Enhancing Titania-Tantala Amorphous Materials as High-Index Layers in Bragg Reflectors of Gravitational-Wave Detectors
Open accessAbstract
High Resolution Image Download MS PowerPoint Slide Amorphous mixed titania-tantala coatings are key components of Bragg reflectors in gravitational-wave detectors (GWDs). Attaining the lowest possible values of optical absorption and mechanical losses in coatings is of paramount importance for GWDs, and this requires a complex optimization of the coating deposition and postdeposition annealing. We present here a systematic investigation of the optical properties and internal friction of amorphous mixed titania-tantala coatings grown by ion beam sputtering. We consider coatings with six different cation mixing ratios─defined as Ti/(Ti + Ta)─and we study them both in the as-deposited and annealed states. All coatings have been subject to the same annealing of 500 °C for 10 h in air, which is the postdeposition treatment adopted so far for Bragg reflectors in GWD applications. By exploiting spectroscopic ellipsometry data and modeling, along with ancillary techniques, we retrieved the dielectric function of the coatings in a wide spectral range. When varying the mixing ratio and performing the annealing, we find monotonic─in some cases, almost linear─trends for most of the aforementioned properties. Remakably, the postannealing Urbach energy displays a definite minimum for a mixing ratio around 20%, very close to the composition of the coatings showing the lowest optical absorption for GWD applications. We suggest that the observed minimum in the Urbach energy depends not only on the mixing ratio but also on the annealing parameters. On the other hand, the minimum coating loss angle was found to be weakly dependent on the considered measurement frequency and to lie within a rather broad range of Ti content (cation ratios of 21 and 44%), suggesting that the search for an absolute minimum following postdeposition annealing should be rather sought in the study of the best annealing parameters for each specific cation ratio considered. This work constitutes a reference for the optical properties of the amorphous mixed titania-tantala coatings and highlights the relevance of the Urbach energy as an additional parameter to guide the optimization process of materials for high-performing Bragg reflectors.
Integrity signals
Registry
Cites
Statistics
Claims the paper makes
Claims other papers make about this one
Each is checked against this paper’s own text: does it say what the citing paper says it does?
The optimal cation ratio Ti/(Ta + Ti) for the performance of an IBS-deposited Bragg reflector is approximately 21%, as determined by ellipsometry on amorphous oxidic thin films.
“The ellipsometry analysis conducted on the amorphous oxidic thin films concluded that the optimal cation ratio is approximately 21%.”
From Metal Oxide Thin Films for Advanced Photonic Applications (2026) · cites this paper as [51]
Cites
Advanced Virgo: a second-generation interferometric gravitational wave detector
Acernese, F., Agathos, M., Agatsuma, K., Aisa, D., Allemandou, N., Allocca, A., Amarni, J., Astone, P., Balestri, G., Ballardin, G., et al. (2014) · Classical and Quantum Gravity · doi:10.1088/0264-9381/32/2/024001 · Cited by 4,058 · see citing works
Self-citationLudlow, A. D., Boyd, M. M., Ye, J., Peik, E., & Schmidt, P. O. (2015) · Reviews of Modern Physics · doi:10.1103/revmodphys.87.637 · Cited by 2,385 · see citing works
Anelastic Relaxation in Crystalline Solids
(1972) · Elsevier eBooks · doi:10.1016/b978-0-12-522650-9.x5001-0 · Cited by 2,248 · see citing works
Fujiwara, H. (2007) · Wiley eBooks · doi:10.1002/9780470060193 · Cited by 1,627 · see citing works
