Sol-Gel Prepared Amorphous Ta2O5 Thin Film for Application in High LIDT Antireflection Coating and UV Photodetection

ATHENA , ARTEMIS , HEPHAESTUS : data analysis for X-ray absorption spectroscopy using IFEFFIT

Ravel, B., & Newville, M. G. (2005) · Journal of Synchrotron Radiation · doi:10.1107/s0909049505012719 · Cited by 16,981 · see citing works

IFEFFIT : interactive XAFS analysis and FEFF fitting

Newville, M. G. (2001) · Journal of Synchrotron Radiation · doi:10.1107/s0909049500016964 · Cited by 3,050 · see citing works

Multiple-scattering calculations of x-ray-absorption spectra

Zabinsky, S. I., Rehr, J. J., Ankudinov, A. L., Albers, R. C., & Eller, M. J. (1995) · Physical review. B, Condensed matter · doi:10.1103/physrevb.52.2995 · Cited by 2,951 · see citing works

Advanced LIGO: the next generation of gravitational wave detectors

Harry, G. M. (2010) · Classical and Quantum Gravity · doi:10.1088/0264-9381/27/8/084006 · Cited by 1,311 · see citing works

Hole-blocking titanium-oxide/silicon heterojunction and its application to photovoltaics

Avasthi, S., McClain, W. E., Man, G., et al. (2013) · Applied Physics Letters · doi:10.1063/1.4803446 · Cited by 221 · see citing works

Highly sensitive photodetector using porous silicon

Zheng, J., Jiao, K. L., Shen, W. P., et al. (1992) · Applied Physics Letters · doi:10.1063/1.107884 · Cited by 196 · see citing works

Preparation and properties of tantalum pentoxide (Ta2O5) thin films for ultra large scale integrated circuits (ULSIs) application – A review

Ezhilvalavan, S., & Tseng, T. (1999) · Journal of Materials Science Materials in Electronics · doi:10.1023/a:1008970922635 · Cited by 160 · see citing works

Aluminum Plasmonics Enriched Ultraviolet GaN Photodetector with Ultrahigh Responsivity, Detectivity, and Broad Bandwidth

Dubey, A., Mishra, R., Hsieh, Y., et al. (2020) · Advanced Science · doi:10.1002/advs.202002274 · Cited by 145 · see citing works

Photothermal common-path interferometry (PCI): new developments

Alexandrovski, A. L., Fejer, M. M., Markosian, A., et al. (2009) · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · doi:10.1117/12.814813 · Cited by 143 · see citing works

Stability and effect of annealing on the optical properties of plasma-deposited Ta2O5 and Nb2O5 films

Masse, J., Szymanowski, H., Zabeida, O., et al. (2006) · Thin Solid Films · doi:10.1016/j.tsf.2006.05.047 · Cited by 113 · see citing works

Rietveld analysis of X-ray diffraction pattern from β-Ta2O5 oxide

Aleshina, L. A., & Логинова, С. В. (2002) · Crystallography Reports · doi:10.1134/1.1481927 · Cited by 113 · see citing works

Sputtered Ta2O5 antireflection coatings for silicon solar cells

Rubio, F., Denis, J., Albella, J. M., et al. (1982) · Thin Solid Films · doi:10.1016/0040-6090(82)90545-4 · Cited by 105 · see citing works

XPS depth-profile of the suboxide distribution at the native oxide/Ta interface

Khanuja, M., Sharma, H., Mehta, B. R., et al. (2008) · Journal of Electron Spectroscopy and Related Phenomena · doi:10.1016/j.elspec.2008.10.004 · Cited by 103 · see citing works

Optical properties of sol–gel dip-coated Ta2O5 films for electrochromic applications

Tepehan, F. Z., Ghodsi, F. E., Özer, N., et al. (1999) · Solar Energy Materials and Solar Cells · doi:10.1016/s0927-0248(99)00041-0 · Cited by 82 · see citing works

Optical properties of Ta2O5 thin films deposited using the spin coating process

Ghodsi, F. E., Tepehan, F. Z., & Tepehan, G. G. (1997) · Thin Solid Films · doi:10.1016/s0040-6090(96)09509-0 · Cited by 67 · see citing works

