Suppression of Transverse Modes in 50°YX-LiTaO3/SiO2/Si POI SAW Resonator with Groove Configuration
Abstract
With the rapid development of mobile communication technology, the POI (piezoelectric on insulator) structure has gained recognition in the field of RF filtering. However, transverse modes remain in the passband of corresponding surface acoustic wave (SAW) devices, which impedes their application in crowded spectra. This article introduces a groove configuration to suppress transverse modes for POI SAW resonators employing a 50°YX-LiTaO 3 /SiO 2 /Si multilayered structure. First, the response of conventional POI SAW resonators was calculated by the 3D periodic FEM method, and the results indicate that transverse modes caused by energy leakage to busbar regions are serious in POI SAW resonators. Then, the groove configuration was adopted to confine energy within the aperture region by reducing the velocity at the end of IDT electrodes, and the groove dimension was optimized to achieve a nearly spurious-free response in the passband. Finally, experimental results of fabricated one-port SAW resonators with optimal groove configuration were provided to validate the suppression of transverse modes and the enhancement of the Q factor in the POI SAW resonator.
Integrity signals
Registry
Cites
Statistics
Claims the paper makes
Claims other papers make about this one
Each is checked against this paper’s own text: does it say what the citing paper says it does?
LiTaO3 has already entered mass production due to its use in 5G radio frequency filters.
“Compared to the economic limitations caused by the lack of a large consumption market for LN in insulator structures (LNOI), LT has already entered mass production due to its use in 5G radio frequency filters [182,183].”
From Metal Oxide Thin Films for Advanced Photonic Applications (2026) · cites this paper as [183]
Cites
After 60 years: A new formula for computing quality factor is warranted
Feld, D. A., Parker, R., Ruby, R. C., et al. (2008) · Proceedings/Proceedings - IEEE Ultrasonics Symposium · doi:10.1109/ultsym.2008.0105 · Cited by 300 · see citing works
High-Performance SAW Resonator on New Multilayered Substrate Using LiTaO 3 Crystal
Takai, T., Iwamoto, H., Takamine, Y., et al. (2017) · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · doi:10.1109/tuffc.2017.2738119 · Cited by 279 · see citing works
From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications
Hagelauer, A., Ruby, R., Inoue, S., et al. (2022) · IEEE Journal of Microwaves · doi:10.1109/jmw.2022.3226415 · Cited by 225 · see citing works
The 5G Effect on RF Filter Technologies
Mahon, S. (2017) · IEEE Transactions on Semiconductor Manufacturing · doi:10.1109/tsm.2017.2757879 · Cited by 194 · see citing works
Comparative Study of Acoustic Wave Devices Using Thin Piezoelectric Plates in the 3–5-GHz Range
Kimura, T., Omura, M., Kishimoto, Y., et al. (2019) · IEEE Transactions on Microwave Theory and Techniques · doi:10.1109/tmtt.2018.2890661 · Cited by 174 · see citing works
Spurious resonance free bulk acoustic wave resonators
Kaitila, J., Ylilammi, M., Ella, J., et al. (2004) · IEEE Symposium on Ultrasonics · doi:10.1109/ultsym.2003.1293361 · Cited by 135 · see citing works
2021 IEEE International Ultrasonics Symposium (IUS)
Jiménez, N., Ealo, J. L., Muelas-Hurtado, R. D., Duclos, A., & Romero‐García, V. (2021) · doi:10.1109/ius52206.2021 · Cited by 130 · see citing works
RF Harmonic Distortion of CPW Lines on HR-Si and Trap-Rich HR-Si Substrates
Neve, C. R., & Raskin, J.-P. (2012) · IEEE Transactions on Electron Devices · doi:10.1109/ted.2012.2183598 · Cited by 127 · see citing works
Warder, P., & Link, A. (2015) · IEEE Microwave Magazine · doi:10.1109/mmm.2015.2431236 · Cited by 111 · see citing works
2017 IEEE International Ultrasonics Symposium (IUS)
(2017) · doi:10.1109/ius36762.2017 · Cited by 107 · see citing works
Bauer, T., Eggs, C., Wagner, K. G., et al. (2015) · IEEE Microwave Magazine · doi:10.1109/mmm.2015.2429512 · Cited by 91 · see citing works
Ultra-Wideband Surface Acoustic Wave Devices Using Cu-Grating/Rotated-YX-LiNbO3-Substrate Structure
Hashimoto, K., Asano, H., Omori, T., et al. (2004) · Japanese Journal of Applied Physics · doi:10.1143/jjap.43.3063 · Cited by 91 · see citing works
SAW Filters on LiNbO 3 /SiC Heterostructure for 5G n77 and n78 Band Applications
