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Phase-Engineered Synthesis of Centimeter-Scale 1T′- and 2H-Molybdenum Ditelluride Thin Films
Abstract
We report the synthesis of centimeter-scale, uniform 1T'- and 2H-MoTe2 thin films via the tellurization of Mo thin films. 1T'-MoTe2 was initially grown and converted gradually to 2H-MoTe2 over a prolonged growth time under a Te atmosphere. Maintaining excessive Te was essential for obtaining the stable stoichiometric 2H-MoTe2 phase. Further annealing under a lower partial pressure of Te at the same temperature, followed by a rapid quenching, led to the reverse phase transition from 2H-MoTe2 to 1T'-MoTe2. The orientation of the 2H-MoTe2 film was determined by the tellurization rate. Slow tellurization was the key for obtaining a highly oriented 2H-MoTe2 film over the entire area, while fast tellurization led to a 2H-MoTe2 film with a randomly oriented c-axis.
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Metadata
- Authors
- Park, J. C., Yun, S. J., Kim, H., Park, J.-H., Chae, S. H., An, S.-J., Kim, J.-G., Kim, S. M., Kim, K. K., & Lee, Y. H.
- Venue
- ACS Nano
- Publisher
- American Chemical Society (ACS)
- Published
- 2015-06-11
- Volume
- 9
- Issue
- 6
- Pages
- 6548-6554
- ISSN
- 1936-0851 (ISSN-L)
- 1936-086X
- OpenAlex
- W650150728
- Cited by
- 270
- References
- 36
- FWCI
- 11.32
- Type
- journal article
- Language
- en
- Open access
- closed
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