016/s0257-8972(01)01254-3 · Cited by 29 · see citing works

Influence of Si contents on the microstructure, mechanical and tribological properties of Cr–Si–N coatings

Huang, L., Zou, C., Xie, W., et al. (2015) · Ceramics International · doi:10.1016/j.ceramint.2015.12.019 · Cited by 29 · see citing works

Microstructure and mechanical properties of the Cr–Mo–Si–N nanocomposite coatings prepared by a hybrid system of AIP and HiPIMS technologies

Ding, J. C., Zhang, T. F., Wang, Q. M., et al. (2018) · Journal of Alloys and Compounds · doi:10.1016/j.jallcom.2018.01.057 · Cited by 29 · see citing works

Deposition and characterization of hybrid filtered arc/magnetron multilayer nanocomposite cermet coatings for advanced tribological applications

Gorokowsky, V., Bowman, C., Gannon, P. E., VanVorous, D., Voevodin, A. A., Muratore, C., Kang, Y. S., & Hu, J. (2008) · Wear · doi:10.1016/j.wear.2008.01.003 · Cited by 27 · see citing works

Influence of AMF on the Expansion Speed of Cathode Spots in High-Current Triggered Vacuum Arc

Song, X., Shi, Z., Liu, C., et al. (2013) · IEEE Transactions on Plasma Science · doi:10.1109/tps.2013.2248759 · Cited by 27 · see citing works

Cathodic arc deposition of TiN and Zr(C, N) at low substrate temperature using a pulsed bias voltage

Fessmann, J., Olbrich, W., Kampschulte, G., et al. (1991) · Materials Science and Engineering A · doi:10.1016/0921-5093(91)90521-n · Cited by 26 · see citing works

Improving HiPIMS deposition rates by hybrid RF/HiPIMS co-sputtering, and its relevance for NbSi films

Holtzer, N., Antonin, O., Minea, T. M., et al. (2014) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2014.02.007 · Cited by 26 · see citing works

Tribological performance of hybrid filtered arc-magnetron coatings

Gorokhovsky, V. I., Bowman, C., Gannon, P. E., VanVorous, D., Voevodin, A. A., Rutkowski, A., Muratore, C., Smith, R. J., Kayani, A. N., Gelles, D. S., et al. (2006) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2006.09.007 · Cited by 26 · see citing works

Hybrid dcMS/HPPMS PVD nitride and oxynitride hard coatings for adhesion and abrasion reduction in plastics processing

Bobzin, K., Brögelmann, T., Kalscheuer, C., et al. (2016) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2016.07.103 · Cited by 26 · see citing works

Low-temperature in situ cleaning of silicon wafers with an ultra high vacuum compatible plasma source

Ramm, J., Beck, E. E., Züger, A., et al. (1992) · Thin Solid Films · doi:10.1016/0040-6090(92)90052-d · Cited by 25 · see citing works

Possibilities of influencing vacuum arc evaporation by time-dependent arc current

Ellrodt, M., & Mecke, H. (1995) · Surface and Coatings Technology · doi:10.1016/0257-8972(95)08345-6 · Cited by 25 · see citing works

Pulsed arc deposition of super-hard amorphous carbon films

Schulz, H., Scheibe, H. ‐., Siemroth, P., et al. (2004) · Applied Physics A · doi:10.1007/s00339-003-2280-8 · Cited by 25 · see citing works

Properties of super-hard carbon films deposited by pulsed arc process

Grimm, W., & Weihnacht, V. (2010) · Vacuum · doi:10.1016/j.vacuum.2010.01.022 · Cited by 24 · see citing works

Syntheses and mechanical properties of quaternary Cr-Mo-Si-N coatings by a hybrid coating system

Hong, S. G., Shin, D.-W., & Kim, K. H. (2007) · Materials Science and Engineering A · doi:10.1016/j.msea.2007.10.049 · Cited by 24 · see citing works

Linear magnetron HiPIMS high deposition rate magnet pack

McLain, J. T., Raman, P., Patel, D. K., et al. (2018) · Vacuum · doi:10.1016/j.vacuum.2018.06.023 · Cited by 24 · see citing works

Control of cathodic arc spot motion under external magnetic field

Li, L., Zhu, Y., He, F., et al. (2012) · Vacuum · doi:10.1016/j.vacuum.2012.10.008 · Cited by 23 · see citing works

Influence of plasma pretreatment on the performance of industrial tungsten carbide coatings deposited at low temperature on 100Cr6 bearing steel substrates