Optical properties of amorphous Ta2O5 thin films deposited by RF magnetron sputtering

Chen, X., Bai, R., & Huang, M. (2019) · Optical Materials · doi:10.1016/j.optmat.2019.109404 · Cited by 61 · see citing works

Effects of annealing conditions on the properties of tantalum oxide films on silicon substrates

Park, S. W., Baek, Y. K., Lee, J. Y., et al. (1992) · Journal of Electronic Materials · doi:10.1007/bf02655432 · Cited by 60 · see citing works

Stabilization of Amide-Based Complexes of Niobium and Tantalum Using Malonates as Chelating Ligands: Precursor Chemistry and Thin Film Deposition

Hellwig, M., Milanov, A. P., Barreca, D., et al. (2007) · Chemistry of Materials · doi:10.1021/cm0630441 · Cited by 59 · see citing works

Annealing effects on microstructure and laser-induced damage threshold of HfO_2/SiO_2 multilayer mirrors

Jena, S., Tokas, R. B., Rao, K. D., Thakur, S., & Sahoo, N. K. (2016) · Applied Optics · doi:10.1364/ao.55.006108 · Cited by 57 · see citing works

Effect of oxygen deficiency on electronic properties and local structure of amorphous tantalum oxide thin films

Denny, Y. R., Firmansyah, T., Oh, S. K., Kang, H. J., Yang, D. Y., Heo, S., Chung, J., & Lee, J. C. (2016) · Materials Research Bulletin · doi:10.1016/j.materresbull.2016.03.004 · Cited by 56 · see citing works

Correlations between the mechanical loss and atomic structure of amorphous TiO2-doped Ta2O5 coatings

Bassiri, R., Evans, K., Borisenko, K. B., Fejer, M. M., Hough, J., MacLaren, I., Martin, I. W., Route, R. K., & Rowan, S. (2012) · Acta Materialia · doi:10.1016/j.actamat.2012.10.009 · Cited by 54 · see citing works

Optical properties of reactively sputtered Ta2O5 films

Rubio, F., Albella, J. M., Denis, J., et al. (1982) · Journal of Vacuum Science and Technology · doi:10.1116/1.571862 · Cited by 54 · see citing works

Antireflecting coating from Ta2O5 and SiO2 multilayer films

Koç, K., Tepehan, F. Z., & Tepehan, G. G. (2005) · Journal of Materials Science · doi:10.1007/s10853-005-0566-2 · Cited by 54 · see citing works

Ionic conductivity of tantalum oxide by rf sputtering

DUGGAN, M., Saito, T., & NIWA, T. (1993) · Solid State Ionics · doi:10.1016/0167-2738(93)90247-z · Cited by 51 · see citing works

Ellipsometric Examination of Growth and Dissolution Rates of Ta2 O 5 Films Formed by Metalorganic Chemical Vapor Deposition

An, C. H., & Sugimoto, K. (1992) · Journal of The Electrochemical Society · doi:10.1149/1.2069529 · Cited by 50 · see citing works

Ion-beam and dual-ion-beam sputter deposition of tantalum oxide films

Čevro, M., & Carter, G. (1995) · Optical Engineering · doi:10.1117/12.188616 · Cited by 45 · see citing works

Annealing effects on the optical and electrochemical properties of tantalum pentoxide films

Ren, W., Yang, G.-D., Feng, A., et al. (2021) · Journal of Advanced Ceramics · doi:10.1007/s40145-021-0465-2 · Cited by 45 · see citing works

Increased Laser-Damage Resistance of Sol–Gel Silica Coating by Structure Modification

Li, X., Gross, M. E., Oreb, B. F., et al. (2012) · The Journal of Physical Chemistry C · doi:10.1021/jp307390u · Cited by 44 · see citing works

High temperature annealing effect on structure, optical property and laser-induced damage threshold of Ta2O5 films

Xu, C., Xiao, Q., Ma, J., et al. (2008) · Applied Surface Science · doi:10.1016/j.apsusc.2008.04.034 · Cited by 42 · see citing works