Characterization of the LIGO detectors during their sixth science run
Aasi, J., Abadie, J., Abbott, B. P., et al. (2015) · Classical and Quantum Gravity · doi:10.1088/0264-9381/32/11/115012 · Cited by 1,303 · see citing works
Science case for the Einstein telescope
Maggiore, M., Broeck, C. V. D., Bartolo, N., Belgacem, E., Bertacca, D., Bizouard, M. A., Branchesi, M., Clesse, S., Foffa, S., García-Bellido, J., et al. (2020) · Journal of Cosmology and Astroparticle Physics · doi:10.1088/1475-7516/2020/03/050 · Cited by 1,257 · see citing works
Interferometer design of the KAGRA gravitational wave detector
Aso, Y., Michimura, Y., Somiya, K., et al. (2013) · Physical review. D. Particles, fields, gravitation, and cosmology/Physical review. D. Particles and fields · doi:10.1103/physrevd.88.043007 · Cited by 1,053 · see citing works
Science case for the Einstein telescope
Maggiore, M., Broeck, C. V. D., Bartolo, N., Belgacem, E., Bertacca, D., Bizouard, M. A., Branchesi, M., Clesse, S., Foffa, S., García-Bellido, J., et al. (2020) · Utrecht University Repository (Utrecht University) · Cited by 944 · see citing works
1.5 μ m Lasers with Sub-10 mHz Linewidth
Matei, D. G., Legero, T., Häfner, S., Grebing, C., Weyrich, R., Zhang, W., Sonderhouse, L., Robinson, J. M., Ye, J., Riehle, F., et al. (2017) · Physical Review Letters · doi:10.1103/physrevlett.118.263202 · Cited by 575 · see citing works
Ferlauto, A. S., Ferreira, G. M., Pearce, J. M., et al. (2002) · Journal of Applied Physics · doi:10.1063/1.1497462 · Cited by 561 · see citing works
On a Theorem of Irreversible Thermodynamics
Callen, H. B., & Greene, R. F. (1952) · Physical Review · doi:10.1103/physrev.86.702 · Cited by 541 · see citing works
An asymmetric double-well potential model for structural relaxation processes in amorphous materials
Gilroy, K. S., & Phillips, W. A. (1981) · Philosophical Magazine B · doi:10.1080/01418638108222343 · Cited by 339 · see citing works
Kaiser, N., & Pulker, H. K. (2003) · Springer series in optical sciences/SPringer series in optical sciences · doi:10.1007/978-3-540-36386-6 · Cited by 312 · see citing works
Optical Properties of Crystalline and Amorphous Semiconductors
Adachi, S. (1999) · Springer eBooks · doi:10.1007/978-1-4615-5241-3 · Cited by 252 · see citing works
Titania-doped tantala/silica coatings for gravitational-wave detection
Harry, G. M., Abernathy, M. R., Becerra-Toledo, A. E., Armandula, H., Black, E., Dooley, K., Eichenfield, M., Nwabugwu, C., Villar, A., Crooks, D. R. M., et al. (2006) · Classical and Quantum Gravity · doi:10.1088/0264-9381/24/2/008 · Cited by 244 · see citing works
Self-citationAbsorption edge, band tails, and disorder of amorphous semiconductors
Zanatta, A. R., & Chambouleyron, I. E. (1996) · Physical review. B, Condensed matter · doi:10.1103/physrevb.53.3833 · Cited by 209 · see citing works
Atomistic Origin of Urbach Tails in Amorphous Silicon
Pan, Y. M., Inam, F., Zhang, M., et al. (2008) · Physical Review Letters · doi:10.1103/physrevlett.100.206403 · Cited by 142 · see citing works
Infrared Ellipsometry on Semiconductor Layer Structures
Schubert, M. M. (2005) · Springer tracts in modern physics · doi:10.1007/b11964 · Cited by 142 · see citing works
Mirrors used in the LIGO interferometers for first detection of gravitational waves
Pinard, L., Michel, C., SASSOLAS, B., Balzarini, L., Degallaix, J., Dolique, V., Flaminio, R., Forest, D., Granata, M., Lagrange, B., et al. (2016) · Applied Optics · doi:10.1364/ao.56.000c11 · Cited by 129 · see citing works
Self-citationAmorphous optical coatings of present gravitational-wave interferometers*