Drábik, M., Ballo, V., Truchlý, M., et al. (2016) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2016.01.035 · Cited by 23 · see citing works

Structure modification of magnetron-sputtered CrN coatings by intermediate plasma etching steps

Park, H.-S., Kappl, H., Lee, K. H., et al. (2000) · Surface and Coatings Technology · doi:10.1016/s0257-8972(00)00960-9 · Cited by 22 · see citing works

Target utilization of planar magnetron sputtering using a rotating tilted unbalanced yoke magnet

Iseki, T. (2009) · Vacuum · doi:10.1016/j.vacuum.2009.07.010 · Cited by 22 · see citing works

Plasma-enhanced, magnetron-sputtered deposition (PMD) of materials

Matossian, J. N., Wei, R., Vajo, J. J., et al. (1998) · Surface and Coatings Technology · doi:10.1016/s0257-8972(98)00632-x · Cited by 22 · see citing works

Vacuum arc deposition by using a Venetian blind particle filter

Zimmer, O. (2005) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2005.02.208 · Cited by 21 · see citing works

Adhesion failures on hard coatings induced by interface anomalies

Silva, C. W. M. E., Alves, E., Ramos, A. R., et al. (2009) · Vacuum · doi:10.1016/j.vacuum.2009.03.010 · Cited by 20 · see citing works

Imaging and motion of cathode group spots during pulse-enhanced vacuum arc evaporation

Ma, Y., Gong, C., Tian, X., et al. (2017) · Vacuum · doi:10.1016/j.vacuum.2017.02.008 · Cited by 20 · see citing works

Synthesis of titanium nitride thin films deposited by a new shielded arc ion plating

Zhao, Y., Lin, G., Xiao, J., et al. (2011) · Applied Surface Science · doi:10.1016/j.apsusc.2011.01.075 · Cited by 19 · see citing works

Completely flat erosion magnetron sputtering using a rotating asymmetrical yoke magnet

Iseki, T. (2010) · Vacuum · doi:10.1016/j.vacuum.2010.01.008 · Cited by 19 · see citing works

Microstructure and mechanical properties of Ti-Al-Cr-N films: Effect of current of additional anode

Kong, Y., Tian, X., Gong, C., et al. (2019) · Applied Surface Science · doi:10.1016/j.apsusc.2019.04.023 · Cited by 19 · see citing works

High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering

Jílek, M., Jílek, M., Martín, F. M., et al. (2014) · Thin Solid Films · doi:10.1016/j.tsf.2014.01.059 · Cited by 18 · see citing works

Growth and properties of amorphous Ti–B–Si–N thin films deposited by hybrid HIPIMS/DC-magnetron co-sputtering from TiB2 and Si targets

Fager, H., Greczyński, G., Jensen, J. A. D., et al. (2014) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2014.10.053 · Cited by 18 · see citing works

Synthesis of nano-structured HPPMS CrN/AlN coatings

Bagcivan, N., Bobzin, K., & Theiß, S. (2013) · Journal of Physics D Applied Physics · doi:10.1088/0022-3727/46/8/084001 · Cited by 16 · see citing works

Triboactive CrAlN+X hybrid dcMS/HPPMS PVD nitride hard coatings for friction and wear reduction on components

Bobzin, K., Brögelmann, T., & Kalscheuer, C. (2017) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2017.06.089 · Cited by 16 · see citing works

Physical mechanisms of macroparticles number density decreasing on a substrate immersed in vacuum arc plasma at negative high-frequency short-pulsed biasing

Ryabchikov, A. I., Sivin, D. O., & Bumagina, A. I. (2014) · Applied Surface Science · doi:10.1016/j.apsusc.2014.03.120 · Cited by 15 · see citing works

The Effect of Pulse DC and DC Substrate Bias during in situ Cleaning PVD Process on Surface Roughness

Hanizam, A.R, H. S., K.Anuar, A. R., et al. (2013) · Procedia Engineering · doi:10.1016/j.proeng.2013.02.072 · Cited by 13 · see citing works

Tribological performance of hybrid filtered arc-magnetron coatings. Part II: Tribological properties characterization

Gorokhovsky, V. I., Bowman, C., Gannon, P. E., et al. (2007) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2006.11.017 · Cited by 13 · see citing works

Characterization of advanced coating architectures deposited by an arc-HiPIMS hybrid process

Vetter, J., Kubota, K., Isaka, M., et al. (2018) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2018.05.075 · Cited by 13 · see citing works

