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Atomic Layer Deposition of Platinum Thin Films
Abstract
Platinum thin films were grown at 300 °C by atomic layer deposition (ALD) using (methylcyclopentadienyl)trimethylplatinum (MeCpPtMe 3 ) and oxygen as precursors. The films had excellent uniformity, low resistivity, and low-impurity contents. Structural studies by X-ray diffraction showed that the films were strongly (111) oriented. Growth rates of 0.45 Å cycle - 1 were obtained with 4 s total cycle times. The film thickness was found to linearly depend on the number of the reaction cycles. Also, the possible reaction mechanism is discussed.
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Citations
Cited by
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
Puurunen, R. L. (2005) · Journal of Applied Physics · doi:10.1063/1.1940727 · Cited by 2,609
Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges
Leskelä, M., & Ritala, M. (2003) · Angewandte Chemie International Edition · doi:10.1002/anie.200301652 · Cited by 1,109
Self-citationPlasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges
Profijt, H. B., Potts, S. E., van de Sanden, M. C. M., & Kessels, W. M. M. (2011) · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · doi:10.1116/1.3609974 · Cited by 907
Atomic layer deposition of transition metals
Lim, B. S., Rahtu, A., & Gordon, R. G. (2003) · Nature Materials · doi:10.1038/nmat1000 · Cited by 657
Advanced carbon aerogels for energy applications
Biener, J., Stadermann, M., Suss, M., Worsley, M. A., Biener, M. M., Rose, K. A., & Baumann, T. F. (2011) · Energy & Environmental Science · doi:10.1039/c0ee00627k · Cited by 651
Metadata
- Authors
- Aaltonen, T., Ritala, M., Sajavaara, T., Keinonen, J., & Leskelä, M.
- Venue
- Chemistry of Materials
- Publisher
- American Chemical Society (ACS)
- Published
- 2003-04-09
- Volume
- 15
- Issue
- 9
- Pages
- 1924-1928
- ISSN
- 0897-4756 (ISSN-L)
- 1520-5002
- OpenAlex
- W1981130398
- Cited by
- 399
- References
- 0
- FWCI
- 8.04
- Type
- journal article
- Language
- en
- Open access
- closed
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- Aaltonen, T., Ritala, M., Sajavaara, T., Keinonen, J., & Leskelä, M. (2003). Atomic Layer Deposition of Platinum Thin Films. Chemistry of Materials. https://doi.org/10.1021/cm021333t
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