Granata, M., Amato, A., Balzarini, L., Canepa, M., Degallaix, J., Forest, D., Dolique, V., Mereni, L. O., Michel, C., Pinard, L., et al. (2020) · Classical and Quantum Gravity · doi:10.1088/1361-6382/ab77e9 · Cited by 123 · see citing works
Self-citationSpectroscopic Ellipsometry: Practical Application to Thin Film Characterization
Tompkins, H. G., & Hilfiker, J. N. (2015) · Cited by 115 · see citing works
Mechanical loss in state-of-the-art amorphous optical coatings
Granata, M., Saracco, E., Morgado, N., et al. (2016) · Physical review. D/Physical review. D. · doi:10.1103/physrevd.93.012007 · Cited by 91 · see citing works
Self-citationA “gentle” nodal suspension for measurements of the acoustic attenuation in materials
Cesarini, E., Lorenzini, M., Campagna, E., Martelli, F., Piergiovanni, F., VETRANO, F., Losurdo, G., & Gianpietro Cagnoli, C. (2009) · Review of Scientific Instruments · doi:10.1063/1.3124800 · Cited by 80 · see citing works
Concentration dependence of the dielectric constant in mixed oxides MxOyMp′Oq
Devine, R. A. B., & Revesz, A. G. (2001) · Journal of Applied Physics · doi:10.1063/1.1375806 · Cited by 76 · see citing works
Low-loss dielectric mirror with ion-beam-sputtered TiO_2–SiO_2 mixed films
Chao, S., Wang, W.-H., & Lee, C.-C. (2001) · Applied Optics · doi:10.1364/ao.40.002177 · Cited by 75 · see citing works
Vajente, G., Yang, L., Davenport, A., Fazio, M., Ananyeva, A., Zhang, L., Billingsley, G., Prasai, K., Markosyan, A. S., Bassiri, R., et al. (2021) · Physical Review Letters · doi:10.1103/physrevlett.127.071101 · Cited by 69 · see citing works
Urbach tails of amorphous silicon
Drabold, D. A., Li, Y., Cai, B., et al. (2011) · Physical Review B · doi:10.1103/physrevb.83.045201 · Cited by 57 · see citing works
Granata, M., Amato, A., Gianpietro Cagnoli, C., Coulon, M., Degallaix, J., Forest, D., Mereni, L. O., Michel, C., Pinard, L., SASSOLAS, B., et al. (2020) · Applied Optics · doi:10.1364/ao.377293 · Cited by 55 · see citing works
Self-citationAmato, A., Terreni, S., Granata, M., Michel, C., SASSOLAS, B., Pinard, L., Canepa, M., & Gianpietro Cagnoli, C. (2020) · Scientific Reports · doi:10.1038/s41598-020-58380-1 · Cited by 50 · see citing works
Self-citationMolecular dynamics modeling of mechanical loss in amorphous tantala and titania-doped tantala
Trinastic, J. P., Hamdan, R., Billman, C. R., et al. (2016) · Physical review. B./Physical review. B · doi:10.1103/physrevb.93.014105 · Cited by 45 · see citing works
Structure and morphology of low mechanical loss TiO2-doped Ta2O5
Fazio, M., Vajente, G., Ananyeva, A., Markosyan, A. S., Bassiri, R., Fejer, M. M., & Menoni, C. S. (2020) · Optical Materials Express · doi:10.1364/ome.395503 · Cited by 42 · see citing works
Bundesmann, C., Lautenschläger, T., Spemann, D., Finzel, A., Thelander, E., Mensing, M., & Frost, F. (2016) · Applied Surface Science · doi:10.1016/j.apsusc.2016.08.056 · Cited by 41 · see citing works
Prasai, K., Jiang, J., Mishkin, A. S., Shyam, B., Angelova, S. V., Birney, R., Drabold, D. A., Fazio, M., Gustafson, E. K., Harry, G. M., et al. (2019) · Physical Review Letters · doi:10.1103/physrevlett.123.045501 · Cited by 40 · see citing works
Amato, A., Terreni, S., Dolique, V., Forest, D., Gemme, G., Granata, M., Mereni, L. O., Michel, C., Pinard, L., SASSOLAS, B., et al. (2019) · Journal of Physics Materials · doi:10.1088/2515-7639/ab206e · Cited by 39 · see citing works
Self-citationOptical properties of amorphous SiO2-TiO2 multi-nanolayered coatings for 1064-nm mirror technology
Magnozzi, M., Terreni, S., Anghinolfi, L., Uttiya, S., Carnasciali, M. M., Gemme, G., Neri, M., Principe, M., Pinto, I. M., Kuo, L.-C., et al. (2017) · Optical Materials · doi:10.1016/j.optmat.2017.09.043 · Cited by 38 · see citing works
Self-citationThe VIRGO large mirrors: a challenge for low loss coatings