Enhanced discharge and microstructure of the ta-C coatings by electromagnetically enhanced cathodic arc at argon atmosphere

Jian, H., Tian, X., Liu, H., et al. (2018) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2018.08.020 · Cited by 13 · see citing works

Influence of HPPMS on Hybrid dcMS/HPPMS (Cr,Al)N Processes

Bobzin, K., Brögelmann, T., Kruppe, N. C., et al. (2018) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2018.11.032 · Cited by 13 · see citing works

Substantial difference in target surface chemistry between reactive dc and high power impulse magnetron sputtering

Greczyński, G., Mráz, S., Schneider, J. M., et al. (2017) · Journal of Physics D Applied Physics · doi:10.1088/1361-6463/aaa0ee · Cited by 12 · see citing works

Correlation of HPPMS plasma and coating properties using artificial neural networks

Bobzin, K., Brögelmann, T., Kruppe, N. C., et al. (2018) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2018.06.065 · Cited by 12 · see citing works

Cathode Spots Dynamic in the Initial Expansion Stage of High-Current Triggered Vacuum Arc and the Influence of Axial Magnetic Field

Shi, Z., Song, X., Wang, C., et al. (2014) · IEEE Transactions on Plasma Science · doi:10.1109/tps.2014.2336804 · Cited by 11 · see citing works

Reprint of: Physical mechanisms of macroparticles number density decreasing on a substrate immersed in vacuum arc plasma at negative high-frequency short-pulsed biasing

Ryabchikov, A. I., Sivin, D. O., & Bumagina, A. I. (2014) · Applied Surface Science · doi:10.1016/j.apsusc.2014.05.101 · Cited by 11 · see citing works

Nanolayer CrNx/WNy coatings used on micro drills for machining of printed circuit boards

Yao, S. H., Su, Y., Kao, W. H., et al. (2009) · Journal of Materials Processing Technology · doi:10.1016/j.jmatprotec.2009.12.001 · Cited by 11 · see citing works

Advanced generation of rotatable magnetron technology for high performance reactive sputtering

Nadel, S. J., Greene, P., Rietzel, J., et al. (2005) · Thin Solid Films · doi:10.1016/j.tsf.2005.07.227 · Cited by 10 · see citing works

Application of the Taguchi approach of the design of experiments for determination constructional and working parameters of the linear Venetian blind microdroplet filter

Zavaleyev, V., & Walkowicz, J. (2011) · Vacuum · doi:10.1016/j.vacuum.2011.11.006 · Cited by 9 · see citing works

Deposition and characterization of Ti–Cx–Ny nanocomposite films by pulsed bias arc ion plating

Zhang, L., Ma, G., Lin, G., et al. (2014) · Vacuum · doi:10.1016/j.vacuum.2014.03.007 · Cited by 8 · see citing works

INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON CATHODE SPOTS MOVEMENT IN ARC ION PLATING

Lang, W., Xiao, J., Gong, J., et al. (2010) · Acta Metallurgica Sinica · doi:10.3724/sp.j.1037.2010.00372 · Cited by 8 · see citing works

Tangential cathode magnetic field and substrate bias influence on copper vacuum arc macroparticle content decreasing

Stepanov, I. B., Ryabchikov, A. I., Ananin, P. S., et al. (2016) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2016.04.003 · Cited by 8 · see citing works

Movement of luminous group spots on target and size modification of micro-particles during cathodic vacuum arc deposition

Xiao, Z., Chen, R., Zhang, D., et al. (2019) · Vacuum · doi:10.1016/j.vacuum.2019.03.048 · Cited by 8 · see citing works

Influence of Ar/Kr ratio and pulse parameters in a Cr-N high power pulse magnetron sputtering process on plasma and coating properties

Bobzin, K., Bagcivan, N., Theiß, S., et al. (2014) · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · doi:10.1116/1.4865917 · Cited by 7 · see citing works

Operational limit of a planar DC magnetron cluster source due to target erosion

Rai, A., Mutzke, A., Bandelow, G., et al. (2013) · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · doi:10.1016/j.nimb.2013.08.027 · Cited by 7 · see citing works

Cylindric high power impulse magnetron sputtering source and its discharge characteristics

Shu, X., Zhong-Zhen, W., Cui, S., et al. (2016) · Acta Physica Sinica · doi:10.7498/aps.65.185202 · Cited by 7 · see citing works

Magnetic field influence on ionization zones in high-power impulse Magnetron Sputtering