Preparation and optical properties of Ta2O5−x thin films

Pai, Y., Chou, C., & Shieu, F. (2007) · Materials Chemistry and Physics · doi:10.1016/j.matchemphys.2007.08.032 · Cited by 42 · see citing works

Si compatible MoO3/MoS2 core-shell quantum dots for wavelength tunable photodetection in wide visible range

Pal, S., Mukherjee, S., Nand, M., et al. (2019) · Applied Surface Science · doi:10.1016/j.apsusc.2019.144196 · Cited by 38 · see citing works

WS2 Nanosheet/Si p–n Heterojunction Diodes for UV–Visible Broadband Photodetection

Pal, S., Mukherjee, S., Jangir, R., et al. (2021) · ACS Applied Nano Materials · doi:10.1021/acsanm.1c00421 · Cited by 38 · see citing works

Sol-gel silicon dioxide films

Vorotilov, K. A., Orlova, E., & Petrovsky, V. (1992) · Thin Solid Films · doi:10.1016/0040-6090(92)90674-z · Cited by 37 · see citing works

E-beam deposition characteristics of reactively evaporated Ta2O5 for optical interference coatings

Herrmann, W. C. (1981) · Journal of Vacuum Science and Technology · doi:10.1116/1.570921 · Cited by 36 · see citing works

An Investigation of Structures of Thermal and Anodic Tantalum Oxide Films

Maeng, S., Axe, L., Tyson, T. A., et al. (2005) · Journal of The Electrochemical Society · doi:10.1149/1.1850362 · Cited by 35 · see citing works

Ta–O phonon peaks in tantalum oxide films on Si

Ono, H., Hosokawa, Y., Shinoda, K., et al. (2001) · Thin Solid Films · doi:10.1016/s0040-6090(00)01550-9 · Cited by 35 · see citing works

Effects of deposition parameters on optical loss for rf-sputtered Ta2O5 and Si3N4 waveguides

Paulson, W. M., HICKERNELL, F. S., & Davis, R. L. (1979) · Journal of Vacuum Science and Technology · doi:10.1116/1.569933 · Cited by 34 · see citing works

Annealing effect on the optical properties and laser-induced damage resistance of solgel-derived ZrO_2 films

Liang, L., Xü, Y., Zhang, L., et al. (2007) · Journal of the Optical Society of America B · doi:10.1364/josab.24.001066 · Cited by 31 · see citing works

Electrochemical Properties of a Novel β-Ta2O5 Nanoceramic Coating Exposed to Simulated Body Solutions

Xu, J., Hu, W. P., Xu, S., et al. (2015) · ACS Biomaterials Science & Engineering · doi:10.1021/acsbiomaterials.5b00384 · Cited by 31 · see citing works

Order within disorder: The atomic structure of ion-beam sputtered amorphous tantala (a-Ta2O5)

Bassiri, R., Liou, F., Abernathy, M. R., Lin, A. C., Kim, N., Mehta, A., Shyam, B., Byer, R. L., Gustafson, E. K., Hart, M. J., et al. (2015) · APL Materials · doi:10.1063/1.4913586 · Cited by 30 · see citing works

Synthesis, characterization and photo catalytic studies of the composites by tantalum oxide and zinc oxide nanorods

Chennakesavulu, K., Reddy, M. M., Reddy, G. R., et al. (2015) · Journal of Molecular Structure · doi:10.1016/j.molstruc.2015.02.052 · Cited by 29 · see citing works

On the crystallization of Ta 2 O 5 nanotubes: structural and local atomic properties investigated by EXAFS and XRD

Gonçalves, R. V., Migowski, P., Wender, H., Feil, A. F., Zapata, M. J. M., Khan, S., Bernardi, F., Azevedo, G. D. M., & Teixeira, S. R. (2013) · CrystEngComm · doi:10.1039/c3ce42043d · Cited by 29 · see citing works

Synthesis and characterization of carbon microtube/tantalum oxide composites and their photocatalytic activity under visible irradiation