Beauville, F., Buskulic, D., Flaminio, R., et al. (2004) · Classical and Quantum Gravity · doi:10.1088/0264-9381/21/5/083 · Cited by 36 · see citing works
Low-frequency internal friction in silica glass
Travasso, F., Amico, P., Bosi, L., et al. (2007) · Europhysics Letters (EPL) · doi:10.1209/0295-5075/80/50008 · Cited by 35 · see citing works
Advanced Virgo: Status of the Detector, Latest Results and Future Prospects
Bersanetti, D., Patricelli, B., Piccinni, O. J., et al. (2021) · Universe · doi:10.3390/universe7090322 · Cited by 35 · see citing works
Amorphous tantala and its relationship with the molten state
Alderman, O. L. G., Benmore, C. J., Neuefeind, J. C., et al. (2018) · Physical Review Materials · doi:10.1103/physrevmaterials.2.043602 · Cited by 33 · see citing works
Large-scale passive laser gyroscope for earth rotation sensing
Liu, K., Zhang, F. L., Li, Z. Y., et al. (2019) · Optics Letters · doi:10.1364/ol.44.002732 · Cited by 33 · see citing works
Fazio, M., Vajente, G., Yang, L., Ananyeva, A., & Menoni, C. S. (2022) · Physical review. D/Physical review. D. · doi:10.1103/physrevd.105.102008 · Cited by 32 · see citing works
TiO_2-Ta_2O_5 composite thin films deposited by radio frequency ion-beam sputtering
Lee, C.-C., & Tang, C.-J. (2006) · Applied Optics · doi:10.1364/ao.45.009125 · Cited by 31 · see citing works
Mode-dependent mechanical losses in disc resonators
Cagnoli, G., Lorenzini, M., Cesarini, E., et al. (2017) · Physics Letters A · doi:10.1016/j.physleta.2017.05.065 · Cited by 31 · see citing works
Self-citationAmato, A., Gianpietro Cagnoli, C., Granata, M., SASSOLAS, B., Degallaix, J., Forest, D., Michel, C., Pinard, L., Demos, N., Gras, S., et al. (2021) · Physical review. D/Physical review. D. · doi:10.1103/physrevd.103.072001 · Cited by 31 · see citing works
Self-citationCorrelated evolution of structure and mechanical loss of a sputtered silica film
Granata, M., Coillet, É., Martinez, V., Dolique, V., Amato, A., Canepa, M., Margueritat, J., Martinet, C., Mermet, A., Michel, C., et al. (2018) · Physical Review Materials · doi:10.1103/physrevmaterials.2.053607 · Cited by 29 · see citing works
Self-citationExploration of co-sputtered Ta2O5–ZrO2 thin films for gravitational-wave detectors
Abernathy, M. R., Amato, A., Ananyeva, A., Angelova, S. V., Baloukas, B., Bassiri, R., Billingsley, G., Birney, R., Gianpietro Cagnoli, C., Canepa, M., et al. (2021) · Classical and Quantum Gravity · doi:10.1088/1361-6382/ac1b06 · Cited by 29 · see citing works
Self-citationGranata, M., Balzarini, L., Degallaix, J., et al. (2015) · Archives of Metallurgy and Materials · doi:10.1515/amm-2015-0060 · Cited by 25 · see citing works
Self-citationOptical properties of uniform, porous, amorphous Ta2O5coatings on silica: temperature effects
Anghinolfi, L., Prato, M., Chtanov, A., et al. (2013) · Journal of Physics D Applied Physics · doi:10.1088/0022-3727/46/45/455301 · Cited by 24 · see citing works
Spectroscopic ellipsometry from 10 to 700 K
Zollner, S., Abadizaman, F., Emminger, C., et al. (2022) · Advanced Optical Technologies · doi:10.1515/aot-2022-0016 · Cited by 23 · see citing works
Remarkably stable amorphous metal oxide grown on Zr-Cu-Be metallic glass
Lim, K. R., Kim, C.-E., Yun, Y. S., et al. (2015) · Scientific Reports · doi:10.1038/srep18196 · Cited by 20 · see citing works
Hidden structure in amorphous solids
Inam, F., Lewis, J. P., & Drabold, D. A. (2010) · physica status solidi (a) · doi:10.1002/pssa.200982877 · Cited by 19 · see citing works
Solid-state dewetting of thin Au films studied with real-time, in situ spectroscopic ellipsometry
Magnozzi, M., Bisio, F., & Canepa, M. (2016) · Applied Surface Science · doi:10.1016/j.apsusc.2016.09.115 · Cited by 19 · see citing works
