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Cited by 221

The DOI matches its Crossref record; 8 of the 8 references it cites were found in a registry or an index.

Multimodal Sensing with a Three-Dimensional Piezoresistive Structure

Won, Sang Min, Wang, Heling, Kim, Bong Hoon, Lee, KunHyuck, Jang, Hokyung, Kwon, Kyeongha, Han, Mengdi, Crawford, Kaitlyn E., Li, Haibo, Lee, Yechan, Yuan, Xuebo, Kim, Sung Bong, Oh, Yong Suk, Jang, Woo Jin, Lee, Jong Yoon, Han, Seungyong, Kim, Jeonghyun, Wang, Xueju, Xie, Zhaoqian, Zhang, Yihui, Huang, Yonggang, Rogers, John A.·2019·ACS Nano

Abstract

Sensors that reproduce the complex characteristics of cutaneous receptors in the skin have important potential in the context of artificial systems for controlled interactions with the physical environment. Multimodal responses with high sensitivity and wide dynamic range are essential for many such applications. This report introduces a simple, three-dimensional type of microelectromechanical sensor that incorporates monocrystalline silicon nanomembranes as piezoresistive elements in a configuration that enables separate, simultaneous measurements of multiple mechanical stimuli, such as normal force, shear force, and bending, along with temperature. The technology provides high sensitivity measurements with millisecond response times, as supported by quantitative simulations. The fabrication and assembly processes allow scalable production of interconnected arrays of such devices with capabilities in spatiotemporal mapping. Integration with wireless data recording and transmission electronics allows operation with standard consumer devices.

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Crossref · 10.1021/acsnano.9b02030

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Metadata

Authors
Won, S. M., Wang, H., Kim, B. H., Lee, K., Jang, H., Kwon, K., Han, M., Crawford, K. E., Li, H., Lee, Y., Yuan, X., Kim, S. B., Oh, Y. S., Jang, W. J., Lee, J. Y., Han, S., Kim, J., Wang, X., Xie, Z., Zhang, Y., Huang, Y., & Rogers, J. A.
Venue
ACS Nano
Published
2019-05-24
Volume
13
Issue
10
Pages
10972-10979
ISSN
  • 1936-0851 (ISSN-L)
  • 1936-086X
OpenAlex
W2946031578
Cited by
221
References
8
FWCI
8.81
Type
journal article
Language
en
Open access
closed

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