Chennakesavulu, K., & Reddy, G. R. (2015) · RSC Advances · doi:10.1039/c5ra06812f · Cited by 28 · see citing works

Determination of optical properties of amorphous Ta2O5 films deposited by spin- and dip-coating methods

Tepehan, F. Z., Ghodsi, F. E., Özer, N., et al. (1997) · Solar Energy Materials and Solar Cells · doi:10.1016/s0927-0248(97)80004-9 · Cited by 28 · see citing works

Nanotubular Ta2O5 as ultraviolet (UV) photodetector

Talip, M. A. A., Khairir, N. S., Kadir, R. A., et al. (2019) · Journal of Materials Science Materials in Electronics · doi:10.1007/s10854-019-00792-5 · Cited by 28 · see citing works

Effect of polyvinyl butyral on the microstructure and laser damage threshold of antireflective silica films

Chi, F., Yan, L., Lv, H., et al. (2010) · Thin Solid Films · doi:10.1016/j.tsf.2010.11.023 · Cited by 25 · see citing works

Sol−Gel Synthesis of Thick Ta2O5 Films

Ndiege, N., Wilhoite, T., Subramanian, V. R., et al. (2007) · Chemistry of Materials · doi:10.1021/cm062231w · Cited by 25 · see citing works

Effects of deposition parameters on laser-induced damage threshold of Ta2O5 films

Xu, C., Qiang, Y., Zhu, Y., et al. (2009) · Optics & Laser Technology · doi:10.1016/j.optlastec.2009.09.004 · Cited by 22 · see citing works

Heat treatment effects on the optical properties of Sol–gel Ta2O5 thin films

Ghodsi, F. E., & Tepehan, F. Z. (1999) · Solar Energy Materials and Solar Cells · doi:10.1016/s0927-0248(99)00056-2 · Cited by 20 · see citing works

Gas pressures influence on the optical and mechanical properties of Ta 2 O 5 films produced by reactive low voltage ion plating (RLVIP)

Strauss, G. N., Lechner, W., & Pulker, H. K. (1999) · Thin Solid Films · doi:10.1016/s0040-6090(99)00153-4 · Cited by 19 · see citing works

Graphene-Ta 2 O 5 heterostructure enabled high performance, deep-ultraviolet to mid-infrared photodetection

Ho, V. X., Wang, Y., Cooney, M. P., et al. (2021) · Nanoscale · doi:10.1039/d1nr01572a · Cited by 19 · see citing works

The reactive sputtering of tantalum oxide: Compositional uniformity, phases, and transport mechanisms

Reith, T. M., & Ficalora, P. J. (1983) · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · doi:10.1116/1.572023 · Cited by 18 · see citing works

Characterization of Tantalum Oxide Sol–Gel-coated AZ91 Mg Alloys

Gül, C., Albayrak, S., & Çinici, H. (2020) · Transactions of the Indian Institute of Metals · doi:10.1007/s12666-020-01976-y · Cited by 18 · see citing works

Ta$_{2}$O$_{5}$ Solar-Blind Photodetectors

Chiu, C. J., Weng, W. Y., Hsueh, T., et al. (2011) · IEEE Sensors Journal · doi:10.1109/jsen.2011.2122332 · Cited by 16 · see citing works

Heat treatment induced structural and optical properties of rf magnetron sputtered tantalum oxide films

Chandra, S. V. J., Rao, G. M., & Uthanna, S. (2007) · Crystal Research and Technology · doi:10.1002/crat.200610815 · Cited by 16 · see citing works

Characterization Of Reactively Rf-Sputtered Tantalum Oxide Waveguides

Tu, Y.-R., Lin, C.-C., Wang, W., et al. (1987) · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · doi:10.1117/12.967507 · Cited by 13 · see citing works

Synthesis and Characterization of Ta2O5–SiO2 Mixed Oxides

Guiu, G., & Grange, P. (1994) · Bulletin of the Chemical Society of Japan · doi:10.1246/bcsj.67.2716 · Cited by 13 · see citing works

A model for lock-in growth in ring laser gyroscopes

Andrews, D. J., Roden, S. G., & King, T. A. (1995) · IEEE Journal of Quantum Electronics · doi:10.1109/3.406387 · Cited by 12 · see citing works

