Efficient Silicon Metasurfaces for Visible Light

Abstract

Dielectric metasurfaces require high refractive index contrast materials for optimum performance. This requirement imposes a severe restraint; either devices have been demonstrated at wavelengths of 700 nm and above using high-index semiconductors such as silicon, or they use lower index dielectric materials such as TiO 2 or Si 3 N 4 and operate in the visible wavelength regime. Here, we show that the high refractive index of silicon can be exploited at wavelengths as short as 532 nm by demonstrating a crystalline silicon metasurface with a transmission efficiency of 71% at this wavelength and a diffraction efficiency of 95% into the desired diffraction order. The metasurfaces consist of a graded array of silicon posts arranged in a square lattice on a quartz substrate. We show full 2π phase control, and we experimentally demonstrate polarization-independent beam deflection at 532 nm wavelength. Our results open a new way for realizing efficient metasurfaces based on silicon for the technologically all-important display applications.