The DOI matches its Crossref record; 40 of the 40 references it cites were found in a registry or an index.
Tantalum pentoxide (Ta2O5) thin films for advanced dielectric applications
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Citations
Cites
The Physics of Semiconductor Devices: Proceedings of IWPSD 2021
(2024) · Springer Proceedings in Physics · doi:10.1007/978-981-97-1571-8 · Cited by 4,032
Physics of Semiconductor Devices
Pridham, G. J. (1970) · Electronics and Power · doi:10.1049/ep.1970.0039 · Cited by 3,952
MOS /metal oxide semiconductor/ physics and technology
Nicollian, E. H., & Brews, J. R. (1982) · CERN Document Server (European Organization for Nuclear Research) · Cited by 2,098
MOS (Metal Oxide Semiconductor) Physics and Technology
Cave, K. J. S. (1983) · IEE Proceedings I Solid State and Electron Devices · doi:10.1049/ip-i-1.1983.0010 · Cited by 1,750
The Poole-Frenkel Effect with Compensation Present
Yeargan, J. R., & Taylor, H. L. (1968) · Journal of Applied Physics · doi:10.1063/1.1656022 · Cited by 441
Enhancement of the dielectric constant of Ta2O5through substitution with TiO2
Cava, R. F., Peck, W. F., & Krajewski, J. J. (1995) · Nature · doi:10.1038/377215a0 · Cited by 213
AES and XPS study of thin RF-sputtered Ta2O5 layers
Atanassova, E., Dimitrova, T., & Koprinarova, J. (1995) · Applied Surface Science · doi:10.1016/0169-4332(94)00538-9 · Cited by 201
Demiryont, H., Sites, J. R., & Geib, K. (1985) · Applied Optics · doi:10.1364/ao.24.000490 · Cited by 169
Silicon nitride and oxynitride films
Habraken, F. H. P. M., & Kuiper, A. E. T. (1994) · Materials Science and Engineering R Reports · doi:10.1016/0927-796x(94)90006-x · Cited by 164
Optical properties and environmental stability of oxide coatings deposited by reactive sputtering
Edlou, S. M., Smajkiewicz, A., & Al-Jumaily, G. A. (1993) · Applied Optics · doi:10.1364/ao.32.005601 · Cited by 124
Cited by
Tantalum-based semiconductors for solar water splitting
Zhang, P., Zhang, J., & Gong, J. (2014) · Chem. Soc. Rev. · doi:10.1039/c3cs60438a · Cited by 494
Ultra-low-loss Ta_2O_5-core/SiO_2-clad planar waveguides on Si substrates
Belt, M., Davenport, M. L., Bowers, J. E., & Blumenthal, D. J. (2017) · Optica · doi:10.1364/optica.4.000532 · Cited by 130
Machine learning powered ellipsometry
Liu, J., Zhang, D., Yu, D., Ren, M., & Xu, J. (2021) · Light: Science & Applications · doi:10.1038/s41377-021-00482-0 · Cited by 102
Chang, J. P., Lin, Y.-S., & Chu, K. (2001) · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena · doi:10.1116/1.1396639 · Cited by 102
Tantalum pentoxide nanophotonic circuits for integrated quantum technology
Splitthoff, L., Wolff, M. A., Grottke, T., & Schuck, C. (2020) · Optics Express · doi:10.1364/oe.388080 · Cited by 44
Metadata
- Authors
- Chaneliere, C., Autran, J. L., Devine, R. A. B., & Balland, B.
- Venue
- Materials Science and Engineering: R: Reports
- Publisher
- Elsevier BV
- Published
- 1998-05
- Volume
- 22
- Issue
- 6
- Pages
- 269-322
- ISSN
- 0927-796X (ISSN-L)
- OpenAlex
- W2038274823
- Cited by
- 678
- References
- 40
- FWCI
- 31.12
- Type
- journal article
- Language
- en
- Open access
- closed
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Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
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How to cite
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- This page
- CoChat. (2026). Citation check: Tantalum pentoxide (Ta2O5) thin films for advanced dielectric applications. https://app.cochat.ai/papers/10.1016/s0927-796x(97)00023-5
- The paper
- Chaneliere, C., Autran, J. L., Devine, R. A. B., & Balland, B. (1998). Tantalum pentoxide (Ta2O5) thin films for advanced dielectric applications. Materials Science and Engineering: R: Reports. https://doi.org/10.1016/s0927-796x(97)00023-5
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