Laser-induced damage of Ta2O5 films obtained from TaCl5 precursor and annealed at different temperatures

Xu, C., Li, D., Fan, H., et al. (2015) · Applied Surface Science · doi:10.1016/j.apsusc.2015.03.121 · Cited by 10 · see citing works

Improvement in Corrosion Resistance of Tantalum Oxide and Tantalum Oxide with Diethanolamine Sol–Gel Coated Magnesium Alloys

Gül, C., Albayrak, S., Çinici, H., et al. (2022) · Protection of Metals and Physical Chemistry of Surfaces · doi:10.1134/s2070205122030108 · Cited by 9 · see citing works

In-situ high temperature laser-induced damage of sol-gel Ta2O5 films with different dual additives

Zhang, P., Lin, D., Zhu, Y., et al. (2019) · Thin Solid Films · doi:10.1016/j.tsf.2019.137723 · Cited by 8 · see citing works

X-ray absorption spectroscopy of doped and undoped multilayer (SiO2/Ta2O5) coatings on fused silica (SiO2) substrates

Doomes, E. E., & McGuire, S. C. (2007) · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · doi:10.1016/j.nima.2007.08.119 · Cited by 4 · see citing works

Atomic layer deposited tantalum silicate on crystallographically-oriented epitaxial germanium: interface chemistry and band alignment

Clavel, M., Bhattacharya, S., & Hudait, M. K. (2022) · Materials Advances · doi:10.1039/d2ma00208f · Cited by 4 · see citing works

Advancements and Challenges in Anti-Reflective Coatings: A Comprehensive Review

Song, J., Kumar, P., Raouf, I., & Kim, H. S. (2025) · Journal of Materials Research and Technology · doi:10.1016/j.jmrt.2025.09.268 · Cited by 12 · see citing works

Sol-Gel Dip Coating of Ta2O5/SiO2 Anti-Reflection Films on Fused Silica for Developing Laser Optics with High Laser Induced Damage Threshold

Pal, S., Kamparath, R., Subrahmanyam, V. V. V., Sharma, N., Biswas, A. K., Singh, R., Tiwari, S., Kumar, Y. P., & Benerji, N. S. (2025) · Journal of Sol-Gel Science and Technology · doi:10.1007/s10971-025-06761-1 · Cited by 12 · see citing works

Metal Oxide Thin Films for Advanced Photonic Applications

Stîngescu, M.-L., Șopronyi, M.-A., Antohe, Ș., & Scărișoreanu, N.-D. (2026) · Crystals · doi:10.3390/cryst16030164 · Cited by 2 · see citing works

Thickness-Dependently Enhanced Photodetection Performance of Vertically Grown SnS2 Nanoflakes with Large Size and High Production

Jia, X.-S., Tang, C., Pan, R., et al. (2018) · ACS Applied Materials & Interfaces · doi:10.1021/acsami.8b03194 · Cited by 88 · see citing works

Enhanced Responsivity of Photodetectors Realized via Impact Ionization

Yu, J., Shan, C. X., Qiao, Q., et al. (2012) · Sensors · doi:10.3390/s120201280 · Cited by 26 · see citing works

Enhanced photodetection performance of Schottky Pt/SnS 2 /Al and Au/SnS 2 /Al photodetectors

An, X., Fan, C., Meng, X., et al. (2021) · Journal of Materials Chemistry C · doi:10.1039/d1tc01715b · Cited by 19 · see citing works

Self‐Powered Photodetectors Based on 2D Materials

Qiao, H., Huang, Z., Ren, X., Liu, S., Zhang, Y., Qi, X., & Zhang, H. (2019) · Advanced Optical Materials · doi:10.1002/adom.201900765 · Cited by 435 · see citing works

Engineering plasmonic hot carrier dynamics toward efficient photodetection

Zhu, Y., Xu, H., Yu, P., & Wang, Z. M. (2021) · Applied Physics Reviews · doi:10.1063/5.0029050 · Cited by 92 · see citing works