Measurement of thickness profile and refractive index variation of a silicon wafer using the optical comb of a femtosecond pulse laser
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Fourier transform profilometry for the automatic measurement of 3-D object shapes
Takeda, M., & Mutoh, K. (1983) · Applied Optics · doi:10.1364/ao.22.003977 · Cited by 1,861 · see citing works
Measurement of transparent plates with wavelength-tuned phase-shifting interferometry
de Groot, P. J. (2000) · Applied Optics · doi:10.1364/ao.39.002658 · Cited by 208 · see citing works
Fourier-transform phase-shifting interferometry
Deck, L. (2003) · Applied Optics · doi:10.1364/ao.42.002354 · Cited by 113 · see citing works
Thickness and refractive index measurement of a silicon wafer based on an optical comb
Jin, J., Kim, J. W., Kang, C.-S., et al. (2010) · Optics Express · doi:10.1364/oe.18.018339 · Cited by 101 · see citing works
Self-citationOkada, K., Sakuta, H., Ose, T., et al. (1990) · Applied Optics · doi:10.1364/ao.29.003280 · Cited by 79 · see citing works
Phase-retrieval techniques in fringe-projection profilometry
Quan, C., Chen, W., & Tay, C. J. (2009) · Optics and Lasers in Engineering · doi:10.1016/j.optlaseng.2009.06.013 · Cited by 79 · see citing works
Maeng, S., Park, J., O, B., & Jin, J. (2012) · Optics Express · doi:10.1364/oe.20.012184 · Cited by 58 · see citing works
Self-citationPark, J., Chen, L., Wang, Q., et al. (2012) · Optics Express · doi:10.1364/oe.20.020078 · Cited by 25 · see citing works
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Dual-comb spectroscopy for rapid characterization of complex optical properties of solids
Asahara, A., Nishiyama, A., Yoshida, S., Kondo, K.-I., Nakajima, Y., & Minoshima, K. (2016) · Optics Letters · doi:10.1364/ol.41.004971 · Cited by 86 · see citing works
Sumihara, K. A., Okubo, S., Okano, M., Inaba, H., & Watanabe, S. (2022) · Optics Express · doi:10.1364/oe.445134 · Cited by 13 · see citing works
- Authors
- Park, J., Jin, J., Wan Kim, J., & Kim, J.-A.
- Affiliations
- Korea Research Institute of Standards and Science (KR)
- Corresponding author
- Jin, Jonghan
- Venue
- Optics Communications
- Publisher
- Elsevier BV
- Published
- 2013-09
- Volume
- 305
- Pages
- 170-174
- ISSN
- 0030-4018 (ISSN-L)
- OpenAlex
- W2013955378
- Cited by
- 43
- References
- 8
- Citations by year
- 2026: 2 · 2024: 2 · 2023: 1 · 2022: 2 · 2021: 5 · 2020: 4 · 2019: 7 · 2018: 4 · 2017: 3 · 2016: 5 · 2015: 5 · 2014: 2 · 2013: 1
- FWCI
- 4.88
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Optics Communications (publishedVersion)
- Funders
- Korea Research Institute of Standards and Science (13011001)
- Topics
- Physical Sciences › Computer Science › Computer Vision and Pattern Recognition › Optical measurement and interference techniques
- Physical Sciences › Engineering › Mechanical Engineering › Advanced Measurement and Metrology Techniques
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Laser-Matter Interactions and Applications
- Keywords
- silicon wafers, refractive index change, spectral-domain interferometry, interferogram analysis, repeatability, measurement uncertainty
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