Xu, H., Fu, S., Su, R., et al. (2023) · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · doi:10.1109/tuffc.2023.3299635 · Cited by 78 · see citing works
Omori, T., Matsuda, K., Yokoyama, N., et al. (2007) · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · doi:10.1109/tuffc.2007.487 · Cited by 74 · see citing works
Advanced Surface Acoustic Wave Resonators on LiTaO₃/SiO₂/Sapphire Substrate
Wu, J., Zhang, S., Chen, Y., et al. (2022) · IEEE Electron Device Letters · doi:10.1109/led.2022.3200418 · Cited by 53 · see citing works
Self-citationNakamura, H., Nakanishi, H., Goto, R., et al. (2011) · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · doi:10.1109/tuffc.2011.2068 · Cited by 50 · see citing works
RF MEMS Passives on High-Resistivity Silicon Substrates
Shim, Y., Raskin, J., Neve, C. R., et al. (2013) · IEEE Microwave and Wireless Components Letters · doi:10.1109/lmwc.2013.2283857 · Cited by 48 · see citing works
A review of the timing and filtering technologies in smartphones
Lam, C. S. (2016) · Proceedings of the IEEE International Frequency Control Symposium · doi:10.1109/fcs.2016.7546724 · Cited by 48 · see citing works
SAW Characteristics of AlN/SiO 2 /3C-SiC Layered Structure With Embedded Electrodes
Zhang, Q., Han, T., Tang, G., et al. (2016) · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · doi:10.1109/tuffc.2016.2574801 · Cited by 45 · see citing works
High-performance SH-SAW resonator using optimized 30° YX-LiNbO3/SiO2/Si
Wu, S., Wu, Z., Qian, H., et al. (2022) · Applied Physics Letters · doi:10.1063/5.0091352 · Cited by 42 · see citing works
A method to reduce losses in buried electrodes RF SAW resonators
Solal, M., Gratier, J., Aigner, R., et al. (2011) · IEEE International Ultrasonics Symposium · doi:10.1109/ultsym.2011.0078 · Cited by 34 · see citing works
Su, R., Fu, S., Lu, Z., et al. (2022) · Applied Physics Letters · doi:10.1063/5.0092767 · Cited by 34 · see citing works
Miniature LiNbO 3 /SiO 2 /Si SH-SAW Resonators With Near-Spurious-Free Response
Hsu, T.-H., Tsai, C.-H., Tung, S.-S., et al. (2023) · IEEE Electron Device Letters · doi:10.1109/led.2023.3281836 · Cited by 27 · see citing works
Reduction of transverse leakage for SAW resonators on LiTaO3 substrate
Nakamura, H., Komatsu, T., Nakanishi, H., et al. (2012) · IEEE International Ultrasonics Symposium · doi:10.1109/ultsym.2012.0311 · Cited by 13 · see citing works
Unwanted transverse modes in SAW resonators caused by stitching errors and stripe nonlinearities
Dufilie, P. A., Zeitler, R., Jacobs, J., et al. (2013) · doi:10.1109/eftf-ifc.2013.6702270 · Cited by 9 · see citing works
Tu, C., Zhang, T.-Y., Zhang, Z. D., et al. (2024) · Journal of Micromechanics and Microengineering · doi:10.1088/1361-6439/ad2f49 · Cited by 7 · see citing works
Flagged first, then by citations
Cited by
Sorted by citations
Metal Oxide Thin Films for Advanced Photonic Applications
Stîngescu, M.-L., Șopronyi, M.-A., Antohe, Ș., & Scărișoreanu, N.-D. (2026) · Crystals · doi:10.3390/cryst16030164 · Cited by 2 · see citing works
- Authors
- Li, M., Qi, M., Chen, Y., Cheng, Y., Cao, L., & Mu, X.
- Affiliations
- Chongqing University (CN)
- Corresponding author
- Mu, Xiaojing
- Venue
- ACS Applied Materials & Interfaces
- Publisher
- American Chemical Society (ACS)
- Published
- 2024-08-22
- Volume
- 16
- Issue
- 35
- Pages
- 46872-46878
- ISSN
- 1944-8244 (ISSN-L)
- 1944-8252
- OpenAlex
- W4401793251
- Cited by
- 6
- References
- 26
- Citations by year
- 2026: 2 · 2025: 3 · 2024: 1
- FWCI
- 0.66
- Type
- journal article
- Language
- en
- Open access
- closed
- Licence
- Locations
- ACS Applied Materials & Interfaces (publishedVersion)
- PubMed (publishedVersion)
- Funders
- Science Fund for Distinguished Young Scholars of Chongqing Municipality (CSTB2022 NSCQJQX0006)
- National Natural Science Foundation of China (52075061)
- Topics
- Physical Sciences › Engineering › Biomedical Engineering › Acoustic Wave Resonator Technologies
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Microwave Engineering and Waveguides
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Microwave Dielectric Ceramics Synthesis
- Keywords
- transverse mode suppression, surface acoustic wave resonators, RF filters, energy leakage, Q-factor improvement
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
