Polygon Scanner System for Ultra Short Pulsed Laser Micro-Machining Applications
Open accessAbstract
Ultra short pulsed lasers have gained acceptance in micro-machining applications and many processes have been developed in the lab. Transferring the technology to the manufacturing floor started few years ago as soon as relatively high average power (> 5W) lasers became available. Now that high repetition rates and average powers of 50 Watt and more are reaching the market, the commercially available galvo based laser scanners systems limit the efficient use of this expensive laser power. We present a novel polygon based scanner system incorporating laser and scanner synchronization enabling writing speeds of 50 m/sec and higher.
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The fastest reachable speed of a galvanometer scanner is less than 200 rad/s.
“The fastest reachable speed of a galvanometer scanner is less than 200 rad s À1 .150,151”
From Green nanoparticle synthesis at scale: a perspective on overcoming the limits of pulsed laser ablation in liquids for high-throughput production (2023) · cites this paper as [150]
Polygon scanning technology offers a beam deflection speed of up to approximately 1000 m/s.
“This polygon scanning technology offers a beam deflection speed of up to B1000 m s À1 .150,153”
From Green nanoparticle synthesis at scale: a perspective on overcoming the limits of pulsed laser ablation in liquids for high-throughput production (2023) · cites this paper as [150]
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Sorted by citations
Streubel, R., Barcikowski, S., & Gökce, B. (2016) · Optics Letters · doi:10.1364/ol.41.001486 · Cited by 283 · see citing works
Surface Structuring with Ultra-short Laser Pulses: Basics, Limitations and Needs for High Throughput
Neuenschwander, B., Jaeggi, B., Schmid, M., & Hennig, G. (2014) · Physics Procedia · doi:10.1016/j.phpro.2014.08.017 · Cited by 194 · see citing works
Khairani, I. Y., Mínguez-Vega, G., Doñate-Buendía, C., & Gökce, B. (2023) · Physical Chemistry Chemical Physics · doi:10.1039/d3cp01214j · Cited by 130 · see citing works
- Authors
- De Loor, R.
- Venue
- Physics Procedia
- Publisher
- Elsevier BV
- Published
- 2013
- Volume
- 41
- Pages
- 544-551
- ISSN
- 1875-3892 (ISSN-L)
- OpenAlex
- W1972868416
- Cited by
- 77
- References
- 0
- Citations by year
- 2026: 1 · 2025: 5 · 2024: 5 · 2023: 11 · 2022: 4 · 2021: 8 · 2020: 9 · 2019: 7 · 2018: 4 · 2017: 4 · 2016: 10 · 2015: 2 · 2014: 6 · 2013: 1
- FWCI
- 6.28
- Type
- journal article
- Language
- en
- Open access
- diamond
- doi.org
- Licence
- Locations
- Physics Procedia (publishedVersion, cc-by-nc-nd)
- Topics
- Physical Sciences › Engineering › Computational Mechanics › Laser Material Processing Techniques
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced Machining and Optimization Techniques
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Optical Systems and Laser Technology
- Keywords
- polygon scanner, ultrafast lasers, laser micromachining, high repetition rate lasers, high average power lasers
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