The DOI matches its Crossref record; 6 of the 6 references it cites were found in a registry or an index.
Atomic layer deposition of transition metals
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Citations
Cites
The surface science of metal oxides
(1995) · Materials Characterization · doi:10.1016/1044-5803(95)80013-1 · Cited by 2,372
Suntola, T. (1992) · Thin Solid Films · doi:10.1016/0040-6090(92)90874-b · Cited by 1,367
Alternative dielectrics to silicon dioxide for memory and logic devices
Kingon, A. I., Maria, J.-P., & Streiffer, S. K. (2000) · Nature · doi:10.1038/35023243 · Cited by 1,285
Atomic Layer Deposition of Platinum Thin Films
Aaltonen, T., Ritala, M., Sajavaara, T., Keinonen, J., & Leskelä, M. (2003) · Chemistry of Materials · doi:10.1021/cm021333t · Cited by 399
Ruthenium Thin Films Grown by Atomic Layer Deposition
Aaltonen, T., Alén, P., Ritala, M., & Leskelä, M. (2003) · Chemical Vapor Deposition · doi:10.1002/cvde.200290007 · Cited by 276
Klaus, J. W., Ferro, S. J., & George, S. M. (2000) · Thin Solid Films · doi:10.1016/s0040-6090(99)01076-7 · Cited by 189
Cited by
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
Puurunen, R. L. (2005) · Journal of Applied Physics · doi:10.1063/1.1940727 · Cited by 2,609
High dielectric constant gate oxides for metal oxide Si transistors
Robertson, J. (2006) · Reports on Progress in Physics · doi:10.1088/0034-4885/69/2/r02 · Cited by 1,726
Chandrasekaran, S., Yao, L., Deng, L., Bowen, C., Zhang, Y., Chen, S., Lin, Z., Peng, F., & Zhang, P. (2019) · Chemical Society Reviews · doi:10.1039/c8cs00664d · Cited by 1,199
Alloy catalysts designed from first principles
Greeley, J., & Mavrikakis, M. (2004) · Nature Materials · doi:10.1038/nmat1223 · Cited by 1,156
Synthesis and Surface Engineering of Complex Nanostructures by Atomic Layer Deposition
Knez, M., Nielsch, K., & Niinistö, L. (2007) · Advanced Materials · doi:10.1002/adma.200700079 · Cited by 889
Metadata
- Authors
- Lim, B. S., Rahtu, A., & Gordon, R. G.
- Venue
- Nature Materials
- Published
- 2003-10-26
- Volume
- 2
- Issue
- 11
- Pages
- 749-754
- ISSN
- 1476-1122 (ISSN-L)
- 1476-4660
- OpenAlex
- W2025172217
- Cited by
- 657
- References
- 6
- FWCI
- 15.42
- Type
- journal article
- Language
- en
- Open access
- closed
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- Lim, B. S., Rahtu, A., & Gordon, R. G. (2003). Atomic layer deposition of transition metals. Nature Materials. https://doi.org/10.1038/nmat1000
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