Self-citationPaolone, A., Placidi, E., Stellino, E., Betti, M. G., MAJORANA, E., Mariani, C., Nucara, A., Palumbo, O., Postorino, P., Rago, I., et al. (2021) · Journal of Non-Crystalline Solids · doi:10.1016/j.jnoncrysol.2021.120651 · Cited by 19 · see citing works
Self-citationAmato, A., Terreni, S., Granata, M., Michel, C., Pinard, L., Gemme, G., Canepa, M., & Gianpietro Cagnoli, C. (2019) · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · doi:10.1116/1.5122661 · Cited by 17 · see citing works
Self-citationA Surface Scientist’s View on Spectroscopic Ellipsometry
Canepa, M. (2013) · Springer series in surface sciences · doi:10.1007/978-3-642-34243-1_4 · Cited by 12 · see citing works
Self-citationThapa, R., Prasai, K., Bassiri, R., et al. (2022) · Physical review. B./Physical review. B · doi:10.1103/physrevb.105.224207 · Cited by 5 · see citing works
High thermal stability of the amorphous oxide in Ti44.5Cu44.5Zr7Be4 metallic glass
Park, S. H., Lim, K. R., Na, M. Y., et al. (2015) · AIP Advances · doi:10.1063/1.4935263 · Cited by 4 · see citing works
Flagged first, then by citations
Cited by
Sorted by citations
Mirror Coating Research and Developments for Current and Future Gravitational-Wave Detectors
Amato, A., Magnozzi, M., & Wöhler, J. (2025) · Advanced Photonics Research · doi:10.1002/adpr.202400117 · Cited by 9 · see citing works
Self-citationMetal Oxide Thin Films for Advanced Photonic Applications
Stîngescu, M.-L., Șopronyi, M.-A., Antohe, Ș., & Scărișoreanu, N.-D. (2026) · Crystals · doi:10.3390/cryst16030164 · Cited by 2 · see citing works
- Authors
- Amato, A., Magnozzi, M., Shcheblanov, N., Lemaître, A., Cagnoli, G., Granata, M., Michel, C., Gemme, G., Pinard, L., & Canepa, M.
- Affiliations
- Lyon 1 Université (FR)
- Istituto Nazionale di Fisica Nucleare, Sezione di Genova (IT)
- Centre National de la Recherche Scientifique (FR)
- Navier, Ecole des Ponts, Univ Gustave Eiffel, CNRS, F-77420Marne-la-Vallée, France
- Université de Lyon, Université Claude Bernard Lyon 1, CNRS, Institut Lumiére Matière, F-69622Villeurbanne, France
- University of Genoa (IT)
- Corresponding author
- Amato, Alex
- Magnozzi, Michele
- ORCID
- Venue
- ACS Applied Optical Materials
- Publisher
- American Chemical Society (ACS)
- Published
- 2023-01-11
- Volume
- 1
- Issue
- 1
- Pages
- 395-402
- ISSN
- 2771-9855 (ISSN-L)
- OpenAlex
- W4315645330
- Cited by
- 11
- References
- 57
- Citations by year
- 2025: 6 · 2024: 3 · 2023: 2
- FWCI
- 0.76
- Type
- journal article
- Language
- en
- Open access
- hybrid
- doi.org
- Licence
- Locations
- ACS Applied Optical Materials (publishedVersion, cc-by)
- HAL (submittedVersion)
- Research Publications (Maastricht University) (submittedVersion, cc-by)
- CINECA IRIS Institutial Research Information System (University of Genoa) (submittedVersion)
- Padua Research Archive (University of Padova) (submittedVersion)
- Funders
- Agence Nationale de la Recherche (ViSIONs ANR-18-CE08-0023-03)
- Ministero dell'Universit? e della Ricerca (Dipartimenti di Eccellenza 2017-2022 - DIFILAB)
- Virgo Coating R&D Collaboration
- Topics
- Physical Sciences › Materials Science › Surfaces, Coatings and Films › Optical Coatings and Gratings
- Physical Sciences › Physics and Astronomy › Astronomy and Astrophysics › Pulsars and Gravitational Waves Research
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Mechanical and Optical Resonators
- Keywords
- distributed Bragg reflector, gravitational wave detectors, ion beam sputtering, post-deposition annealing, Urbach energy, optical absorption, mechanical losses, dielectric function, loss angle
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review