Raman, P., Cheng, M., Weberski, J. D., et al. (2018) · Vacuum · doi:10.1016/j.vacuum.2018.07.008 · Cited by 7 · see citing works

Electromagnetic control and optimization of high power impulse magnetron sputtering discharges in cylindrical source

Cui, S., Zhong-Zhen, W., Shu, X., et al. (2017) · Acta Physica Sinica · doi:10.7498/aps.66.095203 · Cited by 7 · see citing works

ADHESION STRENGTH OF TiN COATINGS AT VARIOUS ION ETCHING DEPOSITED ON TOOL STEELS USING CATHODIC ARC PVD TECHNIQUE

Ali, M., HAMZAH, E. B., & ALI, N. (2009) · Surface Review and Letters · doi:10.1142/s0218625x09012251 · Cited by 6 · see citing works

Enhanced discharge and surface properties of (Ti,AlCr)N coatings by cleaning cathodic-arc chamber

Kong, Y., Tian, X., Gong, C., et al. (2019) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2019.03.026 · Cited by 6 · see citing works

Joint influence of steered vacuum arc and negative repetitively pulsed bias on titanium macroparticles suppression

Ryabchikov, A. I., Ananin, P. S., Shevelev, A., et al. (2018) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2018.02.047 · Cited by 4 · see citing works

Study of Thin Film Coatings Deposited by Lateral Rotating Cathodes

Gopalakrishna, H. D., & Prasad, K. V. (2015) · International Journal of Engineering Research and · doi:10.17577/ijertv4is080518 · Cited by 3 · see citing works

Effects of pulsing parameters on production and distribution of macroparticles in cathodic vacuum arc deposition

Hu, Y., Li, L., Dai, H., et al. (2006) · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · doi:10.1116/1.2201046 · Cited by 3 · see citing works

Characteristics of amorphous carbon films prepared by hybrid RF (195kHz) plasma triggered by shunting arc discharge

Takaki, K., Yukimura, K., Suda, Y., et al. (2012) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2012.07.075 · Cited by 3 · see citing works

INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON CATHODE SPOTS MOVEMENT IN ARC ION PLATING

Wen-Chang, L. (2010) · Acta Metallurgica Sinica · doi:10.3724/sp.j.1037.2009.00556 · Cited by 3 · see citing works

Development and discharge behavior of high power density pulse magnetron sputtering system

Yang, S. (2010) · Vacuum · Cited by 2 · see citing works

An Inverted Magnetron Operating in HiPIMS Mode

Poolcharuansin, P., Chingsungnoen, A., Pasaja, N., et al. (2018) · Plasma · doi:10.3390/plasma1020024 · Cited by 2 · see citing works

Advancements and Challenges in Anti-Reflective Coatings: A Comprehensive Review

Song, J., Kumar, P., Raouf, I., & Kim, H. S. (2025) · Journal of Materials Research and Technology · doi:10.1016/j.jmrt.2025.09.268 · Cited by 12 · see citing works

Metal Oxide Thin Films for Advanced Photonic Applications

Stîngescu, M.-L., Șopronyi, M.-A., Antohe, Ș., & Scărișoreanu, N.-D. (2026) · Crystals · doi:10.3390/cryst16030164 · Cited by 2 · see citing works

High power impulse magnetron sputtering using a rotating cylindrical magnetron

Leroy, W., Mahieu, S., Depla, D., et al. (2009) · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · doi:10.1116/1.3271136 · Cited by 16 · see citing works

Six strategies to produce application tailored nanoscale multilayer structured PVD coatings by conventional and High Power Impulse Magnetron Sputtering (HIPIMS)

Hovsepian, P. E., & Ehiasarian, A. P. (2019) · Thin Solid Films · doi:10.1016/j.tsf.2019.137409 · Cited by 36 · see citing works

HIPIMS/UBM PVD Coating Equipment Designed to Coat Universal Sized Broaches

Münz, W., Klink, R., Aleksic, D., et al. (2022) · Coatings · doi:10.3390/coatings12030300 · Cited by 5 · see citing works

Design of hard coatings deposited by HiPIMS and dcMS

Ghailane, A., Makha, M., Larhlimi, H., et al. (2020) · Materials Letters · doi:10.1016/j.matlet.2020.128540 · Cited by 77 · see citing works

An Inverted Magnetron Operating in HiPIMS Mode

Poolcharuansin, P., Chingsungnoen, A., Pasaja, N., et al. (2018) · Plasma · doi:10.3390/plasma1020024 · Cited by 2 · see citing works